Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Tribological Behavior of Si-DLC/DLC Coatings with Various Si Contents

Si 함유량에 따른 Si-DLC/DLC 코팅의 건조마찰 특성

  • 안효석 (서울산업대학교 나노아이티공학과)
  • Published : 2007.12.15
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Abstract

Although DLC coatings have good tribological properties, these are dependent on the deposition method, property of contact surface, and test condition. Si-DLC/DLC coatings with various Si content were deposited on Si substrates and tested using a reciprocating friction tester against steel balls. The results revealed that the tribological behavior of Si-DLC/DLC coatings was dependent on the Si content. The formation of transfer film and wear particles on the contact surface was greatly influenced by the Si content in DLC coatings. In particular, silicon oxide transfer film formed by tribochemical reaction contributed to reduce wear and friction.

Keywords

References

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