• 한국표면공학회지
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• 제32권1호
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• pp.3-9
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• 1999

Pt thin film of about 7000$\AA$ thickness was deposited on the alumina substrate using DC Magnetron Sputter and the characteristics of the film for temperature sensor were investigated. When film of about 7000$\AA$ thickness was deposited at working gas pressure of $2.0{\times}10^{-3}$torr, sputtering power of 50W, substrate temperature of $350^{\circ}C$(Ts), sheet resistance(Rs), resistivity($\rho$) and temperature coefficient of resistivity(TCR) of the film were respectively 0.39$\Omega$/$\square$, 27.60$\mu\Omega$-cm and $3350 ppm/^{\circ}C$. When the film was annealed at $1000^{\circ}C$ for 240min in hydrogen ambient, Rs, $\rho$ and TCR were respectively 0.236$\Omega$/$\square$, 15.18$\mu\Omega$-cm and 3716 ppm/$3716 ppm/^{\circ}C$. When working gas of 15sccm oxygen and 100sccm Argon were used, Rs, $\rho$ and TCR were respectively 0.335$\Omega$/$\square$, 22.45$\mu\Omega$-cm and $3427 ppm/^{\circ}C$. When the film was annealed at $1000^{\circ}C$ for 240min, Rs, $\rho$and TCR were respectively 0.224/$\Omega$$\square$, 14$\mu\Omega$-cm and $3760 ppm/^{\circ}C$ and the characteristics of the film were much improved.

• 한국표면공학회지
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• 제48권5호
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• pp.205-210
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• 2015

NbN coatings were prepared by ICP (inductively coupled plasma) assisted magnetron sputtering from a Nb metal target in $Ar+N_2$ atmosphere at various ICP powers. Effect of ICP on the microstructure, crystalline structure and mechanical properties of NbN coatings was investigated by field emission electron microscopy, X-ray diffraction, atomic force microscopy and nanoindentation measurements. The results show that ICP power has a significant influence on coating microstructure, structure and mechanical properties of NbN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Crystalline structure of NbN coatings were changed from cubic ${\delta}$-NbN to hexagonal ${\beta}-Nb_2N$ with increase of ICP power. The maximum nano hardness of 25.4 GPa with Ra roughness of 0.5 nm was obtained from the NbN coating sputtered at ICP power of 200 W.

• 대한금속재료학회지
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• 제50권8호
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• pp.549-556
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• 2012

The tribological behavior of CrMoN films with respect to surface chemistry was investigated by using X-ray photoelectron spectroscopy (XPS). All of the films were prepared from a hybrid PVD system consisting of DC unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) sources. The tribological property of the films was evaluated by a friction coefficient using a Ball-on-disk type tribometer. The chemistry of wear track was analyzed by energy dispersive spectroscopy (EDS) and XPS. The friction coefficient was measured to be 0.4 for the CrMoN film, which is lower than that of a monolithic CrN film. EDS and XPS results imply the formation of an oxide layer on the coating surface, which was identified as molybdenum oxide phases, known to be a solid lubricant during the wear test.

• 한국자기학회지
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• 제5권5호
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• pp.528-532
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• 1995

Ferromagnetic resonance experiments have been used to investigate the magnetic properties of amorphous $Co_{89.5}Zr_{10.5}$ thin films deposited by DC magnetron sputtering method. In the thickness range from $350\;{\AA}$ to $3,200\;{\AA}$, measurements were carried out in a static magnetic field perpendicular and parallel to the film plane and in a conventional 9.44 GHz spectrometer at room temperature. The ferromagnetic resonance spectra by the field perpendicular to the film plane showed standing spin wave. The spacing and the relative intensities between the various spin wave resonance peaks are analysed considering surface magnetic anisotropy. The surface magnetic anisotropy constant ($K_{so},\;K_{sd}$) of amorphous $Co_{89.5}Zr_{10.5}$ thin films are $0.02\;erg/\textrm{cm}^2$ and $0.55\;erg/\textrm{cm}^2$ respectively regardless of the film thickness except for $3,200\;{\AA}$ film. In case of $3,200\;{\AA}$ these values are $0.46\;erg/\textrm{cm}^2$ and $0.55\;erg/\textrm{cm}^2$ respectively.

• Journal of Magnetics
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• 제7권4호
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• pp.151-155
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• 2002

In situ stress changes at interfaces of ultrathin magnetic films were measured by means of a non-contact optical fiber bundle displacement detector. A bending of the substrate due to stress of a deposited film was detected in cantilever geometry. The highest sensitivity of 134 mV/$\mu$m for the displacement detector was realized with a help of computer simulation. The detector was applied to in situ stress measurements of Co/Pt and Ni/Pd magnetic multilayer films prepared on the glass substrates by dc magnetron sputtering. The detector turned out to have a submonolayer sensitivity that enables to observe coherent-to-incoherent transition in these mismatched multilayers and even detect the stress changes within the monoatomic coverage. This highly sensitive detector paves new way to probe the stress relaxation at an interface in ultrathin films.

• Journal of Magnetics
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• 제5권4호
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• pp.139-142
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• 2000

The interlayer coupling between adjacent ferromagnetic layers was examined for CoFe/Cu/NiFe trilayer systems. A series of films of CoFe (20 nm)/Cu($t_{cu}$)/NiFe (20 nm) trilayers with Cu spacer thickness, $t_{cu}$, in the range of 1~10 m was deposited on Si(100) wafers at room temperature by DC magnetron sputtering. In order to understand the dependence of the magnetic interaction between ferromagnetic $Co_{90}Fe_{10}$ (wt.%) and $Ni_{81}Fe_{19}$ (wt.%) layers separated by a nonmagnetic Cu spacer on the Cu layer thickness, we investigated the derivative ferromagnetic resonance (FMR) spectra. The FMR results were analyzed using the model of Layadi and Art-man for interlayer interaction. The interlayer coupling constant decreases in an oscillatory manner as the Cu spacer thickness increases up to 10 nm and approaches zero above 10 nm. The interlayer coupling constant is positive for all samples. Hence, it seems that the exchange coupling between adjacent CoFe and NiFe layers separated by a Cu layer is ferromagnetic.

• 한국표면공학회지
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• 제52권3호
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• pp.145-149
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• 2019

Transparent and conductive ZnO/Ag/SnO2 (ZAS) tri-layer films were deposited onto glass substrates at room temperature by using radio frequency (RF) and direct current (DC) magnetron sputtering. The thickness values of the ZnO and $SnO_2$ thin films were kept constant at 50 nm and the value for Ag interlayer was varied as 5, 10, 15, and 20 nm. In the XRD pattern the diffraction peaks were identified as the (002) and (103) planes of ZnO, while the (111), (200), (220), and (311) planes could be attributed to the Ag interlayer. The optical transmittance and electrical resistivity were dependent on the thickness of the Ag interlayer. The ZAS films with a 10 nm thick Ag interlayer exhibited a higher figure of merit than the other ZAS films prepared in this study. From the observed results, a ZAS film with a 10 nm thick Ag interlayer was believed to be an alternative transparent electrode candidate for various opto-electrical devices.

• 한국재료학회지
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• 제29권5호
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• pp.297-303
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• 2019

A triple-layered $PMMA/Ni_{64}Zr_{36}/PDMS$ hydrogen gas sensor using hydrogen permeable alloy and flexible polymer layers is fabricated through spin coating and DC-magnetron sputtering. PDMS(polydimethylsiloxane) is used as a flexible substrate and PMMA(polymethylmethacrylate) thin film is deposited onto the $Ni_{64}Zr_{36}$ alloy layer to give a high hydrogen-selectivity to the sensor. The measured hydrogen sensing ability and response time of the fabricated sensor at high hydrogen concentration of 99.9 % show a 20 % change in electrical resistance, which is superior to conventional Pd-based hydrogen sensors, which are difficult to use in high hydrogen concentration environments. At a hydrogen concentration of 5 %, the resistance of electricity is about 1.4 %, which is an electrical resistance similar to that of the $Pd_{77}Ag_{23}$ sensor. Despite using low cost $Ni_{64}Zr_{36}$ alloy as the main sensing element, performance similar to that of existing Pd sensors is obtained in a highly concentrated hydrogen atmosphere. By improving the sensitivity of the hydrogen detection through optimization including of the thickness of each layer and the composition of Ni-Zr alloy thin film, the proposed Ni-Zr-based hydrogen sensor can replace Pd-based hydrogen sensors.

• Journal of Ceramic Processing Research
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• 제22권1호
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• pp.114-120
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• 2021

A hybrid structure of Mn (2.59 wt.%) doped SnO2 (MTO)/Ag/MTO films with refractive index matching layers (IMLs) was deposited on PET substrate by a RF/DC magnetron sputtering method at room temperature. To match the refractive index (n) of MTO/Ag/MTO/PET film, high and low refractive index materials of MTO (n = 2.02) and SiO2 (n = 1.52) were placed between MTO/Ag/MTO and PET substrate, respectively. In order to evaluate the effect of IMLs on the reflectivity and color variation, an optical simulation program, Essential Macleod Program (EMP) was adopted, in advance. From EMP simulation, the multilayer film of MTO (40 nm)/Ag (13 nm)/MTO (40 nm) with optimized IMLs of SiO2 (120 nm)/MTO (10 nm) shows the excellent optical transmittance above 86.1% at the 550 nm wavelength, and the pattern visible defect was reduced as compared with the reference film of MTO/Ag/MTO/PET film without IMLs. From the bending test, the multilayer film of MTO (40 nm)/Ag (13 nm)/MTO (40 nm)/SiO2 (90 nm)/MTO (10 nm)/PET showed excellent flexible properties. There was only 10% resistance variation under 10,000 bending cycle with curvature radius of 5 mm.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.179-179
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• 2016

희토류계 영구자석은 높은 보자력과 잔류 자화을 가지고 있어 자기기록저장매체, MEMS(엑츄에이터), 센서 등의 응용 분야에 적용시키기 위해 다양한 연구들이 진행되고 있다. 하지만 희토류계 원소의 수급 및 가격의 문제점으로 친환경자석으로의 전환 및 희토류나 중희토류를 사용하지 않는 비희토류계 영구자석을 개발하는 연구에 대한 필요성이 대두되고 있다. 이 중 Fe-N 계 자성 물질인 $Fe_{16}N_2$는 포화 자화 값이 현재까지의 자성물질 중 가장 높은 값(240emu/g)을 나타내며 상대적으로 높은 결정자기이방성 상수를 가지고 있어 비희토류계 영구자석 물질 중 하나로 주목받고 있다. 본 연구에서는 $Fe_{16}N_2$ 박막을 얻기 위해 DC Magnetron Sputtering 방법을 이용하여 Si wafer 위에 박막을 증착하고 증착공정 조건 중 질소 유량 및 Sputtering Power를 변수로 따른 박막의 성장, 조직변화, 자성 특성을 관찰을 통해 최적의 공정 조건을 찾고자 하였다. $N_2$ 가스 유량 변화에 따른 박막의 성장 속도는 거의 변화가 없었으며 $N_2$ 가스 유량의 증가에 따라 박막 내 Fe의 함유량은 감소하였다. 모든 공정 조건에서 $Fe_3N$, $Fe_4N$, $Fe_{16}N_2$ 상들이 섞여 성장하였으며 XRD를 통한 상분석과 더불어 VSM을 통한 자성 특성을 분석해본 결과 $Fe_{16}N_2$의 분율이 가장 높게 성장된 공정 조건은 Power는 200W, $N_2$ 가스 유량은 20sccm이었으며 이 조건에서 2.45T의 포화 자화 값과 1.4T의 잔류 자화 값을 얻을 수 있었다.