• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.61 no.5
• /
• pp.717-720
• /
• 2012

Various types of dielectric-barrier-discharge (DBD) devices have been developed for diverse applications for the last decade. In this study, a flat non-thermal DBD micro plasma source under atmospheric pressure has been developed. The flat-panel type plasma is generated by bipolar pulse voltages, and driving gas is air. In this study, the plasma source was investigated with intensified charge coupled device (ICCD) images and Optical Emission Spectroscopy (OES). The micro discharges are generated on the crossed electrodes. For theoretical analysis, 2-dimensional fluid simulation was performed. The plasma source can be driven in air, and thus the operation cost is low and the range of application is wide.

• Journal of the Korea Convergence Society
• /
• v.13 no.3
• /
• pp.281-289
• /
• 2022

Plasma ozone is utilized in a variety of applications in the field of sterilization due to its high sterilization performance. Dielectric materials used in DBD(dielectric barrier discharges) are mainly polymer, quartz and ceramics. These dielectric layers have the advantage of limiting the amount of supplied electron charge and allowing plasma to occur evenly on the surface of dielectric. Actually, the target or environment for sterilization is often a complex structure, so research and academic study are needed by utilizing the concept of space sterilization. In this study, the device is applied to generate DBD plasma at atmospheric pressure for disinfection due to the effectiveness in producing radicals and ozone. The generator of plasma ozone is a basic structure of dielectric barrier discharge by placing ceramic tube dielectrics and stainless steel electrical conductors at regular intervals. Various applications can be developed based on the proposed design method. Plasma ozone generation for space sterilization device is recognized as an excellent sterilization device. Through the design and verification of the device, we intend to establish an optimal design of the spatial sterilization device and provide the basis data for sterilization applications.

• Journal of electromagnetic engineering and science
• /
• v.17 no.3
• /
• pp.153-158
• /
• 2017

This work reports on the effect of plasma area on the frequency characteristics of the monostatic radar cross section (RCS) of a square metallic plate. A dielectric barrier discharge (DBD) plasma actuator consisting of 10 rings is proposed. The actuator is fabricated in three different configurations such that only three inner rings, seven inner rings, and all rings can be biased. By applying an 18-kV bias at 1 kHz, the three types of DBD actuators generate plasma with a total area of 16.96, 36.74, and $53.69cm^2$, respectively, in a ring or circular form. The experimental results reveal that when the DBD actuator is placed in front of a $20mm{\times}20cm$ conducting plate, the monostatic RCS is reduced by as much as 18.5 dB in the range of 9.41-11.65 GHz. Furthermore, by generating the plasma and changing the area, the frequency of maximum reduction in the monostatic RCS of the plate can be controlled. The frequency is reduced by nearly 20% in the X band when all rings are biased. Finally, an electromagnetic model of the plasma is obtained by comparing the experimental and full-wave simulated results.

• Journal of the Korean Society of Combustion
• /
• v.10 no.4
• /
• pp.24-32
• /
• 2005

Various types of plasma source applied in $CH_4$ decomposition process are compared. DBD by pulse and AC power, spark by pulse and AC power, rotating arc and hollow cathode plasma are chosen to be compared. The results show that $CH_4$ conversion per given unit power is relatively high in hollow cathode plasma and rotating arc that induces rather high temperature condition and that is why both thermal dehydration and plasma induced decomposition contribute for the overall process. In case of DBD wherein high temperature electron and low temperature gas molecule coexist, the process shows low conversion rate, for in rather low temperature condition the contribution of thermal dehydration is lowered. Selectivity of $C_2H_6$ and $C_2H_2$ is shown to be a good parameter of the relative contribution of plasma chemistry in the overall process. From the results we concluded that required condition of plasma source for a cost effective and high yield $CH_4$ decomposition is to have characteristics of both thermal plasma and non thermal plasma in which temperature is high above a certain threshold state for thermal dehydration and electron induced collision is maximized in the same breath.

• Corrosion Science and Technology
• /
• v.4 no.6
• /
• pp.222-225
• /
• 2005

The adhesion strength of metal plating on PC was studied. In this study, surface was treated by chemical agents or DBD(dielectric barrier discharge) plasma to imporve the adhesion. The surface roughness, contact angle, gloss of plating and adhesive strength were measured. Adhesion strengths of Ni plating on prepared PC by NaOH and KOH solution were $12.3kgf/cm^2$ and $7.5kgf/cm^2$, respectively. The highest adhesion strength was obtained in the plasma treated one, $27.8kgf/cm^2$.

• Journal of the Korea Institute of Military Science and Technology
• /
• v.5 no.3
• /
• pp.105-112
• /
• 2002

A combined process of non-thermal plasma and catalytic techniques has been investigated to treat toxic gas compounds in air. The treated gas in the present study is $CH_3$CN that has been known to be a simulant of toxic chemical agent. A planar type dielectric barrier discharge(DBD) reactor has been used to generate non-thermal plasma that produces various chemically active species, O, N, OH, $O_3$, ion, electrons, etc. Several different types of adsorbents and catalysts, which are MS 5A, MS 13X, Pt/alumina, are packed into the plasma reactor, and have been tested to save power consumption and to treat by-products. Various aspects of the present techniques, which are decomposition efficiencies along with the power consumption, by-product analysis, reaction pathways modified by the adsorbents and catalysts, have been discussed in the present study.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2009.10a
• /
• pp.1500-1503
• /
• 2009

In this paper, we studied about atmospheric pressure remote plasma ashing of photoresist(PR), by using a modified dielectric barrier discharge(DBD). The effect of various gas combinations such as $N_2/O_2$, $N_2/O_2+SF_6$ on the changes PR ashing rate was investigated as a function of power. The maximum PR ashing rate of 1850 nm/min was achieved at $N_2$ (70 slm)/ $O_2$ (200 sccm) + $SF_6$ (3 slm). We found that as the oxygen and fluorine radical peaks were increased, the ashing rate is increased, too.

• Journal of the Microelectronics and Packaging Society
• /
• v.16 no.3
• /
• pp.53-59
• /
• 2009

Low pressure mercury lamp type UV equipments have been widely used for cleaning and modification of PCB surfaces. To enhance the productivity of the process, we newly developed remote DBD type atmospheric pressure plasma equipment. The productivity of both equipments could be compared by measuring surface contact angle for various transferring speed. By the result of the measurement, we could verify that the productivity of the atmospheric pressure plasma be superior to the productivity of the UV equipment. XPS experiments confirmed that the surface effect of the UV and atmospheric pressure plasma processing are similar for each other. Organic contamination level was reduced after the processing and some surface elements were oxidized for both cases. Finally, the atmospheric pressure plasma equipment was adapted to flip chip BGA's flux printing process and it was concluded that the printing uniformity be enhanced by the atmospheric pressure plasma surface treatment.

• Journal of Korean Society of Water and Wastewater
• /
• v.34 no.1
• /
• pp.75-83
• /
• 2020

This study investigated the degradation characteristics and biodegradability of phenol, refractory organic matters, by injecting MgO and CaO-known to be catalyst materials for the ozonation process-into a Dielectric Barrier Discharge (DBD) plasma. MgO and CaO were injected at 0, 0.5, 1.0, and 2 g/L, and the pH was not adjusted separately to examine the optimal injection amounts of MgO and CaO. When MgO and CaO were injected, the phenol decomposition rate was increased, and the reaction time was found to decrease by 2.1 to 2.6 times. In addition, during CaO injection, intermediate products combined with Ca²⁺ to cause precipitation, which increased the COD (chemical oxygen demand) removal rate by approximately 2.4 times. The biodegradability of plasma treated water increased with increase in the phenol decomposition rate and increased as the amount of the generated intermediate products increased. The biodegradability was the highest in the plasma reaction with MgO injection as compared to when the DBD plasma pH was adjusted. Thus, it was found that a DBD plasma can degrade non-biodegradable phenols and increase biodegradability.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.176-177
• /
• 2016

In the last few decades, attention toward atmospheric pressure plasma (APP) has been greatly increased due to the numerous advantages of those applications, such as non-necessity of high vacuum facility, easy setup and operation, and low temperature operation. The practical applications of APP can be found in a wide spectrum of fields from the functionalization of material surfaces to sterilization of medical devices. In the secondary battery industry, separator film has been typically treated by APP to enhance adhesion strength between adjacent films. In this process, the plasma is required to have high stability and uniformity for better performance of the battery. Dielectric barrier discharge (DBD) was usually adopted to limit overcurrent in the plasma, and we developed the pre-discharge technology to overcome the drawbacks of streamer discharge in the conventional DBD source which makes it possible to produce a super-stable plasma at atmospheric pressure. Simulations for the fluid flow and electric field were parametrically performed to find the optimized design for the linear jet plasma source. The developed plasma source (Plasmapp LJPS-200) exhibits spatial non-uniformity of less than 3%, and the adhesion strength between the separator and electrode films was observed to increase 17% by the plasma treatment.