• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.1
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• pp.82-86
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• 2018

Low voltage atmospheric plasma generation using DBD Initiation carrier injection is reported. DBD afterglow was used as initiation carriers prior to a primary discharge and a significant reduction in the breakdown voltage of atmospheric discharge was observed when sufficient initiation carriers were provided. Quantative correlation study between the breakdown voltage and the initiation carriers suggests that the atmospheric breakdown voltage reduces to only half of the breakdown voltage for Townsend regime. Also, use of DBD initiation carrier injection likely offers better device reliability by protecting electrodes with a dielectric layer and thus suppressing electrode wear.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.226-226
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• 2011

소형 대기압 플라즈마 소스는 그 형태에 따라 DBD (Dielectric Barrier Discharge)나 Plasma Needle, 혹은 Plasma Jet 등으로 구별되며, 구동 파형의 특성에 따라 DC, RF (Radio Frequency), 혹은 Pulsed 방식 등으로 나뉜다. 또한 코로나 방전도 소형 대기압 플라즈마 장치에서 사용된다. DBD는 1857년 Siemens에 의해 최초로 보고 되었고 산업 분야에서 대규모로 사용되어 왔다. 본 연구에서는 대향 방전 DBD 대신 유전체 양쪽 면에 전극이 도포된 면방전 형태의 DBD 구조 내부로 He 가스가 흐를 때의 방전에 대한 광학적 진단을 수행하였다. 전극간의 거리와 가스 유속의 변화에 따라 방전 특성이 어떻게 달라지에 대해서 Optical Emission Spectroscopy (OES)를 통하여 생성되는 radical 종의 변화를 측정하고 ICCD (intensified charge coupled device) image를 통해 방전이 시간에 따라 어떻게 진행되는지를 진단하였다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2012.05a
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• pp.290-293
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• 2012

The analysis and performance evaluation of DBD actuator for plasma flow control was described. The experimental apparatus was designed to measure the flow velocity as the discharge conditions, and to find out the optimal discharge condition of the DBD actuator. The average-velocity increased with increasing the discharge voltage. The experimental results was compared with CFD analysis.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.3
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• pp.324-330
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• 2013

This paper presented measurement results of scattering characteristics of dielectric barrier discharge (DBD) plasma at atmospheric pressure. In this paper, plasma actuator is fabricated by parallel connecting of basic configuration of DBD plasma actuator, then plasma could be generated by applying 14 kV, 4 kHz of high voltage generator. In order to measure the scattering characteristics of DBD plasma, in this paper, two horn antennas and vector network analyzer are used to compare the S-parameter. Because of the structure of fabricated plasma generator, different result is obtained as antenna polarization changes. When antenna polarization is parallel to electrodes of plasma generator, the scattered field is reduced by 2 dB in maximum. In addition, for parallel polarization case, PEC is set up behind the plasma generator to measure backward scattered field. When the observation angles are $40^{\circ}C$ and $60^{\circ}C$, the amount of reduced scattered field is 2 dB in maximum at 5 GHz.

• Journal of the Semiconductor & Display Technology
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• v.17 no.2
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• pp.16-19
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• 2018

The development speed of semiconductor and display device manufacturing technology is growing faster than the development speed of process equipment. So, there is a growing need for process diagnostic technology that can measure process conditions in real time and directly. In this study, a plasma diagnosis was carried out using impedance variation due to the plasma discharge. Variation of the measurement impedance appears as a voltage change at the reference impedance, and the plasma density is calculated using this. The above experiment was conducted by integrating the plasma diagnosis system and the linear atmospheric pressure DBD plasma source. It was confirmed that plasma density varies depending on various parameters (gas flow rate, $Ar/O_2$ mixture ratio, Input power).

• 한국연소학회:학술대회논문집
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• 2014.11a
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• pp.195-198
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• 2014

$Fuel/N_2$ and fuel/air mixtures were treated with non-thermal DBD plasma and the changes in characteristics of laminar diffusion flame have been observed. Flame of $Fuel/N_2$ mixture generated more soot under plasma condition while less amount of soot was formed from fuel/air mixture flame. Luminescence spectrum and gas chromatography results confirmed that plasma energy converts a fraction of fuel molecules into radicals, which then form $C_2$, $C_3$, $C_4$ and higher hydrocarbon under no oxygen condition or turn into CO, $CO_2$ and $H_2O$ when oxygen is present.

• 한국연소학회:학술대회논문집
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• 2015.12a
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• pp.189-192
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• 2015

An experimental study was conducted to find the effect of DBD plasma on the flammability limits of inert-gas-diluted fuel. The results showed that the concentration of diluting nitrogen at flammability limit increased when nitrogen-diluted methane and propane were reformed by plasma, while it decreased when nitrogen-diluted ethylene was reformed by plasma. Gas chromatography results suggested that the fuel type dependence of flammability limits is due to the difference in the concentrations of hydrogen and hydrocarbon species in reformed fuel.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2012.05a
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• pp.527-528
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• 2012

DBD (Dielectric Barrier Discharge) plasma actuator was designed for aerodynamic drag reduction using plasma flow control, and the drag reduction was measured by wind-tunnel tests using 2D test model. At the zero wind velocity, the plasma flow control had no effect on the drag reduction because the flow separation and surface friction drag were not occurred. At the wind velocity of 2m/s, 9.7% of drag was reduced by the flow separation control. The drag reduction decreased as the wind velocity increased.

• The KSFM Journal of Fluid Machinery
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• v.15 no.3
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• pp.46-50
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• 2012

Plasma actuator makes parallel flow on the wall surface by the interaction between plasma and neutral air particles. Dielectric barrier discharge (DBD) plasma actuator is widely studied as one type of plasma actuators, which consists of one electrode exposed to the environmental gas and the other encapsulated by a dielectric material. This paper is experimentally focused on the performance of DBD plasma actuator mounted on a flat plate, which depends on kinds of the electrode materials, their thicknesses and the supplied voltage including its frequency. We measured the velocity magnitudes of the induced flow by a stagnation probe as a performance parameter of the plasma actuators. The velocity profiles of the flow induced by the plasma actuators are similar in all measurement cases. The magnitude of the induced velocity is strongly influenced by the thickness of the electrodes and the frequency of the input voltage. The performance of DBD plasma actuators is related to the electric properties of the electrode materials such as the ionization energy and the electrical resistivity.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.3
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• pp.122-128
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• 2009

DBD(Dielectric Barrier Discharges) plasma is often used to clean the surface of semiconductor. The cleaning performance is affected mainly by plasma density and duration time. In this study, the plasma density is predicted by coupled simulation of flow, chemistry mixing and reaction, plasma, and electric field. 13.56 MHz of RF source is used to generate plasma. The effect of dielectric thickness, gap distance, and flow velocity on plasma density is investigated. It is shown that the plasma density increases as the dielectric thickness decreases and the gap distance increases.