• 한국자기공명학회논문지
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• 제24권1호
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• pp.16-22
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• 2020

Based on quantum transport theory, we investigated theoretically the magnetic field dependence of the quantum optical transition of quasi 2-dimensional Landau splitting system, in CdS and ZnO Through the analysis of the current work, we found the increasing properties of the cyclotron resonance line-profiles (CRLPs) which show the absorption power and the cyclotron resonance line-widths (CRLWs) with the magnetic field in CdS and ZnO We also found that that CRLWs, γ_total(B) of CdS < γ_total(B) of ZnO in the magnetic field region B < 15 Tesla.

• 한국표면공학회지
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• 제25권6호
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• pp.287-292
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• 1992

Silicon nitride thin film (SiNx) was deposited onto the 3inch silicon wafer using an electron cyclotron resonance (ECR) plasma apparatus. The thin films which were deposited by changing the SiH4N2 gas flow rate ratio at 1.5mTorr without substrate heating were analyzed through the x-ray photo spectroscopy (XPS) and ellipsometer measurements, etc. Silicon nitride thin films prepared by the electron cyclotron resonance plasma chemical vapor deposition method at low substrate temperature (<10$0^{\circ}C$) exhibited excellent physical and electrical properties. The very uniform and good quality silicon nitride thin films were obtained. The characteristics of electron cyclotron resonance plasma were inferred from the analyzed results of the deposited films.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2007년도 추계학술발표대회 및
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• pp.54.1-54.1
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• 2007

• 전자공학회논문지D
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• 제35D권12호
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• pp.68-74
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• 1998

본 논문에서는 electron cyclotron resonance (ECR) N₂O-플라즈마 산화막을 게이트 산화막으로 사용한 다결정 실리콘 박막 트랜지스터 (TFT)의 성능과 단채널 특성에 대하여 연구하였다. ECR NE₂O-플라즈마 게이트 산화막을 사용한 소자는 열산화막을 이용한 경우에 비해 우수한 성능과 억제된 단채널 효과를 나타낸다. 얇은 ECR N2O-플라즈마 산화막을 사용하여 n채널 TFT의 경우 3 ㎛, p채널 TFT의 경우 1㎛ 게이트 길이까지 문턱 전압 감소가 없는 소자를 얻었다. 이러한 특성 향상은 부드러운 계면, passivation 효과, 그리고 계면과 박막 내부에 존재하는 강한 Si ≡ N 결합 등에 기인한다.

• Nuclear Engineering and Technology
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• 제50권7호
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• pp.1106-1111
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• 2018

Electromagnetic waves potentially have been used to heat overdense nuclear fusion plasmas through a double mode conversion from ordinary to slow extraordinary and finally to Electron Bernstein Wave (EBW) modes, OSXB. This scheme is efficient and has not any plasma density limit of electron cyclotron resonance heating due to cut-off layer. The efficiency of conversion depends on the isotropic launching angles of the microwaves with the plasma parameters. In this article, a two-step mode conversions of OSXB power transmission efficiency affected by the fast extraordinary (FX) loses at upper hybrid frequency are studied. In addition, the kinetic (hot) dispersion relation of a overdense plasma in a full wave analysis of a OSXB in Wendelstein 7X (W7-X) stellarator plasma has been numerically simulated. The influence of plasma dependent parameters such as finite Larmor radius, electron thermal velocity and electron cyclotron frequency are represented.

• 마이크로전자및패키징학회지
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• 제7권4호
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• pp.43-47
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• 2000

Electron cyclotron resonance플라즈마 식자 장비를 이용하여 순수 chlorine플라즈마로 Ta박 막의 식각 특성에 관해 조사하였다. Ta박막의 시각 기구를 연구하기 위해 Optical emission actinometry (OEA)를 사용하였고 OEA조사를 통하여 최적의 공정 조건을 얻었다. 이것에 기초하여 2단계 식각을 수행하였고 마이크로 로딩 철상을 성공적으로 제어하면서 0.15 $\mu\textrm{m}$ L & S 의 우수한 단면을 얻었다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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• pp.97-102
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• 2000

We have studied etching characteristic of Ta film using Electron Cyclotron Resonance (ECR) etcher system. Microwave source power. RF bias power. and working pressure were varied to investigate the etch Profile. And we have used two step etching method to acquire the goWe have studied etching characteristic of Ta film using Electron Cyclotron Resonance (ECR) etcher system. Microwave source power. RF bias power. and working pressure were varied to investigate the etch Profile. And we have used two step etching method to acquire the good etch profile preventing the microloading effect.od etch profile preventing the microloading effect.

• 한국전기전자재료학회논문지
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• 제13권7호
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• pp.563-567
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• 2000

We presented the etch results of indium-tin oxide thin films by using SF$_{6}$/O$_2$gas electron cyclotron resonance plasma and conducted X-ray phtoelectron spectroscopy and quadrupole mass spectrometer analyses for the etch characteristics. The etch rate of the films was greatly dependent on that of oxygen which was the major constituent element of the films. The oxygen was removed by the forms like $O_2$or SOF$_2$. We examined the ratio of atomic content of O and In and the change of this ratio was related to the removal rate of InF$_{x}$ and the S-metal bonding.ing.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.537-537
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• 2013

Cyclotron-accelerated ion beams are used for various researches, such as nuclear physics, nuclear chemistry, biotechnology, and material sciences including radio-isotope production. Recently considerable applications are asked to the cyclotron development undertaken to meet user requirements of various ions'energies, intensities, and their pulsed beams. For instance, a cocktail beam acceleration technique rapidly changing the ion species and energies was developed to irradiating integrated circuit chips. Also a chopping system in a cyclotron injection line is considered for producing a pulsed ion beam with a relatively long period compared with that generated by the resonance frequency. For the research in neutron time-of-flight measurement, a single-pulsed beam with a repetition interval of the order of mili-seconds or longer is necessary to have a good resolution and to remove background events. In this paper a feasibility of pulsed beam with an external ion source is simulated by adopting a combination system of a chopper accompanying with a bunching stage in the injection line and an additional chopper after the exit of the cyclotron in order to produce beam pulses with a range of $1{\mu}s{\sim}1ms$ periods from a resonance RF cycle. The pulseperiod will be adjusted by chopping the number of beam bunches from the injected pulses in the injection line. However, the longer pulses will have reduced number of beam pulses and sacrificed beam currents. Because the beam users need an intense single pulsed beam, a careful tuning of the acceleration phase and a high-intense external ion source are necessary to achieve an intense single-pulsed beam from the cyclotron. It is essential to strictly match the acceleration phase of injected beams in the central region of the cyclotron to improve its efficiency. An effect of space charge at each pulse from the ion source will be also considered.

• Bulletin of the Korean Chemical Society
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• 제35권3호
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• pp.811-814
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• 2014

Bio-oil instability, or aging, is a significant problem for the long-term storage of fast pyrolysis oils. We investigated bio-oil aging at the molecular level using Fourier-transform ion cyclotron resonance mass spectrometry. Petroleomic analysis suggests that bio-oil aging is resulted from the oligomerization of phenolic lignin products whereas 'sugaric' cellulose/hemicellulose products have negligible effect.