• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.19-24
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• 2021

As the size of semiconductor devices decreases, the etching pattern becomes very narrow and a deep high aspect ratio process becomes important. The cryogenic etching process enables high aspect ratio etching by suppressing the chemical reaction of reactive ions on the sidewall while maintaining the process temperature of -100℃. ESC is an important part for temperature control in cryogenic etching equipment. Through the cooling path inside the ESC, liquid nitrogen is used as cooling water to create a cryogenic environment. And since the ESC directly contacts the wafer, it affects the temperature uniformity of the wafer. The temperature uniformity of the wafer is closely related to the yield. In this study, the cooling path was designed and analyzed so that the wafer could have a uniform temperature distribution. The optimal cooling path conditions were obtained through the analysis of the shape of the cooling path and the change in the speed of the coolant. Through this study, by designing ESC with optimal temperature uniformity, it can be expected to maximize wafer yield in mass production and further contribute to miniaturization and high performance of semiconductor devices.

• Progress in Superconductivity and Cryogenics
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• v.25 no.4
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• pp.70-74
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• 2023

The Small Punch Test (SPT) was developed to evaluate the softening and embrittlement of materials such as power plants and nuclear fusion reactors by taking samples in the field. Specimens used in the SPT are very thin and small disk-shaped compared to specimens for general tensile test, and thus have economic advantages in terms of miniaturization and repeatability of the test. The cryogenic SPT can also be miniaturized and has a significantly lower heat capacity than conventional universal test machines. This leads to reduced cooling and warm-up times. In this study, the cryogenic SPT was developed by modifying the existing room temperature SPT to be cooled by liquid nitrogen using a super bellows and a thermal insulation structure. Since the cryogenic SPT was first developed, basic experiments were conducted to verify the effectiveness of it. For the validation, aluminum alloy 6061- T6 specimens were tested for mechanical properties at room and cryogenic temperature. The results of the corrected tensile properties from the SPT experiment results were compared with known room temperature and cryogenic properties. Based on the correction results, the effectiveness of the cryogenic SPT test was confirmed, and the surface fracture characteristics of the material were analyzed using a 3d image scanner. In the future, we plan to conduct property evaluation according to the development of various alloy materials.

• Journal of Aerospace System Engineering
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• v.14 no.5
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• pp.26-32
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• 2020

In this study, a facility was constructed to supply liquid nitrogen to simulate combustion instability in a liquid rocket combustor. The pressurization and supply performances were predicted and verified through different experiments. The liquid nitrogen supply system was composed of a pressurized supply system, and a dome regulator was used to adjust the pressure of the pressurant. A cavitation venturi was used to control the mass flow rate of liquid nitrogen. The condition of liquid nitrogen supply was a mass flow rate of 2.55 kg/s and the venturi inlet pressure was above 100 bar. Based on the initial experiment, it was observed that the predicted amount of the pressurant was not sufficiently supplied and the target pressure was not supplied due to a drop in tank pressure. Through the modification of the established facilities, the target mass flow rate was successfully supplied and the cryogenic liquid nitrogen supply facility was verified.

• Electrical & Electronic Materials
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• v.9 no.10
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• pp.1033-1039
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• 1996

Electrical and mechanical properties of polymer sheet at cryogenic temperature have been investigated. Tensile stress(and strain at break) in liquid nitrogen(77K) of 79.7MPa(l.2%) and 117.4MPa(2.05%) are evaluated for films of Polypropylene (PP) and Kapton, respectively. Dielectric loss tangent(tan .delta.) of PP and Kapton films is almost independent of the frequency and tensile stress. Also, field strength of PP film at 77K decreases with increasing the tensile stress.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.1
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• pp.32-37
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• 2014

Open-cell silicon foam is difficult to cut using conventional machining processes because of its low stiffness. That is, open-cell silicon foam is easily pressed down when the tool is engaged, which makes it difficult to remove the material in the form of chip. This study proposes an advanced method of machining open-cell silicon foam by freezing the material using liquid nitrogen. Furthermore, the machining conditions are optimized to maximize the efficiency of material removal and minimize the usage of liquid nitrogen by conducting experiments under various machining conditions. The results show that open-cell silicone foam products with free surface can be successfully machined by employing the proposed method.

• Korean Journal of Materials Research
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• v.17 no.1
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• pp.37-42
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• 2007

The effects of immersion time in the liquid nitrogen and deformation-induced martensitic transformation on the behavior of austenite stainless steels used for the hydrogen storage tank of auto-mobile at cryogenic temperature were investigated. With increasing of immersion time in the liquid nitrogen, the tensile strength of all austenite stainless steels at cryogenic temperature was increased because the martensite transformation of unstable austenite. The restraint of crack generation ana transmission also increased the tensile strength by the active ${\alpha}'$ transformation. The elongation decreasing of 321 steel is not the mechanical deformation of austenite phase but the stress induced martensite phase during the tensile test.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.62-65
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• 2011

액체로켓엔진용 극저온 산화제 고압 배관 기술 개발을 위해 시제품을 제작하였다. 기술 개발 시제품은 체결용 플랜지, 직관, 곡관, 벨로우즈, 분기구로 구성하였다. 액체로켓엔진용 극저온 산화제 고압 배관은 터보펌프에서 토출된 고압의 극저온 산화제를 연소기로 공급하는 경로이므로 극저온, 고압의 작동환경에서 구조적 안정성을 가져야 한다. 따라서 본 제작공정 개발에서는 극저온을 고려한 구조해석을 수행하여 적합한 소재를 선정하였으며, 공정개발과 특수공정을 적용하여 시제품을 제작한 후 구조강도 시험을 수행하였다. 본 개발을 통해 액체로켓엔진에 적용되는 극저온 산화재 고압배관을 위한 기술적 기반과 소재 응용기술, 향후 고성능 대형 액체로켓엔진에 적용하기 위한 공정개발을 완료하였다.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.1
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• pp.15-20
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• 2004

This paper discusses electrical insulation characteristics at cryogenic temperature, especially focusing on partial discharge (PD) inception characteristics, for high temperature superconducting cables. In liquid nitrogen (L$N_2$) / polypropylene (PP) laminated paper composite insulation system, PD inception strength (PDIE) was evaluated in terms of volume effect and V-t characteristics. Different kinds of butt gap condition were applied in the experiments, using parallel plane and coaxial cylindrical cable samples. Experimental results revealed that the volume effect on PDIE could be evaluated by the statistical stressed liquid volume (SSLV) taking account the discharge probability not only in the butt gap but also in the other thin layers between PP laminated papers. Furthermore, the indices n of V-t characteristics at PD inception were estimated to be 80∼110, irrespective of the butt gap condition.

• Tribology and Lubricants
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• v.26 no.6
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• pp.322-328
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• 2010

An inter-propellant seal (IPS) for 75 ton class thrust turbopump was tested. Leakage characteristics were presented with a given range of pressure difference under cryogenic as well as room temperature conditions. For cryogenic tests, liquid nitrogen was used as analogic fluid of liquid oxygen (LOX) while water was used instead of kerosene for room temperature condition. Test results showed that IPS had satisfactory leakage performance. Additionally endurance test was conducted to prove the life time of manufactured IPS and the tested IPS had successfully survived during required life time, 2100 seconds.

• Journal of ILASS-Korea
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• v.18 no.3
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• pp.140-145
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• 2013

Sub/supercritical spray experiments were conducted, and cryogenic nitrogen and gaseous argon were selected for simulants. liquid nitrogen and gaseous argon were injected in subcritical case, and supercritical nitrogen and near-critical gaseous argon were injected in near-critical/supercritical cases. shadowgraph method was used to visualize spray, and analyzed about the breakup length. The breakup length was measured from numbers of Instantaneous shadowgraph Images from each case, and they were compared with momentum flux ratios and density ratios. It was observed that the relation between breakup length and momentum flux ratio was fitted into former experiment results. and the reasonable constant was suggested about the relation between breakup length and density ratio.