• 제목/요약/키워드: Critical dimension measurement

검색결과 26건 처리시간 0.029초

나노인덴테이션을 이용한 나노 임프린트된 폴리머 박막의 잔류두께 측정기법 (A measurement technique for residual thickness of nano-imprinted polymer film using nano-indentation.)

  • 이학주;고순규;김재현;허신;이응숙;정준호
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 추계학술대회
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    • pp.1921-1926
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    • 2003
  • Nano-imprint technology has been vigorously studied by many researchers for it is one of the most promising technologies for manufacturing the pattern with its critical dimension below 100nm. In the nano-imprint technology, nano patterns are transferred on a polymer film and the transferred patterns are used as an etch mask to define the designed patterns on a substrate or a metal layer. To this end, it is important to keep the residual thickness of the imprinted polymer film uniform. In this study, a novel measurement technique to measure the residual thickness of films is proposed based on nanoindentation theory. This technique has advantages of saving time and measuring the residual thickness of highly-localized portions in comparison with other techniques, but has limitation of requiring calibration process.

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중년 여성의 감성 Brassiere 개발(제1보) -소비자 요구 분석을 기초로 한 제품 디자인 요소 추출- (Development of Sensible Brassiere for Middle Aged Women -Investigation of consumer's Needs and Evaluation of Commercial Brassiere for the Development of Subjective Measurement Scale and Screening of Design Parameters-)

  • 김정화;이선영;홍경희
    • 한국의류학회지
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    • 제24권5호
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    • pp.714-723
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    • 2000
  • The purpose of this study is to develop functional and sensible brassiere for middle-aged women. As a methodology, engineering design process, especially, QFD(Quality Function Deployment) was adopted to translate consumer's needs into product design parameters. Wearing tests of commercial brassiere were performed for the development o subjective measurement scale. The environmental condition was controlled at 28$\pm$1$^{\circ}C$, 65$\pm$3%RH. As results, subjective measurement scale and dimension for the evaluation of sensible brassiere were extracted from factor analysis. Four factors were fitting, aesthetic property, pressure sensation, displacement of brassiere due to movement. Regression equations with the subjective evaluation descriptors were developed for the prediction of wearing comfort of brassiere. (R2=.82) The most critical design parameter was wire-related property and second one was stretchability of main material of brassiere. Also, wearing comfort of brassiere was affected by the interaction of initial stretchability of wing and support of strap.

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HFPD 패턴분석을 이용한 절연열화 진단 (Insulation Ageing Diagnosis Using HFPD Pattern Analysis)

  • 김덕근;여인선;임장섭;이진
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1726-1728
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    • 2003
  • The aging diagnosis method using partial discharge measurement detects discharge signals that critical cause of failure in insulation material operated a long time and can diagnose aging state of insulation materials with an aging analysis algorithm. The HFPD measurement method is a technique to analyze aging state of high voltage insulation materials and detect higher frequency signals than conventional PD measurement method therefore it takes less noise effect and could execute active line measurement. It is possible to analyze main discharge phenomena and obtain access to aging progress occurred in insulation materials through accumulation of HFPD signals during determined interval and expression of fractal dimension using statistical process of accumulated signals. The HFPD signals that occurred in each applied voltages are measured during 180 cycles and accumulated to the same phase of one cycle. These patterns that made by previous method are normalized with logarithm function and than inputted to neural networks. The aging diagnosis of insulation material was possible and the recognition ratio of neural network appeared very high.

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Effect of Lateral Diffusion on Hydrogen Permeation Measurement in Thick Steel Specimens

  • Traidia, A.;El-Sherik, A.M.;Attar, H.;Enezi, A.
    • Corrosion Science and Technology
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    • 제16권4호
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    • pp.201-208
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    • 2017
  • A finite element analysis is proposed to study the effect of specimen dimensions on lateral diffusion of hydrogen during hydrogen permeation flux measurements. The error of measurement on thick specimens because of 1D diffusion approximation may be as much as 70%. A critical condition for accurate measurements is to designate the area of hydrogen monitoring/exit surface smaller than the area of hydrogen charging/entry surface. For thin to medium thickness specimens (ratio of thickness to specimen radius of 5:10 and below), the charging surface should be maximized and the monitoring surface should be minimized. In case of relatively thick specimens (ratio of thickness to specimen radius above of 5:10), use of a hydrogen-diffusion barrier on the specimen boundaries is recommended. It would completely eliminate lateral losses of hydrogen, but cannot eliminate the deviation towards 2D diffusion near the side edges. In such a case, the charging surface should be maximized and the monitoring surface should be as closer in dimension as the charging surface. A regression analysis was carried out and an analytical relationship between the maximum measurement error and the specimen dimensions is proposed.

PECVD를 이용한 비정질 실리콘 박막의 Adhesion 개선에 관한 연구

  • 한영재;최영철;김민
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.316.2-316.2
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    • 2016
  • Device가 점점 Shrinkage 됨에 따라 미세 패터닝을 위하여 기존에 사용하던 박막은 Hardmask 로써 CD(Critical Dimension)가 제한적으로 이를 개선하기 위한 비정질 실리콘 (amorphous silicon)으로 대체하여 사용되는 Layer의 수가 증가하고 있다. 하지만 비정질 실리콘을 증착 시, 하부막에 따른 Adhesion 및 Hillocks과 같은 공정상에서 발생하는 문제들이 발생하게 되는데, 이는 소자의 특성을 떨어뜨리게 된다. 이러한 문제를 해결하고자 본 연구에서는 PECVD를 사용하여 비정질 실리콘 박막을 증착하였고, 그 특성을 분석하였으며, Adhesion 및 Hillock 개선을 위해 비정질 실리콘 박막 증착 전 처리를 최적화하여 특성을 개선하였다. 증착된 박막의 두께 및 굴절률은 Auto thickness measurement로 분석하였고, 표면 특성은 Field emission scanning electron microscopy(FE-SEM 그림 참고), 4 Point Bending TEST를 이용하여 분석을 수행하였다.

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반응표면분석에 의한 쌀 압출성형물의 품질평가 (Quality Measurement of Rice - Mixture Extrudate by the Response Surface Regression Analysis)

  • 고광진;김준평
    • 동아시아식생활학회지
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    • 제1권3호
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    • pp.305-311
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    • 1991
  • The study was designed to investigate overall acceptability of rice extrudate with added ginseng flour extruded by single screw extruder. Graphic three dimension analysis on response surface regression was conducted for overall acceptability evaluated by balanced incomplete block design. Overall acceptability, which formed a saddle point, increased as moisture content increased at lower die temperature, and as moisture content decreased at higher die temperature. Critical values of each variable which indicated optimum response are 5.0% ginseng content, 17.8% moisture content and 104.6$^{\circ}C$ die temperature, and optimum inferred score of overall acceptability is 59.6 and 90. Key words: extrdate, overall acceptability, response surface regression analysis, balanced incomplete block method.

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Wavelet Characterization of Profile Uniformity Using Neural Network

  • Park, Won-Sun;Lim, Myo-Teak;Kim, Byungwhan
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2002년도 ICCAS
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    • pp.46.5-46
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    • 2002
  • As device dimension shrinks down to sub 100nm, it is increasingly important to monitor plasma states. Plasma etching is a key means to fine patterning of thin films. Many parameters are involved in etching and each parameter has different impact on process performances, including etch rate and profile. The uniformity of etch responses should be maintained high to improve device yield and throughput. The uniformity can be measured on any etch response. The most difficulty arises when attempting to characterize etched profile. Conventionally, the profile has been estimated by measuring the slope or angle of etched pattern. One critical drawback in this measurement is that this is unable to cap...

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나노 임프린트 공정에서의 기계적 물성 측정 (Mechanical Property Measurement in Nano Imprint Process)

  • 김재현;이학주;최병익;강재윤;오충석
    • 한국정밀공학회지
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    • 제21권6호
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    • pp.7-14
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    • 2004
  • 나노 임프린트 기술은 기존의 광학적 리소그라피 (optical lithography) 기술보다 저렴한 비용으로 나노 구조물을 대량으로 제조할 수 있을 것으로 기대되고 있는 기술이다. 현재까지 반도체 공정기술의 주류를 이루고 있는 광학적인 리소그라피 기술은, 100nm이상의 CD(Critical Dimension)를 가지는 구조물들을 정밀하게 제조하여, 미소전자공학 (microelectronics) 소자, MEMS/MEMS, 광학소자 등의 제품들을 대량으로 생산하는 데에 널리 활용되고 있다. 반도체 소자의 고집적화 경향에 따라 100 nm 이하의 CD를 가지는 나노 구조물들을 제조할 필요성이 높아지고 있지만, 광학적인 방법으로는 광원의 파장보다 작은 구조물들을 제조하기가 어렵다. 보다 짧은 파장을 가지는 광원을 이용하는 리소그라피 장비가 계속적으로 개발되고 있으나, 그에 따른 장비 비용 및 제조 단가가 기하급수적으로 증가하고 있다.(중략)

e-러닝 성과에 영향을 미치는 품질요인에 관한 연구 (What Quality Factors Affect to the e-Learning Performance)

  • 김성균;성행남;정대율
    • 한국정보시스템학회지:정보시스템연구
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    • 제16권1호
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    • pp.201-230
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    • 2007
  • Recently, the growth of e-Learning systems and its related information technology has presented a unique challenge for both schools and industry. It would make an extremely phenomenal paradigm shift in the educational method and practice. Methods of assessing the quality of e-teaming services and contents are critical issue in both practice and research. Moreover, many researchers are interested in what qualify factors more affect to the Performance of e-Learning service. Nevertheless, service quality is a construct that is difficult to define and measure. e-Learning services are composed of many factors, and they are more complicated than the traditional education services because they we performed on the distance basis and the many platforms of IT infrastructure. The purposes of our research are to classify the e-Learning service dimension and identify their factors, to develop the measurement of the factors, and finally to test empirically their relationship between the service factors and e-Learning service performance. For the development of the service factors we considered SERVQUAL model and SERVPERF model which were developed in the service marketing area. The SERVQUAL model was more fitted to the e-Learning services than the latter. From that we derived several factors that fit to our research domain, ie, tangibles, access, reliability, credibility, security, responsiveness, assurance, empathy. We combined three factors of them(reliability, credibility, security) into a factor, system stability for the semantic simplicity, and divided responsiveness factor into system operator responsiveness and teacher responsiveness as the entity based dimension classification. In the e-Learning services research, Most researcher are mentioned the quality factors of contents, so we added to two contents quality factors, ie, contents production method and richness of contents itself. We examined the relationship between the service quality factors and e-Learning performance(student satisfaction and service reuse intention). As result three quality factors(contents production method, teacher responsiveness, empathy) significantly affected student satisfaction. To the other performance variable, ie, service reuse intention, the teacher related quality factors(such as teacher responsiveness, assurance, empathy) affected only. In conclusion, even in the on-line distance teaming, the teacher's role md earnestness is as important as ever.

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20대 여성의 기성복 바지 맞음새와 하반신 체형 인식에 관한 연구 (A Study on the Slacks Fit and Perception of Lower Body Fitness of Women in 20's)

  • 김현아;천종숙
    • 복식문화연구
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    • 제12권4호
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    • pp.638-647
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    • 2004
  • This study surveyed some general fit problem of the ready-to-wear slacks of women in 20's. A questionnaire survey was administered to 80 women in 20's. 14 body dimensions were measured fer 53 women among the subjects who participated in this survey. Their anthropometric data were analyzed and the difference between actual and perceived body shape was compared. The results of this study showed that the subjects experienced poor slacks fit at thigh, crotch, and hip areas. Occasionally subjects altered the waist size of slacks after purchasing them. Despite the subjects' waist measurement was ranged from 22 to 33 inches, most of them purchased slacks with size 26 or 27 inches. The researchers claimed that the manufacturers did not provide various slacks sizes for women in 20's. The subjects, who had problems with poor slacks ft, preferred to buy customized slacks. The most of subjects preferred to buy mass customized slacks to have chance to choose their own style from pool of various styles. The subjects tended to perceive their body size larger than actual at hip and thigh. The most critical body dimension reflected their perception on lower body fitness was waist circumference.

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