• Title/Summary/Keyword: Critical control point

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Property variation of transistor in Gate Etch Process versus topology of STI CMP (STI CMP후 Topology에 따른 Gate Etch, Transistor 특성 변화)

  • Kim, Sang-Yong;Chung, Hun-Sang;Park, Min-Woo;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.181-184
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    • 2001
  • Chemical Mechanical Polishing(CMP) of Shallow Trench Isolation(STD structure in 0.18 m semiconductor device fabrication is studied. CMP process is applied for the STI structure with and without reverse moat pattern and End Point Detection (EPD) method is tested. To optimize the transistor properties related metal 1 parameters. we studied the correlation between CMP thickness of STI using high selectivity slurry. DOE of gate etch recipe, and 1st metal DC values. Remaining thickness of STI CMP is proportional to the thickness of gate-etch process and this can affect to gate profile. As CMP thickness increased. the N-poly foot is deteriorated. and the P-Poly Noth is getting better. If CD (Critical Dimension) value is fixed at some point,, all IDSN/P values are in inverse proportional to CMP thickness by reason of so called Profile Effect. Weve found out this phenomenon in all around DOE conditions of Gate etch process and we also could understand that it would not have any correlation effects between VT and CMP thickness in the range of POE 120 sec conditions. As CMP thickness increased by $100\AA$. 3.2 $u\AA$ of IDSN is getting better in base 1 condition. In POE 50% condition. 1.7 $u\AA$ is improved. and 0.7 $u\AA$ is improved in step 2 condition. Wed like to set the control target of CD (critical dimension) in gate etch process which can affect Idsat, VT property versus STI topology decided by CMP thickness. We also would like to decide optimized thickness target of STI CMP throughout property comparison between conventional STI CMP with reverse moat process and newly introduced STI CMP using high selectivity slurry. And we studied the process conditions to reduce Gate Profile Skew of which source known as STI topology by evaluation of gate etch recipe versus STI CMP thickness.

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Property variation of transistor in Gate Etch Process versus topology of STI CMP (STI CMP후 Topology에 따른 Gate Etch, Transistor 특성 변화)

  • 김상용;정헌상;박민우;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.181-184
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    • 2001
  • Chemical Mechanical Polishing(CMP) of Shallow Trench Isolation(STI) structure in 0.18 m semiconductor device fabrication is studied. CMP process is applied for the STI structure with and without reverse moat pattern and End Point Detection (EPD) method is tested. To optimize the transistor properties related metal 1 parameters, we studied the correlation between CMP thickness of STI using high selectivity slurry, DOE of gate etch recipe, and 1st metal DC values. Remaining thickness of STI CMP is proportional to the thickness of gate-etch process and this can affect to gate profile. As CMP thickness increased, the N-poly foot is deteriorated, and the P-Poly Noth is getting better. If CD (Critical Dimension) value is fixed at some point, all IDSN/P values are in inverse proportional to CMP thickness by reason of so called Profile Effect. Weve found out this phenomenon in all around DOE conditions of Gate etch process and we also could understand that it would not have any correlation effects between VT and CMP thickness in the range of POE 120 sec conditions. As CMP thickness increased by 100 ${\AA}$, 3.2 u${\AA}$ of IDSN is getting better in base 1 condition. In POE 50% condition, 1.7 u${\AA}$ is improved, and 0.7 u${\AA}$ is improved in step 2 condition. Wed like to set the control target of CD (critical dimension) in gate etch process which can affect Idsat, VT property versus STI topology decided by CMP thickness. We also would like to decide optimized thickness target of STI CMP throughout property comparison between conventional STI CMP with reverse moat process and newly introduced STI CMP using high selectivity slurry. And we studied the process conditions to reduce Gate Profile Skew of which source known as STI topology by evaluation of gate etch recipe versus STI CMP thickness.

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Evaluation of the HACCP System on Microbiological Hazard during Dressing Production (드레싱 제조업체의 HACCP 시스템 적용을 위한 미생물학적 위해도 평가)

  • Kwon, Sang-Chul
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.42 no.3
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    • pp.457-463
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    • 2013
  • The purpose of this study was to apply the Hazard Analysis Critical Control Point (HACCP) system to the production of dressing. The hazard analysis examined the main materials, industrial water, microbial evaluation, and airborne microorganisms of each working area, as well as the pathogenic microbial contamination risk. The survey was conducted at SJ Company in Jincheon (Chungchengbuk-do), Korea for 30 days from April 1, 2012 to April 30, 2012. The results showed that raw material microorganisms had a total plate count in industrial water below $3.00{\times}10$ CFU/mL in working room I, working room II, the packing room, washing water, and the inspection room for five times in each place. During dressing production (including heat treatment and mixing), general bacteria were detected at an average of $3{\times}10$ CFU/mL, but yeast, mold, and pathogenic bacteria were not detected. Airborne microbiological evaluation (for total plate count, yeast, and mold) found levels below the legal limit at each working area. While workers were positive for microbes in total plate counts, coliform and Staphylococcus aureus were not detected. In conclusion, standards for hygienic management should be established to prevent and decrease hazards, such as general bacteria and pathogenic microorganisms (for example, E. coli, B. cereus, Listeria spp, Salmonella spp, Staph. aureus, Clostridium perfringens, yeast, and mold), and to found critical limits for microorganisms with an HACCP system.

Dilatation characteristics of the coals with outburst proneness under cyclic loading conditions and the relevant applications

  • Li, Yangyang;Zhang, Shichuan;Zhang, Baoliang
    • Geomechanics and Engineering
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    • v.14 no.5
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    • pp.459-466
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    • 2018
  • By conducting uniaxial loading cycle tests on the coal rock with outburst proneness, the dilatation characteristics at different loading rates were investigated. Under uniaxial loading and unloading, the lateral deformation of coal rock increased obviously before failure, leading to coal dilatation. Moreover, the post-unloading recovery of the lateral deformation was rather small, suggesting the onset of an accelerated failure. As the loading rate increased further, the ratio of the stress at the dilatation critical point to peak-intensity increased gradually, and the pre-peak volumetric deformation decreased with more severe post-peak damage. Based on the laboratory test results, the lateral deformation of the coals at different depths in the #1302 isolated coal pillars, Yangcheng Coal Mine, was monitored using wall rock displacement meter. The field monitoring result indicates that the coal lateral displacement went through various distinct stages: the lateral displacement of the coals at the depth of 2-6 m went through an "initial increase-stabilize-step up-plateau" series. When the coal wall of the working face was 24-18 m away from the measuring point, the coals in this region entered the accelerated failure stage; as the working face continued advancing, the lateral displacement of the coals at the depth over 6 m increased steadily, i.e., the coals in this region were in the stable failure stage.

Assessment of Earth Remote Sensing Microsatellite Power Subsystem Capability during Detumbling and Nominal Modes

  • Zahran M.;Okasha M.;Ivanova Galina A.
    • Journal of Power Electronics
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    • v.6 no.1
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    • pp.18-28
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    • 2006
  • The Electric Power Subsystem (EPS) is one of the most critical systems on any satellite because nearly every subsystem requires power. This makes the choice of power systems the most important task facing satellite designers. The main purpose of the Satellite EPS is to provide continuous, regulated and conditioned power to all the satellite subsystems. It has to withstand radiation, thermal cycling and vacuums in hostile space environments, as well as subsystem degradation over time. The EPS power characteristics are determined by both the parameters of the system itself and by the satellite orbit. After satellite separation from the launch vehicle (LV) to its orbit, in almost all situations, the satellite subsystems (attitude determination and control, communication and onboard computer and data handling (OBC&DH)), take their needed power from a storage battery (SB) and solar arrays (SA) besides the consumed power in the EPS management device. At this point (separation point, detumbling mode), the satellite's angular motion is high and the orientation of the solar arrays, with respect to the Sun, will change in a non-uniform way, so the amount of power generated by the solar arrays will be affected. The objective of this research is to select satellite EPS component types, to estimate solar array illumination parameters and to determine the efficiency of solar arrays during both detumbling and normal operation modes.

Auto Tuning of Position Controller for Proportional Flow Control Solenoid Valve (비례유량제어밸브 위치제어기 자동조정)

  • Jung, Gyu-Hong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.7
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    • pp.797-803
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    • 2012
  • Proportional solenoid valves are a modulating type that can control the displacement of valves continuously by means of electromagnetic forces proportional to the solenoid coil current. Because the solenoid-type modulating valves have the advantages of fast response and compact design over air-operated or motor-operated valves, they have been gaining acceptance in chemical and power plants to control the flow of fluids such as water, steam, and gas. This paper deals with the auto tuning of the position controller that can provide the proportional and integral gain automatically based on the dynamic system identification. The process characteristics of the solenoid valve are estimated with critical gain and critical period at a stability limit based on implemented relay feedback, and the controller parameters are determined by the classical Ziegler-Nichols design method. The auto-tuning algorithm was verified with experiments, and the effects of the operating point at which the relay control is activated as well as the relay amplitude were investigated.

Power control of CiADS core with the intensity of the proton beam

  • Yin, Kai;Ma, Wenjing;Cui, Wenjuan;He, Zhiyong;Li, Xinxin;Dang, Shiwu;Yang, Feng;Guo, Yuhui;Duan, Limin;Li, Meng;Hou, Yikai
    • Nuclear Engineering and Technology
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    • v.54 no.4
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    • pp.1253-1260
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    • 2022
  • This paper reports the control method for the core power of the China initiative Accelerator Driven System (CiADS) facility. In the CiADS facility, an intense external neutron source provided by a proton accelerator coupled to a spallation target is used to drive a sub-critical reactor. Without any control rod inside the sub-critical reactor, the core power is controlled by adjusting the proton beam intensity. In order to continuously change the beam intensity, an adjustable aperture is considered to be used at the Low Energy Beam Transport (LEBT) line of the accelerator. The aperture size is adjusted based on the Proportional Integral Derivative (PID) controllers, by comparing either the setting beam intensity or the setting core power with the measured value. To evaluate the proposed control method, a CiADS core model is built based on the point reactor kinetics model with six delayed neutron groups. The simulations based on the CiADS core model have indicated that the core power can be controlled stably by adjusting the aperture size. The response time in the adjustment of the core power depends mainly on the adjustment time of the beam intensity.

The Microbiological Assessment of a University Foodservice Establishment, and Hazard Analysis for Quality Control of Fried Fish Cake Soup Preparation (대학 급식시설의 위생 실태조사 및 품질관리를 위한 연구 - 제 1 보 : 오뎅국을 중심으로 -)

  • Rew, Kyung;Kim, Jeong-Mi;Kwak, Tong-Kyung
    • Journal of Nutrition and Health
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    • v.18 no.4
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    • pp.283-292
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    • 1985
  • A sanitary quality of a university foodservice establishment was assessed in terms of time and temperature, pH and Aw, and microbiological evaluation. Critical control points during various phases in product flow of fried fish cake soup were identified using hazard analysis concept. The results are summarized as follows : 1) Time and temperature data indicated that phases of holding ingredients at room temperature after cooking, and hot - holding of soup before assembly were critical. 2) pH and Aw values were in favorable for microbial growth. 3) Microbiological data indicated that microbial quality of ingredients was in poor condition. A holding practice of cooked ingredients at room temperature might provide the chance for microbial contamination and multiplication. Hot - holding time and temperature of soup should be strictly controlled to assure the food safety, since the microbial quality of serving food can be directly influenced by the hot - holding temperature of soup. 4) Microbiological test results for food containers, equipments, working surfaces, and supplies indicated that sanitary conditions of earthenware, gloves, wiping cloths and cutting board should be improved promptly. 5) Critical control points identified were : ingredients, pre - preparation, post - preparation, and holding before assembly and service. 6) Guidelines for the effective quality control program for this operation were suggested.

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Droop Control Scheme of a Three-phase Inverter for Grid Voltage Unbalance Compensation

  • Liu, Hongpeng;Zhou, Jiajie;Wang, Wei;Xu, Dianguo
    • Journal of Power Electronics
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    • v.18 no.4
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    • pp.1245-1254
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    • 2018
  • The stability of a grid-connected system (GCS) has become a critical issue with the increasing utilization of renewable energy sources. Under grid faults, however, a grid-connected inverter cannot work efficiently by using only the traditional droop control. In addition, the unbalance factor of voltage/current at the common coupling point (PCC) may increase significantly. To ensure the stable operation of a GCS under grid faults, the capability to compensate for grid imbalance should be integrated. To solve the aforementioned problem, an improved voltage-type grid-connected control strategy is proposed in this study. A negative sequence conductance compensation loop based on a positive sequence power droop control is added to maintain PCC voltage balance and reduce grid current imbalance, thereby meeting PCC power quality requirements. Moreover, a stable analysis is presented based on the small signal model. Simulation and experimental results verify the aforementioned expectations, and consequently, the effectiveness of the proposed control scheme.

Application of Predictive Food Microbiology Model in HACCP System of Milk (우유의 HACCP 시스템에서 Predictive Food Microbiology Model 이용)

  • 박경진;김창남;노우섭;홍종해;천석조
    • Journal of Food Hygiene and Safety
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    • v.16 no.2
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    • pp.103-110
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    • 2001
  • Predictive food microbiology(PFM) is an emerging area of food microbiology since the later 1980’s. It does apply mathematical models to predict the responses of microorganism to specified environmental variables. Although, at present, PFM models do not completely developed, models can provide very useful information for microbiological responses in HACCP(Hazard Analysis Critical Control Point) system and Risk Assessment. This study illustrates the possible use of PFM models(PMP: Pathogen Modeling Program win5.1) with milk in several elements in the HACCP system, such as conduction of hazard analysis and determination of CCP(Critical Control Points) and CL(Critical Limits). The factors likely to affect the growth of the pathogens in milk involved storage fixed factors were pH 6.7, Aw 0.993 and NaCl 1.3%. PMPwin5.1 calculated generation time, lag phase duration, time to level of infective dose for pathogens across a range of storage (Critical Control Points) and CL(Critical Limits). The factors likely to affect the growth of the pathogens in milk involved storage temperature, pH, Aw and NaCl content. The factors likely to affect the growth of the pathogens in milk involved storage temperature, pH, Aw and NaCl content. The variable factor was storage temperature at the range of 4~15$^{\circ}C$ and the fixed factors were pH 6.7, Aw 0.993 and NaC 1.3%. PMPwin5.1 calculated generation time, lag phase duration, time to level of infective dose for pathogens across a range of storage temperature.

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