• Journal of the Optical Society of Korea
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• 제18권5호
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• Journal of Mechanical Science and Technology
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• 제18권7호
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• pp.1222-1235
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• 2004

This study examines the influence of geometry on the internal flow and macroscopic behavior of the spray in Diesel nozzles. For this investigation, two bi-orifice nozzles were employed: one cylindrical and one conical. The first step is to use a non-destructive characterization method which is based on the production of silicone moulds so that the precise internal geometry of the two nozzles can be measured. At this stage the nozzles have been characterized dimensionally and therefore the internal flow can be studied using CFD calculations. The results gained from this experiment make it possible also to ascertain the critical cavitation conditions. Once the critical cavitation conditions have been identified, the macroscopic parameters of the spray can be studied in both cavitating and non-cavitating conditions using a test rig pressurized with nitrogen and with the help of a image acquisition system and image processing software. Consequently, research can be carried out to determine the influence that cavitation has on macroscopic spray behavior. From the point of view of the spray macroscopic behavior, the main conclusion of the paper is that cavitation leads to an increment of the spray cone angle. On the other hand, from the point of view of the internal flow, the hole outlet velocity increases when cavitation appears. This phenomenon can be explained by the reduction in the cross section of the liquid phase in the outlet section of the hole.

• 한국방재학회:학술대회논문집
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• 한국방재학회 2008년도 정기총회 및 학술발표대회
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• pp.79-82
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• 2008

모멘트 하중을 받는 I형 보의 탄성좌굴강도는 하중의 종류, 하중의 단면 내 작용위치, 그리고 구속조건 등과 같은 인자들에 의해 영향을 받는다. 대부분의 시방기준에서는 균일한 모멘트 조건에 대한 좌굴강도를 사용하고 있으며 비균일한 모멘트 효과를 고려하기 위하여 모멘트 구배 수정계수를 적용하고 있다. 본 논문에서는 SSRC 지침서의 방법을 일축대칭 I형 보에 적용할 수 있도록 개선된 모멘트 구배 수정계수를 제안하였다. 단면 내 임의의 높이에 작용하는 연직방향 하중에 대한 일축대칭 I형 보의 유한요소 좌굴해석을 실시하였으며 연직방향 하중은 지간 중앙에 작용하는 집중하중과 등분포 하중을 고려하였다.

• Wind and Structures
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• 제10권4호
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• pp.367-382
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• 2007

A nonlinear numerical method was developed to assess the stability of suspension bridge catwalks under a wind load. A section model wind tunnel test was used to obtain a catwalk's aerostatic coefficients, from which the displacement-dependent wind loads were subsequently derived. The stability of a suspension bridge catwalk was analyzed on the basis of the geometric nonlinear behavior of the structure. In addition, a full model test was conducted on the catwalk, which spanned 960 m. A comparison of the displacement values between the test and the numerical simulation shows that a numerical method based on a section model test can be used to effectively and accurately evaluate the stability of a catwalk. A case study features the stability of the catwalk of the Runyang Yangtze suspension bridge, the main span of which is 1490 m. Wind can generally attack the structure from any direction. Whenever the wind comes at a yaw angle, there are six wind load components that act on the catwalk. If the yaw angle is equal to zero, the wind is normal to the catwalk (called normal wind) and the six load components are reduced to three components. Three aerostatic coefficients of the catwalk can be obtained through a section model test with traditional test equipment. However, six aerostatic coefficients of the catwalk must be acquired with the aid of special section model test equipment. A nonlinear numerical method was used study the stability of a catwalk under a yaw wind, while taking into account the six components of the displacement-dependent wind load and the geometric nonlinearity of the catwalk. The results show that when wind attacks with a slight yaw angle, the critical velocity that induces static instability of the catwalk may be lower than the critical velocity of normal wind. However, as the yaw angle of the wind becomes larger, the critical velocity increases. In the atmospheric boundary layer, the wind is turbulent and the velocity history is a random time history. The effects of turbulent wind on the stability of a catwalk are also assessed. The wind velocity fields are regarded as stationary Gaussian stochastic processes, which can be simulated by a spectral representation method. A nonlinear finite-element model set forepart and the Newmark integration method was used to calculate the wind-induced buffeting responses. The results confirm that the turbulent character of wind has little influence on the stability of the catwalk.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.292-295
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• 2008

In a SCWR (SuperCritical pressure Water cooled Reactor), the coolant temperature initially at below the pseudo-critical temperature at the bottom of a reactor core increases as the coolant flows upward through the sub-channels of the fuel assemblies, and it finally becomes higher than the pseudo-critical temperature when it leaves the reactor core. At certain conditions, heat transfer deterioration occurs near the pseudo-critical temperature and it may cause a drastic rise of the fuel surface temperature resulting a fuel failure. Therefore, an accurate estimation of the heat transfer coefficient is very important for the thermal-hydraulic design of a reactor core. An experiment on heat transfer to the vertically upward flowing $CO_2$ at a supercritical pressure in a circular tube were performed at KAERI. The internal diameter of the test section is 6.32 mm, which corresponds to the hydraulic diameter of a sub-channel in the conceptional design proposed by KAERI. The test range of the mass flux is 285 to 1200 kg/m$^2$s and the maximum heat flux is 170 kW/m$^2$. The inlet pressure is maintained at 8.12 MPa, which is 1.1 times the critical pressure. A new correlation, which covers both the normal and deterioration heat transfer regimes was proposed and compared with the estimations by exiting correlations.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.524-529
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• 2001

Because of the ozone layer depletion and global wanning, new alternative refrigerants are being developed. Among them, HFC refrigerants are thought promising, but some European countries are arguing that these refrigerants are also harmful to the global wanning. Therefore, natural refrigerants should be considered as an eventual alternative in refrigerators and heat pumps. In the present study, the supercritical gas cooling process are computationally analysed by employing various turbulence models of carbon dioxide in a trans critical refrigeration cycle. The gas cooling process near the critical point experiences a drastic change in thermodynamic and transport properties, thus the heat transfer characteristics would be different from those of two or single phases. Based on the computational results, the correlations to estimate the near-critical heat transfer characteristics will are obtained.

• 한국자동차공학회논문집
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• 제10권1호
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• pp.187-194
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• 2002

It has been reported that cracks in mechanical joints is generally under mixed-mode and there is critical inclined angle at which mode I stress intensity factor becomes maximum. The crack propagates in arbitrary direction and thus the prediction of crack growth path is needed to provide against crack propagation or examine safety. In order to evaluate the fatigue life of cracks in mechanical joints, horizontal crack normal to the applied load and located on minimum cross section is major concern but critical inclined crack must also be considered. In this paper mixed-mode fatigue crack growth test is performed far horizontal crack and critical inclined crack in mechanical joints. Fatigue crack growth path is predicted by maximum tangential stress criterion using stress intensity factor obtained from weight function method, and fatigue crack growth rates of horizontal and inclined crack are compared.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.344-347
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• 2007

In this paper, the stability of a cracked cantilever beam subjected to follower force is presented. In addition, an analysis of the flutter instability(flutter critical follower force) of a cracked cantilever beam subjected to a follower compressive load is presented. Based on the Timoshenko beam theory. The vibration analysis on such cracked beam is conducted to identify the critical follower force for flutter instability based on the variation of the first two resonant frequencies of the beam. Besides, the effect of the crack's intensity and location on the flutter follower force is studied. The crack section is represented by a local flexibility matrix connecting two undamaged beam segments. The crack is assumed to be in the first mode of fracture and to be always opened during the vibrations. Generally, the critical follower force for flutter is proportional to the crack depth.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.356-359
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• 2007

In this paper, the stability of a rotating cantilever pipe conveying fluid with a crack is investigated by the numerical method. That is, the influences of the rotating angular velocity, mass ratio and crack severity on the critical flow velocity for flutter instability of system are studied. The equations of motion of rotating pipe are derived using the Euler beam theory and the Lagrange's equation. The crack section of pipe is represented by a local flexibility matrix connecting two undamaged pipe segments. The crack is assumed to be in the first mode of fracture and to be always opened during the vibrations. Generally, the critical flow velocity for flutter is proportional to the angular velocity and the depth of crack. Also, the critical flow velocity and stability maps of the rotating pipe system as a function of mass ratio for the changing each parameter are obtained.

• 한국전기전자재료학회논문지
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• 제14권2호
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• pp.158-162
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• 2001

In this report, a new process for patterning of YBaCuO thin films, ICP(inductively coupled plasma) method, is described by comparing with existing wet etching method. Two 100㎛ wide and 2mm long YBaCuO striplines on LaAlO$_3$ substrates have been fabricated using two patterning techniques. And the properties were compared with the critical temperature and the SEM photography. Then, the critical temperatures of two samples were about 88 K, but the cross section of sample using ICP method was shaper than that using the wet etching method. ICP method can be used as a good etching technique process for patterning of YBaCuO superconductor.