• Proceedings of the Optical Society of Korea Conference
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• 2002.11a
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• pp.116-117
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• 2002

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.3
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• pp.44-52
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• 2004

This paper proposed a error compensation methodology for three-DOF translational parallel manipulator. The proposed method uses CMM (coordinate measuring machine) as metrology equipment to measure the position of end-effector. To identify the transform relationships between the coordinate system of the parallel manipulator and the CMM coordinate system, a new coordinate referencing (or coordinate system identification) technique is presented. By using this technique, accurate coordinate transformation relationships are efficiently established. According to these coordinate transformation relationships, an equation to calculate the compensating error components at any arbitrary position of the end-effector is derived. In this paper, Monte Carlo simulation method is applied to simulate the compensation process. Through the simulation results, the proposed error compensation method proves its effectiveness and feasibility.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.11
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• pp.99-109
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• 2004

This paper proposes precision evaluation method for the positioning error of three-DOF translational parallel mechanism. The proposed method uses conventional CMM as metrology equipment to measure the position of end-effector. In order to obtain accurate measurement data from CMM, the transform relationship between the coordinate system of the parallel mechanism and the CMM coordinate system must be identified. For this purpose, a new coordinate referencing (or coordinate system identification) technique is presented. By using this technique accurate coordinate transformation relationships are efficiently established. According to these coordinate transformation relationships, an equation to calculate error components at any arbitrary position of the end-effector is derived. In addition, mathematical fitting models to represent the position error components in the two-dimensional workspace of the parallel mechanism are also constructed based on response surface methodology. The proposed error evaluation method proves its effectiveness through the experimental results and its application to real three-DOF parallel mechanism.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.3
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• pp.47-54
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• 2009

In the manufacturing industry, there has been a significant increase in the use of coordinate measuring machines(CMM). In this paper, the sources of CMM measurement performance are discussed. The effects of workpiece position, length and orientation are analyzed by using the design of experiments. Both a fractional factorial design and a factorial design are employed to conduct the experimental study. The analysis of variance is performed to determine the significance of factors in the experiment and regression analysis is applied to make the measurement approximate model. The results show that position along the Z axis, length and orientation affect the CMM measurement performance.

• International Journal of Precision Engineering and Manufacturing
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• v.1 no.1
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• pp.49-55
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• 2000

The semiconductor industry relies on digital optical imaging for the overlay metrology of integrated circuit patterns. One critical performance demand in the particular application of digital imaging is placed on the edge resolution that is defined as the smallest detectable displacement of an edge from its image acquired in digital from. As the critical feature size of integrated circuit patterns reaches below 0.35 micrometers, the edge resolution is required to be less than 0.01 micrometers. This requirement is so stringent that fundamental behaviors of digital optical imaging need to be explored especially for the precision coordinate metrology. Our investigation reveals that the edge resolution shows quasi-random characteristics, not being simply deduced from relevant opto-electronic system parameters. Hence, a stochastic upper bound analysis is made to come up with the worst edge resolution that can statistically well predict actual indeterminate edge resolutions obtained with high magnification microscope objectives.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 1991.10a
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• pp.379-401
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• 1991

A comprehensive computer software has been implemented in conjunction with the software for volumetric error generator, to assess simulation on specific measurement tasks. The simulation algorithms have been developed for major measurement tasks, such as step gauge, ring gauge, sphere gauge, and cylinder gauge simulations etc. Verification and practical applications of the developed module have shown its efficiency and validity.

• Industrial Engineering and Management Systems
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• v.6 no.2
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• pp.94-105
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• 2007

Measurement technology plays an important role in discrete manufacturing industry. Probe-type coordinate measuring machines (CMMs) are normally used to capture the geometry of part features. The measured points are then fit to verify a specified geometry by using the least squares method (LSQ). However, it occasionally overestimates the tolerance zone, which leads to the rejection of some good parts. To overcome this drawback, minimum zone approaches defined by the ANSI Y14.5M-1994 standard have been extensively pursued for zone fitting in coordinate form literature for such basic features as plane, circle, cylinder and sphere. Meanwhile, complex features such as torus have been left to be dealt-with by the use of profile tolerance definition. This may be impractical when accuracy of the whole profile is desired. Hence, the true deviation model of torus is developed and then formulated as a minimax problem. Next, a relatively new and simple population based evolutionary approach, particle swarm optimization (PSO), is applied by imitating the social behavior of animals to find the minimum tolerance zone torusity. Simulated data with specified torusity zones are used to validate the deviation model. The torusity results are in close agreement with the actual torusity zones and also confirm the effectiveness of the proposed PSO when compared to those of the LSQ.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.4
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• pp.91-99
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• 2009

Because of both precise measurement and efficient quality control, coordinate measuring machines(CMMs) have been widely used in the industry. The purpose of this paper is to present a method to estimate the CMM measurement uncertainty using design of experiments. A factorial design is applied to carry out the performance test proposed by ISO 10360 and to investigate CMM measurement errors associated to orientation and length of the length bar. In order to assess the measurement uncertainty for the performance test, an analysis of the uncertainty components that make up the uncertainty budget has been carried out. The procedure for evaluating the uncertainty of it follows GUM ("Guide to the expression of uncertainty in measurement"). The results show that the proposed method is suitable to investigate CMM performance and determine the contribution of machine variables to measurement uncertainty.

• Journal of the KSME
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• v.34 no.3
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• pp.177-184
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• 1994

이 글에서는 기하공차의 기본적인 개념들에 대한 설명과 삼차원측정기 응용소프트웨어에서 기하 공차를 평가하기 위한 수학적인 방법들에 대해 소개하였다. 최소영역법은 ISO규격에 의한 공차 평가법이란 점에서 근래의 연구의 대부분을 차지하고 있으나 표준적인 알고리즘이라 할 수 있는 방법은 아직 발표되지 않고 있으며 실용적인 소프트웨어의 경우 최소자승법을 근간으로 하고 있는 실정이다. 최근에는 이러한 형상추출과 기하공차평가를 포함하는 좌표식 측정기 술(coordinate metrology)이 컴퓨터통합생산(computer integrated manufacturing)시스템 구축에 있어서 아킬레스건이라 할 수 있는 컴퓨터원용검사(computer aided quality control)의 핵심적인 기술로 인식되어 선진국에서는 이미 표준기술을 확립하고자 하는 목적으로 체계적인 지원하에 연구를 수행하고 있다. 그러므로 국내에서도 품질보증에 의한 제조업 분야의 생산성 제고를 위 하여 좌표식 측정기술에 대한 연구와 투자가 시급하며 국내의 표준기술 확립이 절실히 요청되고 있다하겠다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.