• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2011년도 춘계학술발표대회
• /
• pp.34.2-34.2
• /
• 2011

The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

• Ecology and Resilient Infrastructure
• /
• 제5권1호
• /
• pp.1-10
• /
• 2018

We examined the effect of simultaneous application of phosphorus (P) and iron (Fe) on the phytotoxicity of lettuce in arsenic (As) contaminated soil using response surface methodology (RSM). To stabilize As and supply nutrient into soil, Fe and P were treated, respectively. Water soluble As and P was decreased by Fe application but increased by P application. Through phytotoxicity test, the result showed that only the addition of P affected lettuce root elongation even though both P and Fe were added. The correlation coefficients between root elongation and other indices indicated that the As content in the roots seemed to be the main reason that root growth was impeded. We could verify that the former result was not a passing phenomenon and Fe was necessarily needed to protect secondary pollution by exclusive usage of P fertilizer.

• 한국지하수토양환경학회:학술대회논문집
• /
• 한국지하수토양환경학회 1999년도 추계학술발표회
• /
• pp.34-38
• /
• 1999

This paper investigated remediation options for contaminated sediments with heavy metals. Twenty three sediment samples were taken from three different depths of 0.5m, 1.5m and 2.5m. The concentration of Heavy metals Cu, Pb, and Hg were measured. The concentration of copper far exceeded the Sediment Quality Guideline in U.S.A and Interim Sediment Quality Guidelines in Canada. Therefore, remediation of the sediments is requried to protect the benthos. Two remediation options were suggested : dredging of the organic sediments as deep as about 85cm followed by surface covers with clean soil, and in-situ stabilization of tile sediments using lime or cement followed by surface cover with clean soil.

• Geomechanics and Engineering
• /
• 제12권2호
• /
• pp.211-221
• /
• 2017

A laboratory investigation into crude oil contaminated sand-concrete interface behavior is performed. The interface tests were carried out through a direct shear apparatus. Pure sand and sand-bentonite mixture with different crude oil contents and three concrete surfaces of different textures (smooth, semi-rough, and rough) were examined. The experimental results showed that the concrete surface texture is an effective factor in soil-concrete interface shear strength. The interface shear strength of the rough concrete surface was found higher than smooth and semi-rough concrete surfaces. In addition to the texture, the normal stress and the crude oil content also play important roles in interface shear strength. Moreover, the friction angle decreases with increasing crude oil content due to increase of oil concentration in soil and it increases with increasing interface roughness.

• 대한전기학회논문지
• /
• 제34권4호
• /
• pp.135-143
• /
• 1985

The failure and erosion of relay contacts mainly depend on the presence of particles deposited on the contact surface in various contaminated atmospheres. In this paper, the effects of sea water and circuit parameters on the arcing and quenching of magnet relay contacts are studied. The sea water pollutants of relay contact surface have led to increase the arcing numbers on making contact, and the mean arc durations on breaking contacts. Moreover, the maximum surge voltage and mean arc duration between relay contacts are also varied significantly by the circuit parameters. The effects of the spark quenching circuits using condenser of diode on the arcing of contacts are also discussed.

• 대한화학회지
• /
• 제66권4호
• /
• pp.269-277
• /
• 2022

In recent years, carbon-based catalysts have become a research hotspot in environmental governance applications. Carbon-based catalysts have large surface areas, porous structures, multi-surface functional groups and excellent electron transfer capabilities, and can synergistically exhibit adsorption and catalytic performance. This article reviews the research progress of carbon-based catalysts in environmental governance, mainly including its application in wastewater treatment, exhaust gas purification and soil remediation. In view of the current difficulties in the research of carbon-based catalysts, the development prospects are proposed. We hope that this review will provide convenience for new entrants and researchers intending to employ carbon-based catalysts for the remediation of contaminated environment.

• 한국건축시공학회:학술대회논문집
• /
• 한국건축시공학회 2021년도 가을 학술논문 발표대회
• /
• pp.65-66
• /
• 2021

In this study, the optimum amount of hybrid inhibitors i.e. L-Arginine (LA) and sodium phosphate tribasic dodecahydrate (SP), applied for carbon steel rebar in simulated pore concrete (SCP) solution contaminated with 3.5 wt.% NaCl, was discovered. The corrosion inhibition performance of hybrid inhibitors was investigated by open circuit potential (OCP), electrochemical impedance spectroscopy (EIS), and potentiodynamic polarization. The highest corrosion inhibition efficiency was found as 99.52% corresponding to 2% LA and 0.25% SP after 210 h exposure. Anodic type inhibition action was confirmed by potentiodynamic polarization study. Surface studies including scanning electron microscopy (SEM), and atomic force microscopy (AFM) were used to figure out the surface morphology of the steel rebar treated with hybrid inhibitors in order to collaborate with electrochemical studies.

• 한국지하수토양환경학회:학술대회논문집
• /
• 한국지하수토양환경학회 2002년도 총회 및 춘계학술발표회
• /
• pp.38-43
• /
• 2002

A series of tests were performed to investigate the effects of pH and contamination level on cation exchange capacity and zeta potential in kaolinite loaded with lead. Test results show that cation exchange capacity of kaolinite is found to be in the range from 4 to 20meq/100g and it increased with increasing pH up to the converged number about 20meq/100g over pH 8. And then CEC has a tendency to reduce and converge to zero with increasing the concentration of Pb in the kaolinite surface. Moreover, zeta potential of kaolinite contaminated with lead is found to be in the range from -10 to 5mV, and zero point of charge is measured at about pH 3.5. Zeta potential of kaolinite contaminated with lead decreases with increasing pH values and decreasing Pb concentration of kaolinite.

• 한국지하수토양환경학회:학술대회논문집
• /
• 한국지하수토양환경학회 1998년도 공동 심포지엄 및 추계학술발표회
• /
• pp.81-85
• /
• 1998

In the present study, the design method of containment walls is proposed by utilizing an existing site. The selected remedy for the Source Area of Operable Unit 2 at Hill Air Force Base stipulated containment of the pure-phase trichloroethylene contamination. The in-place-mixed wall construction was selected because of the irregular topography, small area of the site, and the requirement to reach depths of greater than 90 feet below ground surface. Bench-scale compatibility studies were performed for the containment wall mix design on three commercial bentonite clays. The samples were subject to screening tests and long-term tests for evaluation of changed soil properties when exposed to the contaminated groundwater.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제50권4호
• /
• pp.182-189
• /
• 2001

In this paper, the distribution suspension porecelain insulators which had been used for long periods in the contaminated area were evaluated. The contaminated area is close to the sea and in the high density of industries. The heavily contaminated domestic and imported insulators were investigated by using electrical characteristics, such as power-frequency dry flashover voltage, power-frequency wet, flahover voltage, and leakage current. Also, these electrical results were compared with the contaminants on the surface. From these analysis, we found that the contamination from the industrial dust, only slightly decreased flashover voltage and increased leakage current. Therefore, the electrical properties of insulators used for 30 years in the area of coast and industrial complex were not much changed.