• 제목/요약/키워드: Contact resistivity

검색결과 257건 처리시간 0.029초

고분자 전해질 연료전지용 분리판으로서 스테인리스강에 HVOF 용사된 AISI316-WC 코팅층 (HVOF Thermal Sprayed AISI316-WC Coating Layer on Stainless Steel for PEMFC Bipolar Plate)

  • 남대근
    • 신재생에너지
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    • 제4권1호
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    • pp.31-36
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    • 2008
  • Stainless steels have been widely considered as metallic bipolar plates, due to their passive surface film, which is good for corrosion resistance. However, the high resistivity of the passive film increases interfacial contact resistance between the bipolar plates and the electrodes. Stainless steels thermal spray coated with a mixture of tungsten carbide and stainless steel powders showed that the coated layer safely combined with the matrix but they suffered many internal defects including voids and cracks. Many cracks were formed in the coated layer and the interface of the matrix and the coated layer during the rolling process. The coated and rolled stainless steels showed lower interfacial contact resistance and corrosion resistance than bare stainless steel because of low resistivity of tungsten carbide and numerous defects, which caused crevice corrosion, in the coated layer.

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고분자 전해질 연료전지용 스테인리스강 분리판의 HVOF AISI316-WC 코팅층 특성 (Characteristic of HVOF AISI316-WC Coating Layer on Stainless Steel Separator for PEMFC)

  • 남대근;강남현;박영도;김영석
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2008년도 추계학술대회 논문집
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    • pp.1-5
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    • 2008
  • Stainless steels have been widely considered as metallic separators, due to their passive surface film, which is good for corrosion resistance. However, the high resistivity of the passive film increases interfacial contact resistance between the separators and electrodes. Stainless steels thermal spray coated with a mixture of tungsten carbide and stainless steel powders showed that the coated layer safely combined with the matrix but they suffered many internal defects including voids and cracks. Many cracks were formed in the coated layer and the interface of the matrix and the coated layer during the rolling process. The coated and rolled stainless steels showed lower interfacial contact resistance and corrosion resistance than bare stainless steel because of low resistivity of tungsten carbide and numerous defects, which caused crevice corrosion, in the coated layer.

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몰드변압기용 에폭시 수지의 열 열화 특성에 관한 연구 (Study on the Thermal Degradation Properties of Epoxy Resin for the Cast Resin Transformer)

  • 남기동;정중일;허창수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1572-1574
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    • 2000
  • In this paper, study on the properties of the thermal degradated epoxy resin which is used in cast resin transformer is performed to investigate the problems of the decreasing insulation characteristics and crack in the cast resin transformer. In the test, contact angle, weight loss, surface resistivity and relative dielectric constant are measured. As the results of the above measurements, the epoxy resin has increased to 150$^{\circ}C$ in the contact angle and surface resistivity but at the above 150$^{\circ}C$ the values have decreased. The relative dielectric constants have increased in the thermal treated samples with the degradation temperature. Consequently, the insulation properties of the epoxy resin which is used in cast resin transformer have increased by the 150$^{\circ}C$ but decreased in the above 150$^{\circ}C$.

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고분자 복합재료의 표면 열화 현상과 전기적 특성에 관한 연구 (A Study on the Surface Degradation Phenomena and Electrical Properties of Polymer Composite Materials)

  • 박재세;임경범
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 학술대회 논문집 전문대학교육위원
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    • pp.75-78
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    • 2002
  • In this paper, we investigated the change of wettability, surface potential decay and surface resistivity caused by thermal-treated and plasma-treated FRP respectively for finding out the influence of electrical characteristics on the surface of polymer composites. For the change of wettability, the contact angle of thermal-treated specimen with the high temperature of 200$^{\circ}C$ increased. But that of plasma-treated specimen decreased. The characteristic of surface potential decay shows the tendency of the remarkable decrease on plasma-treated specimens, but no difference on thermal-treated specimen compared with untreated one. Also, for the surface resistivity, it shows the same trend compared with the change of contact angle. We can conclude that the degradation phenomena of epoxy surface are dominated by the induction of hydrophilicity and hydrophobicity.

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옥내용 에폭시 수지의 열화 특성 (Degradation Properties of Epoxy Resin Used in Indoor)

  • 남기동;정중일;연복희;허창수;박영두
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.57-60
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    • 2000
  • In this paper, study on the properties of the thermal degradated epoxy resin which is used in indoor insulation apparatus is performed to investigate the problems of the decreasing insulation characteristics and crack in the indoor insulation apparatus. As a parameter of variation, SEM, contact angle, surface resistivity, relative dielectric constant and weight loss are measured. As the results of the above measurements, the contact angle and surface resistivity of the epoxy resin has increased to 200$^{\circ}C$ in but at the above 200$^{\circ}C$ the values have decreased. The relative dielectric constants the thermal treated samples have increased on with the temperature increase. We find the volatile components of the epoxy resin compound has disappeared during thermal degradation by SEM. The insulation properties of the epoxy resin have increased by the 200$^{\circ}C$ but decreased in the above 200$^{\circ}C$.

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TiW 박막을 이용한 극한 환경 MEMS용 3C-SiC의 Ohmic contact 형성 (Ohmic Contact Formation of SiC for Harsh Environment MEMS Using a TiW Thin-film)

  • 정수용;노상수;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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    • pp.133-136
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    • 2004
  • In this study, the characteristics of 3C-SiC ohmic contact were investigated. Titanium-tungsten(TiW) films were used for contact metalization. The ohmic contact resistivity between 3C-SiC and TiW was measured by HP4155 and then calculated with the circular transmission line method(C-TLM). And also the physical properties of TiW and the interface between TiW and 3C-SiC were analyzed using XRD and AES. TiW films make a good role of a diffusion barrier and their contact properties with 3C-SiC are stable at high temperature.

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AlGaAs/GaAs HBT 응용을 위한 Pd/Si/Pd/Ti/Au 오믹 접촉 (Pd/Si/Pd/Ti/Au Ohmic Contact for Application to AIGaAs/GaAs HBT)

  • 김일호;장경욱
    • 한국진공학회지
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    • 제11권4호
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    • pp.201-206
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    • 2002
  • N형 InGaAs에 대한 Pd/Si/Pd/Ti/Au 오믹 접촉의 급속 열처리 조건에 따른 오믹 특성을 조사하였다. $450^{\circ}C$까지의 열처리 동안에 전반적으로 우수한 오믹 특성을 나타내어 $400^{\circ}C$, 20초의 급속 열처리 조건에서 최저 $3.9\times10^{-7}\Omega\textrm{cm}^2$ 의 접촉 비저항을 나타내었다. 이는 열처리에 의해 생성된 Pd-Si계 화합물의 형성 및 Si의 InGaAs 표면으로의 확산과 관련이 있었다. 그러나 $400^{\circ}C$에서 열처리 시간을 30초 이상으로 연장할 경우 접촉 비저항이 low-$10^{-6}\Omega \textrm{cm}^2$ 으로 약간 증가하였고, 열처리 조건을 425~$450^{\circ}C$/10초로 변화시킬 경우 high-$10^{-7}$~low-$10^{-6}\Omega \textrm{cm}^2$으로 약간 증가하였다. 이는 오믹 재료와 InGaAs의 반응에 의해 Pd-Ga계 화합물이 형성된 것과 관련이 있었다. 고온 열처리 후에도 오믹 재료와 InGaAs의 평활한 계면을 유지하면서 우수한 오믹 특성을 나타내어, 화합물 반도체 소자의 오믹 접촉으로 충분히 응용 가능하다고 판단된다.

Enhancement of light reflectance and thermal stability in Ag-Mg alloy contacts on p-type GaN

  • 송양희;손준호;김범준;정관호;이종람
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 춘계학술회의 초록집
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    • pp.18-20
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    • 2010
  • 수조구조의 InGaN LED 소자에 적용이 가능하며 높은 열적안정성을 갖는 저저항 고반사율 p형 오믹 전극을 개발하였다. Ag에 Mg을 첨가하여 p형 전극을 이용하여 $400^{\circ}C$, 공기중에서 1분간 열처리 후 $2.2\;{\times}\;10^{-5}\;{\Omega}cm^2$의 낮은 접촉 저항을 얻을 수 있었고, 460 nm 파장에서 82.6%의 높은 반사율을 획득할 수 있었다. 이는 Mg가 첨가됨에 따라 Ag가 고온에서 집괴되는 원인인 산소-공공 결합을 줄여줌으로써 높은 열적 안정성을 얻게 되었다. Ag를 열처리 할 경우, 외부에 존재하는 산소가 공공 자리에 들어간 후, 산소와 공공의 강한 인력에 의해 산소가 침입형 자리에 들어가서면서 두개의 공공과 강하게 bonding을 갖는 diffusion center가 많이 존재하게 된다. 하지만 Mg가 첨가되었을 경우, Oxygen affinity가 강한 Mg에 산소가 먼저 결합을 이루면서 산소-공공결합을 줄여주게 되어 높은 온도에서도 diffusion이 이루어지지 않고 높은 열적 안정성을 갖게 된다.

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High Quality Nickel Atomic Layer Deposition for Nanoscale Contact Applications

  • Kim, Woo-Hee;Lee, Han-Bo-Ram;Heo, Kwang;Hong, Seung-Hun;Kim, Hyung-Jun
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.22.2-22.2
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    • 2009
  • Currently, metal silicides become increasingly more essential part as a contact material in complimentary metal-oxide-semiconductor (CMOS). Among various silicides, NiSi has several advantages such as low resistivity against narrow line width and low Si consumption. Generally, metal silicides are formed through physical vapor deposition (PVD) of metal film, followed by annealing. Nanoscale devices require formation of contact in the inside of deep contact holes, especially for memory device. However, PVD may suffer from poor conformality in deep contact holes. Therefore, Atomic layer deposition (ALD) can be a promising method since it can produce thin films with excellent conformality and atomic scale thickness controllability through the self-saturated surface reaction. In this study, Ni thin films were deposited by thermal ALD using bis(dimethylamino-2-methyl-2-butoxo)nickel [Ni(dmamb)2] as a precursor and NH3 gas as a reactant. The Ni ALD produced pure metallic Ni films with low resistivity of 25 $\mu{\Omega}cm$. In addition, it showed the excellent conformality in nanoscale contact holes as well as on Si nanowires. Meanwhile, the Ni ALD was applied to area-selective ALD using octadecyltrichlorosilane (OTS) self-assembled monolayer as a blocking layer. Due to the differences of the nucleation on OTS modified surfaces toward ALD reaction, ALD Ni films were selectively deposited on un-coated OTS region, producing 3 ${\mu}m$-width Ni line patterns without expensive patterning process.

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p-GaN 위에 Roll-to-Roll sputter로 성장된 IZO의 접촉 비저항 및 투과도에 대한 박막 두께와 열처리 온도의 영향 (Effects of Film Thickness and Annealing Temperature on the Specific Contact Resistivity and the Transmittance of the IZO Layers Grown on p-GaN by Roll-to-Roll Sputtering)

  • 김준영;김재관;한승철;김한기;이지면
    • 대한금속재료학회지
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    • 제48권6호
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    • pp.565-569
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    • 2010
  • We report on the characteristics of indium-oxide-doped ZnO (IZO) ohmic contact to p-GaN. The IZO ohmic contact layer was deposited on p-GaN by a Roll-to-Roll (RTR) sputter method. IZO contact film with a thickness of 360, 230 and 100 nm yielded an ohmic contact resistance of $4.70{\times}10^{-4}$, $5.95{\times}10^{-2}$, $4.85{\times}10^{-1}\;{\Omega}cm^{2}$ on p-GaN when annealed at $600{^{\circ}C}$ for 1 min under a nitrogen ambient, respectively. While the transmittance of IZO film with a thickness of 360 nm slightly increased in the wavelength range of 380-800 nm after annealing, the transmittance rapidly increased up to 80% after annealing at $600{^{\circ}C}$ in the wavelength range of 380~430 nm because the crystallization of IZO film and created Ga vacancies near the p-GaN surface region were affected by the annealing. These results indicate that ohmic contact resistance and transmittance of the IZO films improved.