• Title/Summary/Keyword: Constant temperature chamber

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An Experimental Study on Semiconductor Process Chiller for Dual Channel (듀얼채널을 적용한 반도체공정용 칠러의 실험적 연구)

  • Cha, Dong-An;Kwon, Oh-Kyung
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.22 no.11
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    • pp.760-766
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    • 2010
  • Excessive heat occurs during semiconductor manufacturing process. Thus, precise control of temperature is required to maintain constant chamber-temperature and also wafer-temperature in the chamber. Compared to an industrial chiller, semiconductor chiller's power consumption is very high due to its continuous operation for a year. Considering the high power consumption, it is necessary to develop an energy efficient chiller by optimizing operation control. Therefore, in this study, a semiconductor chiller is experimentally investigated to suggest energy-saving direction by conducting load change, temperature rise and fall and control precision experiments. The experimental study shows the cooling capacity of dual-channel chiller rises over 30% comparing to the conventional chiller. The time and power consumption in the temperature rising experiment are 43 minutes and 8.4 kWh, respectively. The control precision is the same as ${\pm}1^{\circ}C$ at $0^{\circ}C$ in any cases. However, it appears that the dual channel's control precision improves to ${\pm}0.5^{\circ}C$ when the setting temperature is over $30^{\circ}C$.

Studies on the Flame Temperature Measurement of the Propagating Flame (전파화염에서의 화염온도측정에 관한 연구)

  • ;;Jeung, In Seuck
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.1 no.4
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    • pp.182-189
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    • 1977
  • The propagating flame temperature of the Propane-Air premixture by using 30.$\mu$ and 50.$\mu$ diameter platinum sensing wires, that is, Two Wires Correction Method, Through the constant volume burining inside the 150mm diameter, 30mm height combustion chamber under the circumstances of the atomospheric pressure, and the room temperature was determined. Also the temperature distribution across High Temperature Region, i.e. Flame Front, and the temperature profile behind the flame the front have been obtained.

Measuring System for Evaluating Sensing Reliability of Infrared Temperature Sensors

  • 박준혁;이민철;부광석
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.04a
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    • pp.169-173
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    • 1997
  • In this paper, auto measuring system for evaluating sensing reliability of infrared temperature sensors is developed. A developed system is composed of temperature controller, measuring sysytem and operating S/W. A constant temperature control of a chamber is accomplished by multi-heater using PI control. It is shown that the control resulte of temperature are well followed to the desired temperature value. The developed untegrated measuring system will increase reliability and productivity of products.

Quantitative Vapor Phase Exciplex Fluorescence Measurements at High Ambient Temperature and Pressure

  • Kim, Tongwoo;Jaal B. Ghandhi
    • Journal of Mechanical Science and Technology
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    • v.17 no.1
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    • pp.157-167
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    • 2003
  • The exciplex fluorescence technique with the TMPD (tetamethyl-Ρ-phenylene-diamine) / naphthalene dopant system was applied in a combustion-type constant-volume spray chamber. A detailed set of calibration experiments has been performed in order to quantify the TMPD fluorescence signal. It has been demonstrated that the TMPD fluorescence intensity was directly proportional to concentration, was independent of the chamber pressure, and was not sensitive to quenching by either water vapor or carbon dioxide. Using a dual heated-jet experiment, the temperature dependence of TMPD fluorescence up to 1000 K was measured. The temperature field in the spray images was determined using a simple mixing model, and an iterative solution method was used to determine the concentration and temperature field including the additional effects of the laser sheet extinction. The integrated fuel vapor concentration compared favorably with the measured amount of injected fuel when all of the liquid fuel had evaporated.

Analysis of Combustion and Flame Propagation Characteristics of LPG and Gasoline Fuels by Laser Deflection Method

  • Lee, Ki-Hyung;Lee, Chang-Sik;Ryu, Jea-Duk;Park, Gyung-Min
    • Journal of Mechanical Science and Technology
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    • v.16 no.7
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    • pp.935-941
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    • 2002
  • This work is to investigate the combustion characteristics and flame propagation of the LPG (liquified petroleum gas) and gasoline fuel. In order to characterize the combustion processes of the fuels, the flame propagation and combustion characteristics were investigated by using a constant volume combustion chamber The flame propagation of both LPG and gasoline fuels was investigated by the laser deflection method and the high-speed Schlieren photography. The result of laser deflection method show that the error of measured flame propagation speed by laser method is less than 5% compared with the result of high-speed camera. The flame propagation speed of the fuel is increased with the decrease of initial pressure and the increase of initial temperature in the constant volume chamber. The results also show that the equivalence ratio has a grate effect on the flame speed, combustion pressure and the combustion duration of the fuel-air mixture.

Spray and Combustion Characteristics of n-dodecane in a Constant Volume Combustion Chamber for ECN Research (ECN 연구용 고온 고압 정적 연소실에서의 n-dodecane 분무 및 연소 특성)

  • Kim, Jaeheun;Park, Hyunwook;Bae, Choongsik
    • Journal of ILASS-Korea
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    • v.19 no.4
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    • pp.188-196
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    • 2014
  • The spray and combustion characteristics of n-dodecane fuel were investigated in a CVCC (constant volume combustion chamber). The selection of ambient conditions for the spray followed ECN (engine combustion network) guidelines, which simulates the ambient condition of diesel engines at start of fuel injection. ECN is a collaboration network whose main objective is to establish an internet library of well-documented experiments that are appropriate for model validation and the advancement of scientific understanding of combustion at conditions specific to engines. Therefore repeatability of the experiments with high accuracy was important. The ambient temperature was varied from 750 to 930 K while the density was fixed at around $23kg/m^3$. The injection pressure of the fuel was varied from 500 to 1500 bar. The spray was injected in both non-reacting ($O_2$ concentration of 0%) and reacting conditions ($O_2$ concentration of 15%) to examine the spray and the combustion characteristics. Direct imaging with Mie Scattering was used to obtain the liquid penetration length. Shadowgraph was implemented to observe vapor length and lift-off length at non-reacting and reacting conditions, respectively. Pressure data was analyzed to determine the ignition delay with respect to the spray and ambient conditions.

A Study on the Flame Temperature Measurement of the Transiently Propagating Flame by using Platinum-Hot-Wire-Resistance-Thermometry (열선백금저항선을 이용한 과도적 전파화염의 화염온도측정에 관한 연구)

  • 정인석;조경국;황상순
    • Journal of the korean Society of Automotive Engineers
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    • v.7 no.3
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    • pp.94-101
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    • 1985
  • The flame temperature of LPG-air premixture flame was measured by extrapolation of limiting case corresponding to the infinitely thin diameter of Platinum-resistance-hot-wire. LPG-air premixture flame, initially under atmospheric pressure and room temperature, propagates downward from top of the model combustion chamber maintained at constant pressure through the whole combustion process. Analytical calculation technique was also applied to determine full temperature history or spatial temperature distribution from flame reaction zone to burnt gas region.

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Characteristics of the Transient Pressure in a Building Water Supply System with an Air Chamber (공기실이 설치된 건축물 급수관로의 과도압력 특성)

  • 황희성;임기원;이광복;조병선;차동진
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.12 no.8
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    • pp.782-790
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    • 2000
  • A numerical study has been conducted to characterize the transient pressure in a building water supply system with an air chamber by utilizing a commercial code that employs the method of characteristics. Some results produced for the purpose of verification in the study agree quite well with the previously reported. Several parameters are then varied. Among them are the valve closure time, the wave speed, the static pressure, the polytropic exponent, the air chamber volume, the inner diameter and the shape of orifice in the air chamber, etc, while the water temperature and velocity are kept constant at $20^P{circ}C $,/TEX> and 0.8 m/s, respectively, Results reported in this parametric study may be useful to understand the unsteady behavior of the system.

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A Study on the Flame Propagation Characteristics for LPG and Gasoline fuels by Using Laser Deflection Method (레이저 굴절법을 이용한 LPG와 가솔린 연료의 화염전파 특성에 관한 연구)

  • Lee, Kihyung;Lee, Changsik;Kang, Kernyong;Kang, Woo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.12
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    • pp.1608-1614
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    • 2000
  • For the purpose of obtaining fundamental data which is needed to develope combustion system of LPG engine, we made constant volume chamber and analyzed flame propagation characteristics under different intial temperature, initial pressure and equivalence ratio which affect combustion of LPG. We investigated flame propagation speed of each fuel using laser deflection method and compared with the investigated flame propagation speed of each fuel using laser deflection method and compared with the results of image processing of flame. As a result, the maximum flame propagation speed was found at equivalence ratio 1.0 and 1.1 for LPG and gasoline, respectively. In the lean region, we can see that flame propagation speed of LPG surpasses that of gasoline. On the contrary, flame propagation speed of gasoline surpasses LPG in the rich region. As initial temperature and initial pressure were higher, flame propagation speed was faster. And, as equivalence ratio was larger and initial temperature was higher, combustion duration was shorter and maximum combustion pressure was higher.

A Study on the Diesel Spray Evaporation and Combustion Characteristics in Constant Volume Chamber (정적연소실내의 디젤분무증발과 연소특성에 관한 연구)

  • Kim, S.H.;Kim, S.J.;Lee, M.B.;Kim, E.S.
    • Transactions of the Korean Society of Automotive Engineers
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    • v.2 no.6
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    • pp.102-109
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    • 1994
  • As a fundamental study to apply high pressure injection system to direct injection diesel engine, fuel injection system and constant volume combustion chamber were made and the behaviors of evaporating spray with the variation of injection pressure and the ambient gas temperature were observed by using high speed camera, and the combusion characteristics with the variation of injection pressure and A/F ratio were analyzed. As injection pressure increases, spray tip penetration and spray angle increase and, as a results spray volume increases. This helps an uniform mixing of fuel and air. Spray liquid core length decreases as ambient gas temperature increases, while it decreases as injection pressure increases but the effect of ambient gas temperature is dorminant. As injection pressure increases, ignition delay is shortened and combustion rate being raised, maximum heat release rate increases. It become clear that High injection pressure has high level of potential to improve the performance of DI-diesel engine.

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