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An Experimental Study on Semiconductor Process Chiller for Dual Channel  

Cha, Dong-An (Energy System Technology Center, Korea Institute of Industrial Technology)
Kwon, Oh-Kyung (Energy System Technology Center, Korea Institute of Industrial Technology)
Publication Information
Korean Journal of Air-Conditioning and Refrigeration Engineering / v.22, no.11, 2010 , pp. 760-766 More about this Journal
Abstract
Excessive heat occurs during semiconductor manufacturing process. Thus, precise control of temperature is required to maintain constant chamber-temperature and also wafer-temperature in the chamber. Compared to an industrial chiller, semiconductor chiller's power consumption is very high due to its continuous operation for a year. Considering the high power consumption, it is necessary to develop an energy efficient chiller by optimizing operation control. Therefore, in this study, a semiconductor chiller is experimentally investigated to suggest energy-saving direction by conducting load change, temperature rise and fall and control precision experiments. The experimental study shows the cooling capacity of dual-channel chiller rises over 30% comparing to the conventional chiller. The time and power consumption in the temperature rising experiment are 43 minutes and 8.4 kWh, respectively. The control precision is the same as ${\pm}1^{\circ}C$ at $0^{\circ}C$ in any cases. However, it appears that the dual channel's control precision improves to ${\pm}0.5^{\circ}C$ when the setting temperature is over $30^{\circ}C$.
Keywords
Chamber; Chiller; Dual channel; Energy saving; Semiconductor; Wafer cooling;
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