• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.854-857
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• 2000

Chemical Mechanical Polishing(CMP) has been accepted as one of the essential processes for VLSI fabrication. However, as the polishing process continues, pad pores get to be glazed by polishing residues, which hinder the supply of new slurry. This defect makes removal rate decrease with a number of polished wafer and the desired within-chip planarity, within wafer and wafer-to-wafer nonuniformity are unable to be achieved. So, pad conditioning is essential to overcome this defect. The eletroplated diamond grit disk is used as the conventional conditioner, And alumina long fiber, the .jet power of high pressure deionized water and vacuum compression are under investigation. But, these methods have the defects like scratches on wafer surface by out of diamond grits, subsidences of pad pores by over-conditioning, and the limits of conditioning effect. To improve these conditioning methods. this paper presents the Characteristics of Ultrasonic conditioning aided by cavitation.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.2
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• pp.175-183
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• 2004

Performance of the water/air direct contact air conditioning system, in which heat and mass are directly transferred between air and water droplet, is simulated using semi-empirical method. Direct contact system improves transport efficiency compared to conventional indirect contact system. In this study, correlations for h$_{c}$A / c$_{pm}$ which represent the capacity of direct contact system are derived as a function of air and water flowrate from the experimental data. Cooling and heating performance of the water/air direct contact air conditioning system are evaluated using these correlations.ons.

• Proceedings of the SAREK Conference
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• 2007.06a
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• pp.12-12
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• 2007

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.357-362
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• 2008

The present study has been conducted variable refrigerant flow system applied building. Multi air-conditioning system has some benefits : easier building management and maintenance and energy saving. Recently, the system heat pump has been employed in medium-sized and tall buildings. However, the performance data and design method for system heat pump are limited in literature due to complicated system parameters and operating conditions. In the present study, case study of a system heat pump applied various building. The aim of this paper is to application multi air-conditioners and to inform the benefits of multi air-conditioners.

• Proceedings of the SAREK Conference
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• 2004.06a
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• pp.95-95
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• 2004

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.10 no.5
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• pp.640-648
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• 1998

A numerical study has been conducted to investigate the effect of inflow supply air temperature and velocity on ventilation effectiveness in an underfloor air conditioning space. A low Reynolds number k-$\varepsilon$ model is implemented to calculate steady state turbulent velocity distributions. A step-down injection method is used to calculate local and room mean ages from transient concentrations based on the concept of the age of air. Results show that there is a significant effect of Archimedes number on ventilation effectiveness especially for cooling conditions. Reynolds number shows relatively minor effect on velocity distribution and ventilation effectiveness especially for isothermal and heating conditions. It can be concluded that underfloor air conditioning system provides good ventilation characteristics for cooling conditions because of temperature stratification in the space.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.1 no.3
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• pp.203-209
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• 1989

This paper is an experimental study on the pleasantly suitable cool/warm air conditioning system in order to minimize the energy consumption by attaching the electronic-controlled device to the heat pump air conditioning system.While the cool/warm air conditioning, the air temperatures in the entrance and exit of the indoor heat exchangers should be checked and when the surface of heat exchanger is reached to the dew point temperature, a speed of the compressor is to be automatically controlled by anti-dewing system in order to minimize the energy consumption.At the result of this study, the energy consuming amount is saved about 5% more than that of the conventional air conditioning system by prevent unnecessary dew forming.

• Proceedings of the SAREK Conference
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• 2005.06a
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• pp.187-187
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• 2005

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.3
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• pp.159-165
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• 2003

The fault detection and diagnosis technology may be applied in order to decrease the energy consumption and the maintenance cost of the air-conditioning system. To detect partial faults of the air-conditioning system, a neural network algorithm may be used. In this study, the neural network algorithm using normalized input data by the standard deviation was applied. And the [7$\times$10$\times$10$\times$1] neural network structure was selected. Test results showed that the neural network algorithm using normalized input data was very effective to detect the condenser fouling and the evaporator fan fault of an air-conditioning system.

• Proceedings of the SAREK Conference
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• 2005.06a
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• pp.33-33
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• 2005