• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집B
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• pp.770-775
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• 2001

Numerical calculation has been performed to investigate the fluid flow, heat transfer and local mass fraction of chemical species in the MOCVD (metalorganic chemical vapor deposition) manufacturing process. The mixing of reactants (trimethylgallium with hydrogen gas and ammonia) was presented by the concentration of each reactants to predict the uniformity of film growth. Effects of inlet size, location, mass flow rate and susceptor/cold wall tilt angle on the concentration were reported. The newly developed reactor, that precursors were supplied at separated inlet to prevent from premixing, was investigated to obtain the quantitative verification. As a results, the optimum mass flow rate, wall tilt angle and inlet conditions were proposed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.659-660
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• 2006

High-aspect-ratio(max. 12.5) microchannels with excellent surface quality and good shape uniformity have been realized utilizing laser-induced etching technique. Etch width and depth variations depend largely upon process variables such as laser power and etchant concentration. Etchant concentration in association with viscosity also influence on the cross-sectional profile of the channels. The optimum process conditions for the fabrication of high-aspect-ratio microchannels applicable to micro thermal devices are demonstrated.

• 설비공학논문집
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• 제17권11호
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• pp.1079-1087
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• 2005

In this paper, thermal comfort and ventilation performance characteristics in the lecture room with the ventilation system and two different air-conditioning systems, system air-conditioner or fan coil unit, were evaluated by experimental and numerical methods. We compared the measured data with the computational results of the predicted mean vote and carbon dioxide concentration. Additionally the ventilation effectiveness was calculated numerically. From a viewpoint of the uniformity of PMVs in the lecture room, the thermal distribution performance of the system air-conditioner was more effective than the fan coil unit. Carbon dioxide concentration and ventilation effectiveness were barely affected by the type of the air-conditioning system.

• 대한기계학회논문집B
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• 제23권3호
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• pp.388-397
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• 1999

Numerical simulations are carried out for the magnetic Czochralski single crystal growth system. It Is shown that a magnetic field significantly suppresses the convective flow and as the strength of magnetic field becomes to be stronger, the heat transfer in the melt is dominated by conduction rather than convection. By imposing a cusp magnetic field, the growth interface shape becomes convex toward the melt. When the axial magnetic field is imposed, there occurs an inversion of the interface shape with increase of the magnetic field strength. The oxygen concentration near the interface decreases with increasing cusp magnetic field strength while axial field causes an increase of an oxygen concentration at the central region and decrease of that at the edge of the crystal. The results show that the cusp magnetic field has advantages over an axial magnetic field In the radial uniformity of oxygen as well as in the additional degree of control.

• 한국진공학회지
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• 제10권3호
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• pp.341-349
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• 2001

수평형 MOCVD (유기금속 화학기상법) 제조공정에서 유체유동, 열전달 및 화학종의 국소적 질량분율을 고찰하기 위한 수치계산을 수행하였다. 수송가스로 작용하는 수소가스와 TMG및 암모니아의 농도분포를 예측함으로서 혼합과정을 분석하고 필름성장의 균일성을 예측하였다. 농도분포에 미치는 입구크기, 위치, 질량유량 및 벽면의 경사각도의 영향이 검토되었다. 계산결과로서 무차원 대류 열전달 계수 Nu에 의해 반응물의 농도분포를 정성적으로 예측할 수 있었으며, 균일한 필름성장을 위한 최적 질량유량, 벽면 경사도 및 입구조건이 제시되었다.

• 한국결정성장학회지
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• 제8권4호
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• pp.555-562
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• 1998

비균일 자장이 도가니에 인가되어 있는 상황에서 정상상태의 Czochralski 유동장과 비정상상태의 산소농도장에 대한 연구가 수치해석적인 방법으로 연구되었다. 여기에서 기준 자장의 세기가 B=0.1T, 0.2T, 0.3T의 경우에 대한 연구가 수행되었다. 가열에 의한 부력의 효과와 자유표면의 표면장력에 의한 열모세관 효과에 의하여 유발되는 자오면 유동은 비균일 자장에 의하여 차등적으로 억제되고 있다. 자자의 세기가 증가하면 자오면 유동에서 발생하는 순환류의 중심은 결정으로 접근하며, 순환류의 크기도 작아진다. 결정으로 흡수되는 산소의 세기가 클수록 낮아지며 농도분포는 균일해지는 경향을 갖는다.

• 한국세라믹학회지
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• 제48권6호
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• pp.610-616
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• 2011

The effect of curing temperature on basic geopolymeric reactivity and hardening behaviour of blast furnace slag were investigated using the mixture of pulverized slag and several alkaline solutions of relatively high concentration. For the pastes prepared at several different temperatures between 20$^{\circ}C$ and 90$^{\circ}C$, setting time and heat of reaction were examined while mineralogical and morphological examinations were performed for the hardened paste after curing period at same temperature. The geopolymeric reaction of slag was revealed to be accelerated strongly according to the curing temperature regardless of the sort and concentration of the alkaline solution. The increase of concentration of the alkaline solution within 9M and the existence of silicic ion in the solution also promoted the reaction severely. The mineral component and their ratio of the hardened paste were revealed to be influenced by the chemical species and silicic ion contained in alkaline solution rather than by the curing temperature. The higher temperature and longer period of curing stage were effective for the sustained formation of geopolymer and succeed improvement of density and uniformity of morphology of the final hardened body.

• 한국재료학회지
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• 제9권3호
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• pp.269-273
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• 1999

일반적으로 LPCVD 방법에 의한 다결정 실리콘 박막은 $SiH_4$가스를 열분해하여 증착한다. 본 실험에서는 다결정 실리콘 박막속에 포함된 산소농도를 낮추기 위하여 실리콘 웨이퍼를 반응로 안으로 장착할 때, 20slm의 $N_2$가스를 반응로의 위에서부터 아래로 flow하였으며 박막의 산소농도를 측정하기 위하여 두께가 $1000\AA$인 박막을 증착한 다음 SIMS로 분석한 결과 반응로의 hatch에 있는 짧은 injector를 통하여 20slm의 $N_2$가스를 flow한 경우보다 박막의 산소농도가 ~30배 정도 낮아짐을 알 수 있었다. 긴 injector를 사용하여 증착된 박막의 두께 균일도, particle 및 Rs를 측정하여 박막증착의 재현성이 있음을 평가하였다.

• 한국화재소방학회논문지
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• 제17권4호
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• pp.111-116
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• 2003

가로, 세로, 높이가 각각 100cm, 60cm, 45cm로 내용적이 $270\ell$인 폭발 용기를 이용하여 불균일 농도 상태의 LPG-공기 혼합가스의 폭발특성을 측정하였다. 폭발은 vented-explosion과 closed explosion의 조건에서 실시하였다. 실험의 변수로는 점화원의 위치, 노즐직경 및 유속으로, 시료가스를 주입하는 노즐의 직경과 유속을 변화시키면서 용기 내에서의 불균일 혼합정도를 조절하였다. 폭발압력은 strain형 압력센사를 사용하여 측정하였고 폭발화염의 거동은 비디오카메라로 측정하여 분석하였다. 실험결과 유속과 가스 주입 시간이 용기 내 가스 혼합에 중요한 요소임을 알 수 있었으며, 불균일 정도가 심화될 수록 폭발압력과 압력상승속도가 감소하였으나 용기 내 폭발화염의 체류시간은 크게 증가하였으며 이로 인하여 가스 폭발 후 화재로의 전이 위험성이 증가함을 알 수 있었다.

• 한국재료학회지
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• 제19권3호
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• pp.151-155
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• 2009

Micro-scale copper bumps for build-up PCB were electroplated using a pulse-reverse method. The effects of the current density, pulse-reverse ratio and brightener concentration of the electroplating process were investigated and optimized for suitable performance. The electroplated micro-bumps were characterized using various analytical tools, including an optical microscope, a scanning electron microscope and an atomic force microscope. Surface analysis results showed that the electroplating uniformity was viable in a current density range of 1.4-3.0 A/$dm^2$ at a pulse-reverse ratio of 1. To investigate the brightener concentration on the electroplating properties, the current density value was fixed at 3.0 A/$dm^2$ as a dense microstructure was achieved at this current density. The brightener concentration was varied from 0.05 to 0.3 ml/L to study the effect of the concentration. The optimum concentration for micro-bump electroplating was found to be 0.05 ml/L based on the examination of the electroplating properties of the bump shape, roughness and grain size.