• 제목/요약/키워드: Combined optical interferometry

검색결과 10건 처리시간 0.019초

3차원 변위측정을 위한 홀로스펙클 간섭법 (Holospeckle interferometry for measureen of 3-D displacement)

  • 박승옥
    • 한국광학회:학술대회논문집
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    • 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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    • pp.131-135
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    • 1990
  • The combined technique of holographic interferometry and speckle photography, so called holospeckle interferometry, has been attention for the measurement of 3-D displacements. This new technique enables the researcher to obtain information of in plane and out-of plane displacements from one photographic plate. There is room for further development of special optical arrangement in order to apply holospeckle interferometry in specific field. In this study, the enlarged fringe pattern was obtained by specifical optical arrangement.

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Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

  • Jo, Taeyong;Kim, KwangRak;Kim, SeongRyong;Pahk, HeuiJae
    • Journal of the Optical Society of Korea
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    • 제18권3호
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    • pp.236-243
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    • 2014
  • Surface profiling and film thickness measurement play an important role for inspection. White light interferometry is widely used for engineering surfaces profiling, but its applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. The conventional bucket algorithm had given inaccurate surface profiles because of the phase error that occurs when a thin-film exists on the top of the surface. Recently, reflectometry and white light scanning interferometry were combined to measure the film thickness and surface profile. These techniques, however, have found that many local minima exist, so it is necessary to make proper initial guesses to reach the global minimum quickly. In this paper we propose combing reflectometry and white light scanning interferometry to measure the thin-film thickness and surface profile. The key idea is to divide the measurement into two states; reflectometry mode and interferometry mode to obtain the thickness and profile separately. Interferogram modeling, which considers transparent thin-film, was proposed to determine parameters such as height and thickness. With the proposed method, the ambiguity in determining the thickness and the surface has been eliminated. Standard thickness specimens were measured using the proposed method. Multi-layered film measurement results were compared with AFM measurement results. The comparison showed that surface profile and thin-film thickness can be measured successfully through the proposed method.

Theoretical Considerations on Combined Optical Distance Measurements Using a Femtosecond Pulse Laser

  • Joo, Ki-Nam;Kim, Seung-Woo
    • Journal of the Optical Society of Korea
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    • 제16권4호
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    • pp.396-400
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    • 2012
  • We introduce a combined technique and the mathematical description for distance measurements using a femtosecond pulse laser in a long range and a fine resolution. For distance measurements, the maximum measurable range can be extended by combining measurement results from several different methods while requiring relationships between the different measurement uncertainties and unambiguity ranges. This paper briefly explains why the uncertainty of a rough measurement technique (RMT) should be, at least, smaller than the half unambiguity range of a fine measurement technique (FMT) in order to combine a FMT with a RMT. Further discussions about the total measurement range, resolution, and uncertainty for various optical measurement techniques are also discussed.

홀로스펙클 간섭법을 이용한 3차원 변형측정 연구 (Measurement of 3-D Deformation by Using Holospeckle Interferometry)

  • 박승옥;권영하;유성규
    • 한국광학회지
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    • 제1권1호
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    • pp.12-15
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    • 1990
  • 홀로그래피 간섭법과 스펙클 사진법을 결합한 홀로스펙클 간섭법을 이용하여 3차원 변형을 측정하였다. 이 방법은 이중노출된 하나의 사진건판으로부터 종변위와 횡변위를 모두 알아낼 수 있어 3차원 변형측정에 매우 유용하게 사용되고 있다. 본 연구에서는 물체의 일부분에 밀집되어 일어나는 변형을 측정하기 위하여 image holography에 기초를 둔 광학시스템을 구성하였다. 시스템의 배율을 적절히 증가시키고 기준파의 세기를 감소시킴으로써 보통의 홀로그램에 비해 스펙클의 효과를 증대시켰다. 이로써 가시도가 높은 Young의 무늬 뿐만 아니라 확대되고 명확한 홀로 그래피 간섭무늬를 얻을 수 있어 indentor에 의한 3차원 접촉변형을 측정하였다.

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A Method for the Measurement of Methane Gas Based on Multi-beam Interferometry

  • Ye, Jiansen;Li, Zhuo
    • Journal of the Optical Society of Korea
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    • 제17권6호
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    • pp.481-485
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    • 2013
  • A method for the measurement of the concentration of methane is experimentally demonstrated. The wavelength filter and gas cell are combined by using one Fabry-Perot etalon, which is filmed with the reflectivity of 96%. The optical broadband source is not only filtered to match the absorption wavelength of methane, but also absorbed by the methane in the same Fabry-Perot etalon. The concentration of the methane can be detected directly by measuring the transmission intensity. Compared with the conventional method, the proposed method possesses low costand high stability.

솔더 페이스트 자동검사를 위한 2-D/3-D 복합 알고리즘 (2-D/3-D Combined Algorithm for Automatic Solder Paste Inspection)

  • 조상현;이상윤;임쌍근;최흥문
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.173-176
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    • 2002
  • In this paper, we present the combined 2-D and 3-D algorithms for automatic solder paste inspection. For automatic inspection, optical system for the combined inspection and driving unit is made. One-pass run length algorithm that has fast and efficient memory space is applied to the input image fur extracting solder paste patterns. The path of probe movement is then calculated for an automatic inspection. For a fast 3-D inspection, the phase shift algorithm based on Moire interferometry is also used. In addition, algorithms used in this paper are coded by $MMX^{TM}$. A probe system is manufactured to simultaneously inspect 2-D and 3-D for 10mm$\times$10mm field of view, with resolutions of 10 $\mu\textrm{m}$for both x, y axis and 17 $\mu\textrm{m}$for z axis, and then, experiments on several PCBs are conducted. The processing times of 2-D and 3-D, excluding an image capturing, is 0.039 sec and 0.047 sec, respectively. The credible result with $\pm$ 1$\mu\textrm{m}$uncertainty can be also achieved.

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정밀 삼차원 측정을 위한 백색광 간섭 광학 프로브 개발 (Optical Probe of white Light Interferometry for Precision Coordinate Metrology)

  • 김승우;진종한;강민구
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.195-198
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    • 2002
  • Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

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광학 위성영상과 SAR 위성영상의 DEM 융합에 관한 연구 (A Study on the Fusion of DEM Generated from Images of Optical Satellite and SAR)

  • 유복모;홍재민;진경혁;윤창락
    • 한국지형공간정보학회:학술대회논문집
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    • 한국지형공간정보학회 2002년도 추계학술대회
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    • pp.58-65
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    • 2002
  • 위성영상으로부터 수치고도모형(DEM:Digital Elevation Model)을 생성하는데 있어 입체 광학 위성영상을 이용하는 방법과 입체 SAR 위성영상을 이용한 레이다간섭 기법(SAR Interferometry)이 가장 널리 사용되고 있다. 이러한 기법들은 영상 취득 센서의 특성과 자료 처리의 한계를 가지고 있으며 이는 서로 다른 특성의 자료를 융합함으로써 극복될 수 있다. 본 연구는 SAR 위성영상과 광학 위성영상으로부터 생성된 DEM을 융합하여 고품질의 DEM을 생성하고자 함이 목적이다. DEM 융합은 SAR 위성영상의 DEM과 광학 위성영상의 DEM의 특성을 상호 보완하기 위해 다해상도 wavelet 변환(Multiresolution Wavelet Transform) 기법이 적용되었다. 다해상도 wavelet 변환 기법에 의한 DEM 융합은 오차의 영향을 받는 부분에 대해 다른 DEM 자료를 대체함으로써 수행되며 본 연구에서는 SPOT 위성영상과 ERS-1 위성영상을 이용하여 DEM을 생성하고 DEM 융합 기법을 적용하였다. DEM의 오차 분석은 1:5000 수치지형도를 이용하여 기준 DEM을 생성하여 비교하였으며, DEM 융합 결과 서로 다른 특성의 DEM을 융합함으로써 보다 향상된 DEM 제작 가능성을 타진하였다.

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Simulation for Small Lamellar Grating FTIR Spectrometer for Passive Remote Sensing

  • Chung, You Kyoung;Jo, Choong-Man;Kim, Seong Kyu;Kim, In Cheol;Park, Do-Hyun;Bae, Hyo-Yook;Kang, Young Il
    • Journal of the Optical Society of Korea
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    • 제20권6호
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    • pp.669-677
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    • 2016
  • A miniaturized FTIR spectrometer based on lamellar grating interferometry is being developed for passive remote-sensing. Consisting of a pair of micro-mirror arrays, the lamellar grating can be fabricated using MEMS technology. This paper describes a method to compute the optical field in the interferometer to optimize the design parameters of the lamellar grating FTIR spectrometer. The lower limit of the micro-mirror width in the grating is related to the formation of a Talbot image in the near field and is estimated to be about $100{\mu}m$ for the spectrometer to be used for the wavelength range of $7-14{\mu}m$. In calculating the far field at the detection window, the conventional Fraunhofer equation is inadequate for detection distance of our application, misleading the upper limit of the micro-mirror width to avoid interference from higher order diffractions. Instead, the far field is described by the unperturbed plane-wave combined with the boundary diffraction wave. As a result, the interference from the higher order diffractions turns out to be negligible as the micro-mirror width increases. Therefore, the upper limit of the micro-mirror width does not need to be set. Under this scheme, the interferometer patterns and their FT spectra are successfully generated.

고해상도 DEM을 활용한 로스해 Campbell 빙하의 지반접지선 추정 (Grounding Line of Campbell Glacier in Ross Sea Derived from High-Resolution Digital Elevation Model)

  • 김승희;김덕진;김현철
    • 대한원격탐사학회지
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    • 제34권3호
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    • pp.545-552
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    • 2018
  • 지반접지선은 남극 빙하 및 빙붕의 취약성을 나타내는 가장 핵심적인 척도로 물질균형의 증거로 사용된다. 본 연구에서는 SAR와 레이더 고도계 위성을 이용하여 빙하와 빙붕의 고해상도 수치고도모델을 제작하고, 이를 이용하여 동남극의 Campbell 빙하의 지반접지선의 위치를 추정하고 시공간적 변화를 관찰하였다. 2013년 6월 21일과 2016년 9월 10일에 획득된 TanDEM-X 와 TerraSAR-X 자료와 촬영날짜 대비 15일 이내의 CryoSat-2 레이더 고도계 자료의 조합을 이용하여 고해상도 수치고도모델을 제작 후 지반접지선을 추정하였으나 3년 동안 큰 변화를 관찰하지 못하였다. 지반접지선 추정 시 사용된 얼음의 평균 밀도는 정확하게 알려져 있기 않기 때문에 얼음의 밀도를 변화시킨 지반접지선의 변화를 분석하였다. DDInSAR로 추정된 지반접지선과는 공간적으로 큰 차이가 있었지만 광학위성의 표면 특징을 이용하여 추정된 지반접지선과는 얼음의 밀도가 약 $880kg/m^3$일 때 가장 유사하였다. 본 연구는 해저지형의 수직적 정확도에 따라서 결과의 신뢰도가 변할 수 있지만 얼음의 지반접지선 지역의 유체정역학적 얼음 두께가 더욱 큰 영향을 끼칠 것으로 고려되며 동일한 오차를 포함한 두 시기의 지반접지선을 비교하였기 때문에 상대적 변화는 의미가 있다고 고려된다.