• Title/Summary/Keyword: Combined optical interferometry

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Holospeckle interferometry for measureen of 3-D displacement (3차원 변위측정을 위한 홀로스펙클 간섭법)

  • 박승옥
    • Proceedings of the Optical Society of Korea Conference
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    • 1990.02a
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    • pp.131-135
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    • 1990
  • The combined technique of holographic interferometry and speckle photography, so called holospeckle interferometry, has been attention for the measurement of 3-D displacements. This new technique enables the researcher to obtain information of in plane and out-of plane displacements from one photographic plate. There is room for further development of special optical arrangement in order to apply holospeckle interferometry in specific field. In this study, the enlarged fringe pattern was obtained by specifical optical arrangement.

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Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

  • Jo, Taeyong;Kim, KwangRak;Kim, SeongRyong;Pahk, HeuiJae
    • Journal of the Optical Society of Korea
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    • v.18 no.3
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    • pp.236-243
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    • 2014
  • Surface profiling and film thickness measurement play an important role for inspection. White light interferometry is widely used for engineering surfaces profiling, but its applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. The conventional bucket algorithm had given inaccurate surface profiles because of the phase error that occurs when a thin-film exists on the top of the surface. Recently, reflectometry and white light scanning interferometry were combined to measure the film thickness and surface profile. These techniques, however, have found that many local minima exist, so it is necessary to make proper initial guesses to reach the global minimum quickly. In this paper we propose combing reflectometry and white light scanning interferometry to measure the thin-film thickness and surface profile. The key idea is to divide the measurement into two states; reflectometry mode and interferometry mode to obtain the thickness and profile separately. Interferogram modeling, which considers transparent thin-film, was proposed to determine parameters such as height and thickness. With the proposed method, the ambiguity in determining the thickness and the surface has been eliminated. Standard thickness specimens were measured using the proposed method. Multi-layered film measurement results were compared with AFM measurement results. The comparison showed that surface profile and thin-film thickness can be measured successfully through the proposed method.

Theoretical Considerations on Combined Optical Distance Measurements Using a Femtosecond Pulse Laser

  • Joo, Ki-Nam;Kim, Seung-Woo
    • Journal of the Optical Society of Korea
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    • v.16 no.4
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    • pp.396-400
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    • 2012
  • We introduce a combined technique and the mathematical description for distance measurements using a femtosecond pulse laser in a long range and a fine resolution. For distance measurements, the maximum measurable range can be extended by combining measurement results from several different methods while requiring relationships between the different measurement uncertainties and unambiguity ranges. This paper briefly explains why the uncertainty of a rough measurement technique (RMT) should be, at least, smaller than the half unambiguity range of a fine measurement technique (FMT) in order to combine a FMT with a RMT. Further discussions about the total measurement range, resolution, and uncertainty for various optical measurement techniques are also discussed.

Measurement of 3-D Deformation by Using Holospeckle Interferometry (홀로스펙클 간섭법을 이용한 3차원 변형측정 연구)

  • 박승옥;권영하;유성규
    • Korean Journal of Optics and Photonics
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    • v.1 no.1
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    • pp.12-15
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    • 1990
  • Holospeckle interferometry, the combined technique of holographic interferometry and speckle photography, was applied to the measurement of 3-D contact deformation created by an indentor. This new tech$.$ nique makes possible to measure both in-plane and out-of-plane displacements from one photographic plate. In this study, the optical system based on image holography was set up. In order to enhance the size and the contrast of the speckle, a proper magnification and a low reference beam ratio was used as compared with the conventional holographic interferometry technique. This system shows the magnified and clear holographic interference fringe as well as Young's fringe patterns.tterns.

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A Method for the Measurement of Methane Gas Based on Multi-beam Interferometry

  • Ye, Jiansen;Li, Zhuo
    • Journal of the Optical Society of Korea
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    • v.17 no.6
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    • pp.481-485
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    • 2013
  • A method for the measurement of the concentration of methane is experimentally demonstrated. The wavelength filter and gas cell are combined by using one Fabry-Perot etalon, which is filmed with the reflectivity of 96%. The optical broadband source is not only filtered to match the absorption wavelength of methane, but also absorbed by the methane in the same Fabry-Perot etalon. The concentration of the methane can be detected directly by measuring the transmission intensity. Compared with the conventional method, the proposed method possesses low costand high stability.

2-D/3-D Combined Algorithm for Automatic Solder Paste Inspection (솔더 페이스트 자동검사를 위한 2-D/3-D 복합 알고리즘)

  • 조상현;이상윤;임쌍근;최흥문
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.173-176
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    • 2002
  • In this paper, we present the combined 2-D and 3-D algorithms for automatic solder paste inspection. For automatic inspection, optical system for the combined inspection and driving unit is made. One-pass run length algorithm that has fast and efficient memory space is applied to the input image fur extracting solder paste patterns. The path of probe movement is then calculated for an automatic inspection. For a fast 3-D inspection, the phase shift algorithm based on Moire interferometry is also used. In addition, algorithms used in this paper are coded by $MMX^{TM}$. A probe system is manufactured to simultaneously inspect 2-D and 3-D for 10mm$\times$10mm field of view, with resolutions of 10 $\mu\textrm{m}$for both x, y axis and 17 $\mu\textrm{m}$for z axis, and then, experiments on several PCBs are conducted. The processing times of 2-D and 3-D, excluding an image capturing, is 0.039 sec and 0.047 sec, respectively. The credible result with $\pm$ 1$\mu\textrm{m}$uncertainty can be also achieved.

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Optical Probe of white Light Interferometry for Precision Coordinate Metrology (정밀 삼차원 측정을 위한 백색광 간섭 광학 프로브 개발)

  • 김승우;진종한;강민구
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.195-198
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    • 2002
  • Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

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A Study on the Fusion of DEM Generated from Images of Optical Satellite and SAR (광학 위성영상과 SAR 위성영상의 DEM 융합에 관한 연구)

  • Yeu, Bock-Mo;Hong, Jae-Min;Jin, Kyeong-Hyeok;Yoon, Chang-Rak
    • 한국지형공간정보학회:학술대회논문집
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    • 2002.11a
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    • pp.58-65
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    • 2002
  • The most widespread techniques for DEM generation are stereoscopy for optical sensor images and interfereometry for SAR images. These techniques suffer from certain sensor and processing limitations, which can be overcome by the synergetic use of both sensors and DEMs respectively. In this paper, different strategies for fusing SAR and optical data are combined to derive high quality DEM products. The multiresolution wavelet transform, which take advantage of the complementary properties of SAR and stereo optical DEMs, will be applied for the fusion process. By taking advantage of the fact that errors of the DEMs are of different nature using the multiresolution wavelet transform, affected part are filtered and replaced by those of the counterpart and is tested with two sets of SPOT and ERS DEM, resulting in a remarkable improvement in DEM. For the analysis of results, the reference DEM is generated from digital base map(1:5000).

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Simulation for Small Lamellar Grating FTIR Spectrometer for Passive Remote Sensing

  • Chung, You Kyoung;Jo, Choong-Man;Kim, Seong Kyu;Kim, In Cheol;Park, Do-Hyun;Bae, Hyo-Yook;Kang, Young Il
    • Journal of the Optical Society of Korea
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    • v.20 no.6
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    • pp.669-677
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    • 2016
  • A miniaturized FTIR spectrometer based on lamellar grating interferometry is being developed for passive remote-sensing. Consisting of a pair of micro-mirror arrays, the lamellar grating can be fabricated using MEMS technology. This paper describes a method to compute the optical field in the interferometer to optimize the design parameters of the lamellar grating FTIR spectrometer. The lower limit of the micro-mirror width in the grating is related to the formation of a Talbot image in the near field and is estimated to be about $100{\mu}m$ for the spectrometer to be used for the wavelength range of $7-14{\mu}m$. In calculating the far field at the detection window, the conventional Fraunhofer equation is inadequate for detection distance of our application, misleading the upper limit of the micro-mirror width to avoid interference from higher order diffractions. Instead, the far field is described by the unperturbed plane-wave combined with the boundary diffraction wave. As a result, the interference from the higher order diffractions turns out to be negligible as the micro-mirror width increases. Therefore, the upper limit of the micro-mirror width does not need to be set. Under this scheme, the interferometer patterns and their FT spectra are successfully generated.

Grounding Line of Campbell Glacier in Ross Sea Derived from High-Resolution Digital Elevation Model (고해상도 DEM을 활용한 로스해 Campbell 빙하의 지반접지선 추정)

  • Kim, Seung Hee;Kim, Duk-jin;Kim, Hyun-Cheol
    • Korean Journal of Remote Sensing
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    • v.34 no.3
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    • pp.545-552
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    • 2018
  • Grounding line is used as evidence of the mass balance showing the vulnerability of Antarctic glaciers and ice shelves. In this research, we utilized a high resolution digital elevation model of glacier surface derived by recently launched satellites to estimate the position of grounding line of Campbell Glacier in East Antarctica. TanDEM-X and TerraSAR-X data in single-pass interferometry mode were acquired on June 21, 2013 and September 10, 2016 and CryoSat-2 radar altimeter data were acquired within 15 days from the acquisition date of TanDEM-X. The datasets were combined to generate a high resolution digital elevation model which was used to estimate the grounding line position. During the 3 years of observation, there weren't any significant changes in grounding line position. Since the average density of ice used in estimating grounding line is not accurately known, the variations of the grounding line was analyzed with respect to the density of ice. There was a spatial difference from the grounding line estimated by DDInSAR whereas the estimated grounding line using the characteristics of the surface of the optical satellite images agreed well when the ice column density was about $880kg/m^3$. Although the reliability of the results depends on the vertical accuracy of the bathymetry in this study, the hydrostatic ice thickness has greater influence on the grounding line estimation.