• 제목/요약/키워드: Coherent control

검색결과 95건 처리시간 0.027초

EUV 펠리클 투과도에 따른 이미지 전사 특성 분석 (Imaging Performance of the Dependence of EUV Pellicle Transmittance)

  • 우동곤;김정환;김정식;홍성철;안진호
    • 반도체디스플레이기술학회지
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    • 제15권3호
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    • pp.35-39
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    • 2016
  • Extreme Ultraviolet Lithography (EUVL) is the most promising technique in the field of Next Generation Lithography (NGL) expected to be used in the 1x-nm node for High Volume Manufacturing (HVM). But there exits remaining challenges for proper defect control of EUV mask. It was considered development of EUV pellicle for protecting the EUV mask has many obstacles due to high extinction coefficient of EUV wavelength. Recently researchers in the industry of semiconductor argue about the necessity of EUV pellicle and make effort to achieve it. In this paper, we investigated that the relationship between imaging performance and transmittance of EUV pellicle quantitatively. We made in-house EUV pellicle and analyzed its imaging performance of the dependence of pellicle transmittance using Coherent Scattering Microscopy(CSM). The imaging performance of EUV mask with pellicle is affected by its transmittance and we found that the performance of EUV mask improved with higher transmittance pellicle.

선로 조류 유지 기법에 근거한 계통축약 및 다변수 제어기법 적용 연구 (A study on application of aggregation method based on power flow matching technique and multi-variable control method to the power system)

  • 이병하;오민혁;백정명
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 추계학술대회 논문집 전력기술부문
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    • pp.342-344
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    • 2006
  • The modem enormous electric power system has made power system analysis much more complex and difficult. For effective analysis of the power system, model reduction and aggregation is required. In this paper, a new aggregation method is presented to aggregate the coherent generators in the large scale power system while matching the power flow. In order to demonstrate the effects of this aggregation method, it is applied to a small scale power system. A multi-variable control technique of $H_{\infty}$ control is also applied to enhance the dynamic stability of the aggregated power system.

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코헤런트 라만 분광학을 위한 다중채널 데이터 수집과 제어장치 (A Multichannel Data Acquisition and Control System for Coherent Raman Spectroscop)

  • 박승남
    • 한국광학회:학술대회논문집
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    • 한국광학회 1991년도 제6회 파동 및 레이저 학술발표회 Prodeedings of 6th Conference on Waves and Lasers
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    • pp.144-149
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    • 1991
  • 코헤런트 라만분광학 실험에 사용할 다중채널 데이터 수집과 제어장치를 제작하고 프로그램을 개발하였다. CARS 신호를 규격화하기 위해 두 레이저의 세기를 측정하기 위해 최대값 검출기를 제작하였고, 제작한 로직제어기를 프로그램으로 제어하여 측정을 동기시켰다. 또한 우라늄 음극전구의 optogalvanic 신호를 측정하여 섹소레이저의 파장을 교정할 수 있었다. 프로그램은 매뉴선택방식으로 작성하여 수정과 사용이 용이하도록 하였다. 실제로 압력이 100 Torr 인 질소의 CARS 신호를 측정하여 이 장치의 유용성을 확인하였다.

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915MHz ZigBee 비동기 기반 수신기 구조 개선에 관한 연구 (A study on improvement of the architecture design based on the non-coherent detection for 915MHz ZigEee receiver)

  • 강성민;이성용;정차근
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 학술대회 논문집 정보 및 제어부문
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    • pp.394-395
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    • 2008
  • 본 논문에서는 ZigBee (IEEE 802.15.4b Low-Rate Wireless Personal Area Network; LR-WPAN) 915MHz 대역 수신기에 주파수 옵셋에 따른 성능을 알아보고 수신기 Correlator에 Multiple delay differential filter를 적용하여 주파수 옵셋의 영향을 최소화하는 방법을 제시한다. AWGN 환경에서 주파수 옵셋의 영향이 최대와 최소(ZigBee frequency tolerance) ${\pm}80ppm$, $0{\sim}73200Hz$)일 때의 환경에서 시뮬레이션을 통해 제안한 수신기의 성능을 검증한다.

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Tailoring and Control of The Micro (Nano) Structure of Functional CMSs and MMCs

  • Colomban
    • The Korean Journal of Ceramics
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    • 제5권1호
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    • pp.55-72
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    • 1999
  • A cheallenge in the aerospace field is to design new composites satisfying specific and sometimes conflicting properties. The key steps are ⅰ)the understanding and the control of the reaction between the reinforcement and the embedding matrix, ⅱ) the achievement of a coherent and robust matrix. The problems encountered to prepare particulate, 1D, 2D and 3D reinforced composites using polymeric are discussed. Emphasis is given to the control of the micro/nanostructure using Raman microspectrometry and depth-sensing microindentation, in order to get information on the micromechanics and fiber structure simultaneously, within ceramic (CMC's) and metal matrix (MMC's) composites.

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주파수 영역상의 AR 모델링 기반 이용한 LR-WPAN용 무선측위기법 (A Frequency Domain based Positioning Method using Auto Regressive Modeling in LR-WPAN)

  • 홍윤기;배승천;최성수;이원철
    • 한국통신학회논문지
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    • 제34권6C호
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    • pp.561-570
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    • 2009
  • 임펄스 기반의 초광대역 통신 기술은 이론적으로 근거리에서 고속의 데이터 전송과 고해상도의 거리 인지 및 무선 측위가 가능하다는 장점을 가지고 있지만 이러한 기능들을 수행하기 위해서는 우선적으로 고속의 ADC(Analog to Digital Convertor)가 요구되며 특히, 시간 기반의 무선 측위 기법을 적용할 경우 더욱 그러하다. 그러나 현실적으로 GHz 이상의 고속의 ADC는 매우 고가이기 때문에 본 논문에서 목표로 하는 저비용을 고려한 저속의 무선 개인 영역 네트워크 (Low Rate - Wireless Personal Area Network; LR-WPAN)에서는 부적합하다. 따라서 본 논문에서는 저속의 ADC로 고정밀의 무선 측위가 가능한 주파수 영역에서 계산의 복잡도가 낮은 AR(Auto Regressive) 모델을 기반으로한 레인징 기법을 소개하고, 아날로그 단에서 주파수 변환을 위해 카운터를 이용한 VCO(Voltage Control Oscillator) 방식의 non-coherent 기반의 수신 구조를 제안한다. 제안된 기법에 대한 성능을 검증하기 위해서 IEEE 802.15.4a TG에서 제시한 채널 모델을 적용하였으며 시뮬레이션 결과로부터 제안된 레인징 및 측위 방안의 우수성을 검증하였다.

Optimal Power Allocation for Channel Estimation of OFDM Uplinks in Time-Varying Channels

  • Yao, Rugui;Liu, Yinsheng;Li, Geng;Xu, Juan
    • ETRI Journal
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    • 제37권1호
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    • pp.11-20
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    • 2015
  • This paper deals with optimal power allocation for channel estimation of orthogonal frequency-division multiplexing uplinks in time-varying channels. In the existing literature, the estimation of time-varying channel response in an uplink environment can be accomplished by estimating the corresponding channel parameters. Accordingly, the optimal power allocation studied in the literature has been in terms of minimizing the mean square error of the channel estimation. However, the final goal for channel estimation is to enable the application of coherent detection, which usually means high spectral efficiency. Therefore, it is more meaningful to optimize the power allocation in terms of capacity. In this paper, we investigate capacity with imperfect channel estimation. By exploiting the derived capacity expression, an optimal power allocation strategy is developed. With this developed power allocation strategy, improved performance can be observed, as demonstrated by the numerical results.

음향가진과 보염기형상이 확산화염의 특성에 미치는 영향 (Effect of Acoustical Excitation and Flame Stabilizer on a Diffusion Flame Characteristics)

  • 전충환;장영준
    • 한국연소학회지
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    • 제3권1호
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    • pp.1-10
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    • 1998
  • Lots of techniques are adopted for a flame stabilization and a high-load combustion. But the techniques being used were passive control method which have to change combustor shape like pilot flame, flame stabilizer, pressure profile, etc. Active control method which is not necessary to transform its shape is employed. Acoustical excitation is broadly used for its convenience in changing frequency and intensity. Both acoustical excitation and flame stabilizers were adopted to study their relationship. So, we investigated flammability limits. Flame visualization. And mean temperature in the condition of various frequencies, intensities, and flame stabilizers. As a consequence, flammability limit were advanced in acoustically excited flame at some frequencies. Coherent structure was extended to the downstream region through acoustical excitation and a size of vortice was curtailed. Also width of recirculation zone was magnified. In addition, Effects of acoustical excitation was stood out at 25mm flame stabilizer rather than another ones.

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Nakagami 페이딩 채널에서 전력 제어 오차를 고려한 셀룰라 CDMA 네트워크의 성능 분석 (Performance analysis of cellular CDMA networks with power control error in nakagami fading channel)

  • 이동도;김동희;박용서;황금찬
    • 한국통신학회논문지
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    • 제22권1호
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    • pp.1-11
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    • 1997
  • We examine the DS/SSMA system which is employing coherent BPSK with RAKE receiver. We adop Nakagami m-distribution as a multipath fading model. First, we analyze the performances of the system in the single cell environment and obtain the other-cell interference according to power control error. And considering the other-cell interference into the analysis of single cell system, we examine the cellular CDMA network. The average BER and outage probability are the figures of merit that characterize the system performance. The required BER, 1E-3, and required outage probability are the figures of merit that characterize the system performance. The requeired BER, 1E-3, and required outage probability, 1% for the voice transmission is considered to acquire the capacity of system.

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분해형 차분 정합필터를 갖는 새로운 GPS 초기동기 방식 (A Novel GPS Initial Synchronization Scheme with Decomposed Differential Matched Filter)

  • 박상현;이상정
    • 제어로봇시스템학회논문지
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    • 제8권2호
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    • pp.185-192
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    • 2002
  • A novel GPS initial synchronization scheme with low hardware complexity is proposed. The proposed method has the decomposed differential matched filter, which consists of 25% multiplier and adder of the conventional matched filter. This paper presents the generalized mean acquisition time of initial synchronization scheme with multiple correlator. It is shown that the proposed method, in spite of its low hardware complexity, has the equal performance to the conventional method. The performance of the proposed method is verified through the simulation test by the GPS simulator. It is shown that the proposed method prevents the squaring loss of non-coherent integration.