• Title/Summary/Keyword: Coaxial transmission line

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mechanism of Equivalent Power Distribution in Parallel Connected ICP for Large Area Processing

  • Lee, Jin-Won;Bae, In-Sik;An, Sang-Hyeok;Jang, Hong-Yeong;Yu, Sin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.510-510
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    • 2012
  • 반도체, 디스플레이, 태양광 등의 공정에서 사용되는 웨이퍼의 크기가 증가하고, 생산률이 플라즈마의 밀도에 비례한다는 연구 결과가 발표되면서 대면적 고밀도 플라즈마 소스 개발에 대한 연구가 활발히 진행되고 있다. 특히, ECR, ICP, Helicon plasma 등 고밀도 플라즈마 소스에 대한 관심이 높아지고 있다. 이에 따라, 여러 개의 ICP를 결합한 multiple ICP를 이용해 대면적 고밀도 플라즈마 소스 개발을 진행했다. Multiple ICP의 경우 각 ICP 소스에 같은 power (current)를 공급해야만 균일한 플라즈마 방전이 발생되어 균일도를 확보 할 수 있다. Current controller 같은 추가적인 장비를 설치하지 않고, power를 분배하는 transmission line을 coaxial 형태로 설계하고 같은 길이로 병렬 연결함으로써 각각의 ICP소스에서 균일한 플라즈마를 방전시킬 수 있었다. Power generator에서 보는 각 ICP의 total impedance는 각 ICP 소스의 impedance와 coaxial 형태의 transmission line의 characteristic impedance, frequency, 길이의 함수로 구할 수 있고, 이 total impedance가 일정하기 때문에 current가 균등하게 분배되어 각 ICP소스에 균등한 power 분배가 가능한 것이다. 실질적으로 ICP 소스의 impedance는 플라즈마 방전 유무에 따라 변화하기 때문에 일정하게 유지하는 것은 어렵다. Transmission line의 characteristic을 사용함으로써 ICP의 impedance의 변화에 상관없이 Total impedance를 일정하게 유지시킴으로써 균등한 power 분배가 가능하다는 것을 연구했다. Frequency는 13,56MHz, characteristic impedance를 $50{\Omega}$ (coaxial cable)으로 고정하고, ICP 소스의 플라즈마 방전 유무/antenna turn/소스 위치에 따른 total impedance를 transmission line의 길이에 따라 측정하고, 이를 이론값, 그래프와 비교하였다. 특정 length에서 플라즈마 방전 유무(ICP의 impedance 변화)와 상관없이 비교적 일정한 total impedance를 유지하는 것을 확인 했다. 이것은 특정 길이를 갖는 coaxial형태의 transmission line를 연결하면, total impedance는 플라즈마 방전 유무로 발생하는 ICP의 impedance 변화와 상관없이 일정하게 유지되어 각 ICP소스에 균등한 파워 분배가 가능하다는 것을 보여준 결과이다. 이것을 토대로 frequency에 따라(또는 characteristic impedance에 따라) 균등한 파워 분배가 가능한 coaxial 형태 transmission line의 특정 길이를 구할 수 있고, 대면적 소스에서 균등한 파워 분배를 위한 병렬연결에 적용할 수 있을 것이다.

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The fabrication of a coaxial line impedance transformer with low transmission loss and wideband operation range (저손실 광대역 동작 특성을 가지는 동축 선로 임피던스 변환기 제작)

  • Park, Ung-hee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.12
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    • pp.2241-2248
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    • 2017
  • The coaxial line impedance transformer that performs impedance conversion using the coupling of two or more coaxial lines of the same length is often used for impedance matching in the low frequency region due to many advantages. This paper measures the phase and magnitude characteristics of each coaxial line in a 4:1 coaxial line impedance transformer using two 100mm coaxial lines. This experiment shows that it is more effective to make the length of the auxiliary coaxial line shorter than the main coaxial line by about 5 mm in order to realize a low loss impedance transformer. In addition, it measures the transmission characteristics by directly connecting a 4:1 impedance transformer and a 1:4 impedance transformer. This experiment shows that it is effective to connect a 1pF capacitor between the ground and the outer conductor input point of the main coaxial line in order to increase the operating frequency range.

A Square Coaxial Transmission Line with a Thin-Wire Inner Conductor to Measure the Absorbing Performance of Electromagnetic Absorbers

  • Kang, Tae-Weon;John Paul;John Paul
    • Journal of electromagnetic engineering and science
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    • v.4 no.1
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    • pp.43-49
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    • 2004
  • A low-frequency coaxial reflectometer(LCR) with a thin-wire inner conductor is designed and constructed to measure nondestructively the absorbing performance of electromagnetic absorbers in the frequency range of 10 MHz to 200 MHz. The LCR consists of a square coaxial transmission line and a network analyzer with a time-domain measurement capability. Inherent characteristics of a square coaxial line with a thin-wire inner conductor which deteriorate the impedance matching of the input port of the LCR are addressed. And the characteristics are improved by employing a multiwire inner conductor. Measured and calculated reflection losses of a flat ferrite tile absorber are presented.

Simulation for characterization of high speed probe for measurement of single flux quantum circuits (단자속양자 회로 측정프로브의 특성 분석을 위한 시뮬레이션)

  • 김상문;김영환;최종현;조운조;윤기현
    • Progress in Superconductivity and Cryogenics
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    • v.4 no.2
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    • pp.11-15
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    • 2002
  • High speed probe for measurement of sin91e flux quantum circuits is comprised of coaxial cables and microstrip lines in order to carry high speed signals without loss. For the impedance matching between coaxial cable and microstrip line, we have determined the dimension of the microstrip line with 50${\Omega}$ impedance by simulation and then have investigated the effect of line width and cross-sectional shape of signal line, dielectric material, thickness of soldering lead at the coaxial-to-microstrip transition Point, and the an91c between dielectric material and end part of the signal line on the characteristics of signal transmission of the microstrip line. From the simulation, we have found that these all parameter's had influenced on the characteristic of signal transmission on the microstrip line and should be reflected in fabricating high speed probe, We have also determined the dimension of coplanar waveguide to fabricate testing sample for performance test of high speed probe.

Analysis of Coaxial Line Transmission Charactristics and Shielding Effectiveness Using by Finite Difference Time Domain Method (시간영역 유한차분법을 이용한 동축선로의 전송특성 및 차폐효과 해석)

  • 남상식;윤현보;김정렬;백낙준;우종우
    • The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
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    • v.6 no.4
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    • pp.11-19
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    • 1995
  • In this paper, the Finite Difference Time Domain (FDTD) method is used to analyse the characteristics of the coaxial line transmission coefficent, shielding effectiveness, and compared to results of the moment method. The excitation mode of the Gaussian pulse is assumed to be a TEM-mode instead of the TE or TM-mode and in order to eliminate the reflected wave with in short length of the line. Calculated value of shielding effectiveness of the coaxial line by the FDTD are in good agreement with the results of the moment method.

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Measurement of Complex Permittivity and Permeability for Powder-type Materials (분말재료의 복소 유전율 및 투자율 측정)

  • Park, Sang-Bok;Lee, Jang-Soo;Chong, Young-Seek;Cheon, Chang-Yul
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.12
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    • pp.2196-2201
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    • 2007
  • Materials used at microwave are usually used as a dielectric with a manufacturing purpose of printed circuit boards, etc. Complex permittivity of them can be measured from attenuation constant or propagation constant of a transmission line using a microstrip line with bulk type. But as the technique recently which can manufacture to have complex permittivity and permeability demanded using nonferrous metals for powder-type grows up, we need sensors and methods which can measure characteristics of powder-type materials. So far measuring methods of permittivity and permeability with waveguide or coaxial cable are used but they have faults which have a complex measurement method and are difficult to simultaneously measure permittivity and permeability. In this paper, a simultaneous measuring method of permittivity and permeability with 2-port coaxial cable and a new proposed calculation. The proposed 2-port coaxial cable is designed to be easy to insert materials and to have a wideband. We measure permittivity and permeability of magnetic powder(Ni-Fe-Mo, Ni-Fe) which reveal its characteristic at $0.3{\sim}1.3GHz$ to identify the proposed sensor.

Exciting High Frequency Oscillations in a Coaxial Transmission Line with a Magnetized Ferrite

  • Ahn, J.-W.;Karelin, S.Y.;Kwon, H.-O.;Magda, I.I.;Sinitsin, V.G.
    • Journal of Magnetics
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    • v.20 no.4
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    • pp.460-465
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    • 2015
  • The paper presents methodologies and results concerning one- and two-dimensional numerical modeling of radio frequency oscillations in a coaxial transmission line fed with a short pulse of electric current. The line is partially filled with a ferrite material, magnetized longitudinally close to saturation. The 2D model has permitted analyzing, for the first time in the art, the spatial structure and dynamics of the wave field within the radially non-uniform cross-section planes of the non-linear and dispersive guiding structure. This opens ways for optimizing size parameters of the line and the extent to which it is filled with the ferromagnetic material, thus increasing the line's electric strength and intensity of the r.f. oscillations.

The analysis of the operating characteristic for the wideband coaxial line impedance transformer (광대역 동축선로 임피던스 변환회로의 동작 특성 분석)

  • Park, Ung-hee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.23 no.2
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    • pp.165-172
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    • 2019
  • Using two or more coaxial lines, if one port is connected in series and the other port is connected in parallel, it can be implemented the wideband transmission line transformer(TLT). Because the wideband TLT utilizes the outer conductor of the coaxial line, it is difficult to predict the characteristics. In this paper, based on the analysis for the transfer characteristic(S21) according to the loss of the each line in ${\lambda}/4$-microstrip line TLT, the operating characteristic of the fabricated wideband 4:1 TLT using two $25{\Omega}$-coaxial lines is investigated. The fabricated wideband TLT shows the notch characteristic in which the transfer signal sharply decreases at ${\lambda}/4$ frequency of the coaxial line and has a value within -0.2dB of the transfer characteristic(S21) in $0.06{\sim}0.2{\lambda}$ frequency range of the coaxial line. This transfer characteristics(S21) can change the operating frequency range slightly and set the optimum transfer characteristic(S21) at the desired frequency by changing the length of the microstrip line.

Design of a Broadband Microwave Power Divider/Combiner using Coaxial-Conical-Radial Transmission Line Conversion (동축-원추-방사형 선로변환에 의한 마이크로파 전력분할/합성기의 광대역 설계)

  • Choi, Young-Kyu
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.60 no.7
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    • pp.1385-1390
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    • 2011
  • A coaxial-conical-radial transmission line conversion circuits have been investigated to realize a low loss high performance microwave power divider/combiner. In order to optimize the characteristics of the device, the power divider/combiner was designed separately with two parts-the inner part and the outer part. Utilizing the rectangular approximation of the outer part, we can design the low loss device which is not affected by the partition number N of the outer part. The small return loss which is lower than 20dB was obtained on the frequency range of 5.15GHz(7.45~12.60GHz). A conical connector was employed for smooth connection between the central coaxial line and the outer radial line. Making use of the $47^{\circ}$ and $90^{\circ}$ 2-stage conical connector, the return loss lower than 30dB was obtained on the operating frequency range of 5GHz. The total return loss of the designed divider/combiner was lower than 20dB on the frequency range of 5GHz for the partition number N=11, N=12 and N=16.

A Study on the moving picture transmission method between the accident sites and control center (사고현장과 사령실간 화상전송기술에 관한 연구(III))

  • Cho B. K.;Chang S. G.;Choi K. H.
    • Proceedings of the KIEE Conference
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    • summer
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    • pp.1412-1414
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    • 2004
  • Railway takes an important role of transporting massive passenger and freight. Accidents which occur related to trains have a risk of serious loss of lives, so those accidents need to be controlled urgently. Therefore moving picture transmission system is required which transmits exact information of moving picture of accident status to CTC and also communication line is also required with it. By using WTB line as a wayside transmission line, railway telephones, fax and train service information are provided to local offices. As transmission line improving project, optical cabling work is being processed by phases. Therefore optical fiber line is more effective way for a communicating way between stations than coaxial transmission line. This paper consider's connecting method when optical fibers is used for moving picture data transmission of train accidents and its problems.

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