• 제목/요약/키워드: Coating Gap

검색결과 168건 처리시간 0.03초

재현성 있는 메조포러스 TiO2 박막의 제조에 대한 연구 (Reproducible Synthesis of Periodic Mesoporous TiO2 Thin Film)

  • 허재영;이형익;박영권;주오심;배귀남;김지만
    • Korean Chemical Engineering Research
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    • 제44권4호
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    • pp.399-403
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    • 2006
  • 현재 넓은 표면적과 메조기공 뿐만 아니라 $TiO_2$의 넓은 band gap과 그 광학 활성 등으로 인하여 크게 각광받고 있는 메조포러스 $TiO_2$ 박막을 합성하기 위해 여러 가지 합성방법이 제시되고 있으나, 그 합성이 습도나 온도 등의 여러조건에 따라 크게 영향을 받아 재현성이 떨어진다는 치명적인 문제점이 제기되어 왔다. 이는 합성 용액 내에서 $TiO_2$ 전구체가 가수분해 및 축합반응을 하면서 구조유도체와의 자기조립에 의한 나노구조물 형성하는 과정에서 $TiO_2$의 전구체가 온도나 습도 등 주변의 영향을 많이 받기 때문이다. 본 연구에서는 2차원 구조의 메조기공을 가진 $TiO_2$ 박막을 재현성 있게 얻을 수 있는 실험 조건을 찾고자 하였다. 이를 위해 촉매인 HCl과 $TiO_2$ 전구체의 몰비 그리고 $TiO_2$ 전구체와 P-123의 몰비 등의 합성 조건뿐 아니라 코팅과정 도중이나 이후의 습도와 온도가 미치는 영향에 대한 실험을 수행하였고 그 특성을 XRD와 TEM 등으로 분석하였다.

폴리이서설폰 중공사 막을 이용한 $N_2/SF_6$ 투과거동에 관한 연구 (Studies on the $N_2/SF_6$ Permeation Behaviors Using the Polyethersulfone Hollow Fiber Membranes)

  • 이형근;김대훈;안영모;조항대;박종수
    • 멤브레인
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    • 제19권3호
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    • pp.244-251
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    • 2009
  • 본 연구에서는 폴리이서설폰(polyethersulfone, PES) 중공사 막을 이용하여 6대 온실가스에 속하는 육불화황($SF_6$)을 질소 중에서 분리하고자 하였다. 제막 조건에 따른 막의 구조와 성능변화를 관찰하기 위하여 다른 비용매(아세톤, 에탄올)와 에어갭(air-gap) 그리고 실리콘 코팅을 통하여 성능변화를 관찰하였으며, 전자주사현미경(scanning electron microscope)을 통하여 구조 변화를 관찰하였다. $N_2$, $SF_6$ 단일기체 투과실험에서 제조된 막의 표면 실리콘 코팅을 통하여 최고 7.64의 선택도를 나타내어 3.4배 향상된 결과를 나타내었다.

폴리이미드와 폴리이써설폰 분리막을 이용한 $CH_4/N_2$의 투과선택도 특성 (A Study on the Permeance Through Polymer Membranes and Selectivity of $CH_4/N_2$)

  • 박보령;김대훈;이강우;황택성;이형근
    • Korean Chemical Engineering Research
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    • 제49권4호
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    • pp.498-504
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    • 2011
  • 본 연구는 폴리이미드와 폴리이서설폰 중공사막을 이용하여 매립가스의 메탄 회수를 위한 메탄과 질소에 대한 투과도와 선택도를 실험하였다. 폴리이미드와 폴리이서설폰 소재를 건/습식 상전이 법을 이용하여 중공사 형태로 제조하고 표면 실리콘 코팅 후 모듈을 제조하였다. 전자주사 현미경 관찰을 이용하여 제조된 중공사 막의 구조가 치밀한 표면과 망상구조의 비대칭으로 형성된 것을 확인하였다. 압력과 온도가 증가함에 따라 메탄과 질소의 투과도는 증가하였으나 선택도($CH_4/N_2$)는 감소하는 것으로 나타났다. Air gap이 증가할수록 메탄과 질소의 투과도는 감소하였으며 용매치환을 한 중공사막의 투과도는 3.2~7.0배 증가하였다.

무전해 니켈 도금과 실리콘의 이방성 식각을 이용한 미세 가동 구조물의 제작방법에 관한 연구 (A Study of Micro Freestanding Structure Fabrication using Nickel Electroless Plating And Silicon Anisotropic Etching)

  • 김성혁;김용권;이재호;허진
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권6호
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    • pp.367-374
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    • 2000
  • This paper presents a method to fabricate freestanding structures by (100) silicon anisotropic etching and nickel electroless plating. The electroless plating process is simpler than the electroplating, and provides good coating uniformity and improved mechanical properties. Furthermore, the (100) silicon anisotropic etching in KOH solution with being aligned to <100> direction provides vertical (100) sidewalls on etched (100) surface. In this paper, the effects of the nickel electroless plating condition on the properties of electroless plated metal structures are investigated to apply fabrication of micro structures and then various micro structures are fabricated by nickel electroless plating. And then, the structures are released by silicon anisotropic etching in KOH solution with a large gap between the structure and the substrate. The fabricated cantilever structures are $210\mum$. wide, $5\mum$. thick and $15\mum$. over the silicon substrate, and the comb structure has the comb electrodes which are $4\mum$. wide and $4.3\mum$. thick separated by$1\mum$. It is released by silicon anisotropic etching in KOH solution. The gap between the structure and the substrate is $2.5\mum$.

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50 nm 이상의 CMOS 기술에 이용되는 Spin-on Dielectric 박막 형성과 그 특성에 미치는 전구체의 영향 (The Effects of Precursor on the Formation and Their Properties of Spin-on Dielectric Films Used for Sub-50 nm Technology and Beyond)

  • 이완규
    • 한국진공학회지
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    • 제20권3호
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    • pp.182-188
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    • 2011
  • 탄소가 없는 폴리실라잔 계와 탄소가 함유된 폴리메틸 실라잔 계 전구체를 실리콘 기판에 스핀코팅하고 $150^{\circ}C$, $400^{\circ}C$, $850^{\circ}C$에서 열처리하여 형성된 박막의 물리적 화학적 특성을 평가하였다. 프리에 변환 적외선 분광, 수축 율, 갭-충진, 식각속도 등을 평가하여 박막형성과 형성된 박막의 물리화학적 특성에 미치는 탄소의 영향을 고찰하였다. 탄소함유 전구체는 (탄소가 없는 전구체보다) $400^{\circ}C$에서 질소, 수소, 탄소의 휘발량이 더 적고 산소 흡수량이 더 적어서 (15.6%)보다 낮은 14.5% 두께 수축을 나타내었으나, $800^{\circ}C$에서는 휘발 량이 더 많고 산소 흡수량도 더 많아져 (19.4%)보다 높은 37.4% 두께 수축을 나타냈다. 프리에 변환 적외선 분광분석결과, 전구체내의 탄소는 Spin-on dielectric (SOD) 박막으로 하여금 Si-O 결합형성을 적게, 박막특성을 불균일하게, 그리고 화학 용액에 더 빨리 식각되도록 만들었다.

산화아연 나노핵의 조작을 통한 산화아연 나노로드의 제어 (Artificial Control of ZnO Nanorods via Manipulation of ZnO Nanoparticle Seeds)

  • 신경식;이삼동;김상우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.399-399
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    • 2008
  • Synthesis and characterization of ZnO structure such as nanowires, nanorods, nanotube, nanowall, etc. have been studied to multifunctional application such as optical, nanoscale electronic and chemical devices because it has a room-temperature wide band gap of 3.37eV, large exiton binding energy(60meV) and various properties. Various synthesis methods including chemical vapor deposition (CVD), physical vapor deposition, electrochemical deposition, micro-emulsion, and hydrothermal approach have been reported to fabricate various kinds of ZnO nanostructures. But some of these synthesis methods are expensive and difficult of mass production. Wet chemical method has several advantage such as simple process, mass production, low temperature process, and low cost. In the present work, ZnO nanorods are deposited on ITO/glass substrate by simple wet chemical method. The process is perfomed by two steps. One-step is deposition of ZnO seeds and two-step is growth of ZnO nanorods on substrates. In order to form ZnO seeds on substrates, mixture solution of Zn acetate and Methanol was prepared.(one-step) Seed layers were deposited for control of morpholgy of ZnO seed layers by spin coating process because ZnO seeds is deposited uniformly by centrifugal force of spin coating. The seed-deposited samples were pre-annealed for 30min at $180^{\circ}C$ to enhance adhesion and crystallinnity of ZnO seed layer on substrate. Vertically well-aligned ZnO nanorods were grown by the "dipping-and-holding" process of the substrates into the mixture solution consisting of the mixture solution of DI water, Zinc nitrate and hexamethylenetetramine for 4 hours at $90^{\circ}C$.(two-step) It was found that density and morphology of ZnO nanorods were controlled by manipulation of ZnO seeds through rpm of spin coating. The morphology, crystallinity, optical properties of the grown ZnO nanostructures were carried out by field-emission scanning electron microscopy, high-resolution electron microscopy, photoluminescence, respectively. We are convinced that this method is complementing problems of main techniques of existing reports.

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Bandgap Alteration of Transparent Zinc Oxide Thin Film with Mg Dopant

  • Salina, M.;Ahmad, R.;Suriani, A.B.;Rusop, M.
    • Transactions on Electrical and Electronic Materials
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    • 제13권2호
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    • pp.64-68
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    • 2012
  • We have successfully demonstrated a bandgap alteration of transparent zinc oxide (ZnO) thin film with Mg dopant by using sol-gel spin coating technique. By increasing the dopant from 0 to 30 atomic percent (at.%), a decrement value in the cutoff is observed, where the absorption edge shifts continuously to the shorter wavelength side, towards 300 nm. This resulted in a significant bandgap increment from 3.28 to 3.57 eV. However, the transmittance of the thin film at 350-800 nm gradually downgraded, from 93 to 80 % which is most probably due to the grain size that becomes bigger, and it also affected the electrical properties. The decrement from 45 to 0.05 mA at +10 V was observed in the I-V characteristics, concluding the significant relationship; where higher optical bandgap materials will exhibit lower conductivity. These findings may be useful in optoelectronics devices.

The discharge characteristic of Li ion doped MgO film in a flat fluorescent lamp structure

  • Ryu, Si-Hong;Lee, Seong-Eui;Ahn, Sung-Il;Choi, Kyung-Cheol
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1388-1390
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    • 2007
  • This paper investigates how various concentrations of lithium ion influence on crystallization of MgO in thin films formed by spin coating and an the discharge characteristic in a flat fluorescent lamp structure. The XRD results indicate $Li^+$ ion enhances the growth of MgO crystal in a spin coated thin film. The discharge property with the $Li^+$ ion doped MgO films show the lithium ion in MgO film clearly reduce the initial discharge voltages of test devices. Interestingly, the test panels with various doped MgO film have somewhat higher static memory margin of than that of pure-MgO owing probably to the pore structure of spin coated MgO films. The CL spectra, which confirm that the doping creates defects energy levels in the band gap of MgO, show the $F^+$ center is the main defects in doped MgO films.

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Enhanced Adhesion and Transmittance Uniformity in Laminated Polymer-Dispersed Liquid Crystal Films

  • Yoo, Seong-Hyeon;Park, Min-Kyu;Park, Ji-Sub;Kim, Hak-Rin
    • Journal of the Optical Society of Korea
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    • 제18권6호
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    • pp.753-761
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    • 2014
  • We propose a two-step UV irradiation procedure to fabricate polymer-dispersed liquid crystal (PDLC) films by lamination. During the first UV treatment, before lamination, the UV-curable monomers coated on one film substrate are solidified through photo-polymerization as the phase separation between the liquid crystals and the monomers. Introducing an adhesion-enhancement layer on the other plastic substrate and controlling the UV irradiation conditions ensure that UV-induced cross-linkable functional groups remain on the surfaces of the photo-polymerized layers. Thereby, the adhesion stability between the top and bottom films is much improved during a second (post-lamination) UV treatment by further UV-induced cross-linking at the interface. Because the adhesion-enhancement and PDLC layers prepared by the bar-coating process are solidified before lamination, the PDLC droplet distribution and the cell gap between the two plastic substrates remain uniform under the lamination pressure. This ensures that the voltage-controlled light transmittance is uniform across the entire sample.

철도차량용 와전류 브레이크의 다중 인자 분석 (Analysis of Multiple Factor of the Eddy Current Brake for Railway Application)

  • 이장무;박현준;조수영;이주;이형우
    • 전기학회논문지
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    • 제64권9호
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    • pp.1385-1390
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    • 2015
  • This paper is analysis of multiple factor that should be considered in the design of an eddy current brake used as auxiliary brake system. The eddy current brake is a brake that generates a braking torque in a rotational direction opposite to the direction of the rotor by using a time-varying magnetic flux. The eddy current brake has the advantage of being able to take high current densities because this is used for a short period of time. Also, the eddy current brake is influenced by multiple factor such as number of slots, teeth width, coating thickness, air-gap length and so on. Therefore the eddy current brake was designed for use in railway application in consideration of the operation region and critical parameters.