• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.19-25
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• 2023

With an attempt to investigate the correlation between the internal pressure distribution of slit nozzle and the thickness uniformity of slot-coated thin films, we have performed computational fluid dynamics (CFD) simulations of slit nozzles and slot coating of high-viscosity (4,800 cPs) polydimethylsiloxane (PDMS) using a gantry slot-die coater. We have calculated the coefficient of variation (CV) to quantify the pressure and velocity distributions inside the slit nozzle and the thickness non-uniformity of slot-coated PDMS films. The pressure distribution inside the cavity and the velocity distribution at the outlet are analyzed by varying the shim thickness and flow rate. We have shown that the cavity pressure uniformity and film thickness uniformity are enhanced by reducing the shim thickness. It is addressed that the CV value of the cavity pressure that can ensure the thickness non-uniformity of less than 5% is equal to and less than 1%, which is achievable with the shim thickness of 150 ㎛. It is also found that as the flow rate increases, the average cavity pressure is increased with the CV value of the pressure unchanged and the maximum coating speed is increased. As the shim thickness is reduced, however, the maximum coating speed and flow rate decrease. The highly uniform PDMS films shows the tensile strain as high as 180%, which can be used as a stretchable substrate.

• 한국유체기계학회 논문집
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• 제11권5호
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• pp.50-56
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• 2008

Metal cutting operations involve generation of heat due to friction between the tool and the pieces. This heat needs to be carried away otherwise it creates white spots. To reduce this abnormal heat cutting fluid is used. Cutting fluid also has an important role in the lubrication of the cutting edges of machine tools and the pieces they are shaping, and in sluicing away the resulting swarf. As a cutting fluid, water is a great conductor of heat but is not stable at high temperatures, so to improve stability an emulsion type mixed fluid with water and oil is often used. It is pumped over the cutting site of cutting machines as a state of atomized water droplet coated with oil by using jet. In this paper, to develop cutting fluid supplying nozzle to obtain ultra thin oil film for coating water droplet, a numerical analysis of three dimensional mixed fluid Jet through multi-stage nozzle was carried out by using a finite volume method. Jet flow characteristics such as nozzle exit velocity, development of mixing region, re-entrance and jet intensity were analyzed. Detailed mixing process of fluids such as air, water and oil in the nozzle were also investigated. It is easy to understand complex flow pattern in multi-stage nozzle. Important flow Information for advance design of cutting fluid supplying nozzle was drawn.

• 한국전산유체공학회지
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• 제14권1호
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• pp.78-85
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• 2009

A combined theoretical and numerical study is conducted to design a slit nozzle for large-area liquid coating. The objectives are to guarantee the uniformity in the injected flow and to provide the capability of explicit control of flow rate. The woking fluid is a dilute aqueous solution containing single-walled carbon nanotubes and its low viscosity and the presence of dispersed materials pose technical hurdles. A theoretical analysis leads to a guideline for the geometric design of a slit nozzle. The CFD-based numerical experiment is employed as a verification tool. A new flow passage unit, connected to the nozzle chamber, is proposed to permit the control of flow rate by using the commodity pressurizer. The numerical results confirm the feasibility of this idea. The optimal geometry of internal structure of the nozzle has been searched for numerically and the related issues are discussed.

• 마이크로전자및패키징학회지
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• 제23권4호
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• pp.93-99
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• 2016

본 논문에서는 AgNW 필름의 기계적 전기적 신뢰성을 연구하였다. 특히 전류가 흐르는 상태에서 굽힘 변형이 발생하였을 때의 AgNW 필름의 내구성 및 신뢰성을 연구하였다. AgNW 필름의 전압 및 전류 시험을 수행하여, AgNW에서 발생하는 발열과 전류 밀도의 변화를 관찰함으로써 AgNW의 전기적 내구성을 평가하였다. AgNW는 곡률반경 2 mm까지 굽힐 수 있었으며, 200,000회의 굽힘 반복시험에도 높은 신뢰성 및 유연성을 보여주었다. 또한 over-coating 막은 AgNW 필름의 내구성을 향상시키는 효과가 있음을 확인하였다. Over-coating이 없는 AgNW 필름의 경우, AgNW 표면에서 국부적인 발열을 보인 반면에 over-coating이 된 AgNW 필름의 경우 균일하게 발열되어 over-coating막이 AgNW 필름의 내구성을 향상시킴을 알 수 있었다. 전류를 인가한 상태에서의 굽힘 시험을 수행한 결과 굽힘 반복시험에서는 전류밀도가 지속적으로 감소하여 시험 후, 52.4%의 전류밀도 감소를 보였다. 전류가 인가된 상태에서 AgNW의 굽힘 변형이 지속되면 AgNW들의 인장, 굽힘 및 sliding 등의 기계적인 변형에 의하여 AgNW network 구조의 변형이 발생하거나, 혹은 개별 AgNW의 접촉 접합부들이 떨어지면서 접촉저항이 증가하여 주울 열에 의하여 파괴가 발생한다. 또한 over-coating막의 적용은 AgNW 필름의 전기적 신뢰성을 향상시킬 수 있음을 알 수 있었다.

• 반도체디스플레이기술학회지
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• 제3권3호
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• pp.37-40
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• 2004

This study presents numerical solutions of three-dimensional laminar flow-field formed by photo resist flow in a slit-coater model. We discuss on the governing equations, laminar viscosities and the computational model applied in our numerical calculation and some results. We prove that the structure of tapered-cavity aid to make uniform pressure-field and boundary effect is an important problem to improve coating uniformity. In view of uniformity improvement, it is necessary to study for the structure of cavity and flow path.

• 한국진공학회지
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• 제6권S1호
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• pp.160-165
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• 1997

Yttria stabilized zirconia coating is an attractive material for several engineering applications. In order to produce coatings with consistent and reliable performance it is important to understand the influence of spraying parameters on the coating properties and optimize the spraying parameters. In this paper the low pressure plasma spray(LPPS) deposition of as-received zirconia powder has been investigated using simple one-factor-at-a-time approach. The deposition efficiency was chosen to evaluate the melting characteristics of the as-received zirconia powder. The results obtained indicated that the deposition efficiency of zirconia powder is very sensitive to the spraying parameters such as plasma gas flow rate and ranges from 24% to 57% The microstructure and the phase composition of zirconia coating deposited with the different plasma spraying parameters were also examined by SEM and XRD respectively. The relationship between deposition efficiency and the microstructure of zirconia coating was discussed.

• 한국세라믹학회지
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• 제35권1호
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• pp.33-40
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• 1998

A MgO-CaO-based coating material for ferrous melt refining is applied to the tundish operation for mol-ten steel having low carbon. The changes in the total oxygen content insoluble aluminum content and the content of inclusions in molten steel during tundish operation were measured at the pouring part strand of tundish and mold. On the basis of the experimental results the interfacial reaction occurring between the coating materials and the molten steel in tundish was discussed and compared with the theoretical con-sideration. It is concluded that interfacial reaction is not active at the strand part of tundish but is active at the pouring part because of the turbulent flow in the molten steel.

• 한국생산제조학회지
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• 제9권6호
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• pp.96-102
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• 2000

Spinning mechanism is generally used in coasting process on grass plates. Rebounding PR(Photo Resist) which leads to occur inferiority of coating process is caused by vibrational energy of whole coating system. In this study, the sensitivity analysis is performed to analyze and reduce vibrational terms in the spin coating system. The sensitivity analysis is bared on the numerical expression of this system. By the bond graph method. power flow of each system is represented by some basic bond graph elements. Any energy domain system is modeled using the unified elements. The modelled spin coater system is verified with power spectrum data measured by FFT analyzer. As the results of verifying model parameters and sensitivity analysis, principal factors causing vibration phenomenon are mentioned. A study on vibration method in the spin coating system is discussed.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.20-26
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• 2002

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be 1-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time various film thickness is analyzed according to the var ious solvent fraction in the coating liquid and in the bulk of the overlying gas and the temperature variation in the liquid film during the spin coating is estimated.

• 한국유변학회:학술대회논문집
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• 한국유변학회 2006년도 춘계 학술발표회 논문집
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• pp.85-88
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• 2006