• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.19-25
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• 2023

With an attempt to investigate the correlation between the internal pressure distribution of slit nozzle and the thickness uniformity of slot-coated thin films, we have performed computational fluid dynamics (CFD) simulations of slit nozzles and slot coating of high-viscosity (4,800 cPs) polydimethylsiloxane (PDMS) using a gantry slot-die coater. We have calculated the coefficient of variation (CV) to quantify the pressure and velocity distributions inside the slit nozzle and the thickness non-uniformity of slot-coated PDMS films. The pressure distribution inside the cavity and the velocity distribution at the outlet are analyzed by varying the shim thickness and flow rate. We have shown that the cavity pressure uniformity and film thickness uniformity are enhanced by reducing the shim thickness. It is addressed that the CV value of the cavity pressure that can ensure the thickness non-uniformity of less than 5% is equal to and less than 1%, which is achievable with the shim thickness of 150 ㎛. It is also found that as the flow rate increases, the average cavity pressure is increased with the CV value of the pressure unchanged and the maximum coating speed is increased. As the shim thickness is reduced, however, the maximum coating speed and flow rate decrease. The highly uniform PDMS films shows the tensile strain as high as 180%, which can be used as a stretchable substrate.

• The KSFM Journal of Fluid Machinery
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• v.11 no.5
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• pp.50-56
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• 2008

Metal cutting operations involve generation of heat due to friction between the tool and the pieces. This heat needs to be carried away otherwise it creates white spots. To reduce this abnormal heat cutting fluid is used. Cutting fluid also has an important role in the lubrication of the cutting edges of machine tools and the pieces they are shaping, and in sluicing away the resulting swarf. As a cutting fluid, water is a great conductor of heat but is not stable at high temperatures, so to improve stability an emulsion type mixed fluid with water and oil is often used. It is pumped over the cutting site of cutting machines as a state of atomized water droplet coated with oil by using jet. In this paper, to develop cutting fluid supplying nozzle to obtain ultra thin oil film for coating water droplet, a numerical analysis of three dimensional mixed fluid Jet through multi-stage nozzle was carried out by using a finite volume method. Jet flow characteristics such as nozzle exit velocity, development of mixing region, re-entrance and jet intensity were analyzed. Detailed mixing process of fluids such as air, water and oil in the nozzle were also investigated. It is easy to understand complex flow pattern in multi-stage nozzle. Important flow Information for advance design of cutting fluid supplying nozzle was drawn.

• Journal of computational fluids engineering
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• v.14 no.1
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• pp.78-85
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• 2009

A combined theoretical and numerical study is conducted to design a slit nozzle for large-area liquid coating. The objectives are to guarantee the uniformity in the injected flow and to provide the capability of explicit control of flow rate. The woking fluid is a dilute aqueous solution containing single-walled carbon nanotubes and its low viscosity and the presence of dispersed materials pose technical hurdles. A theoretical analysis leads to a guideline for the geometric design of a slit nozzle. The CFD-based numerical experiment is employed as a verification tool. A new flow passage unit, connected to the nozzle chamber, is proposed to permit the control of flow rate by using the commodity pressurizer. The numerical results confirm the feasibility of this idea. The optimal geometry of internal structure of the nozzle has been searched for numerically and the related issues are discussed.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.4
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• pp.93-99
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• 2016

In this paper, we investigated the mechanical and electrical reliability of silver nanowire (AgNW) films. In particular, the durability and reliability of AgNW films were studied when the AgNW film was subjected to the bending deformation under current flow. The electrical durability of AgNW was evaluated by observing changes in heat generation and current density occurring in AgNW through voltage and current tests. The AgNW film showed a constant resistance change up to a bending radius of 2 mm and 200,000 cycles in the bending fatigue tests. The over-coating layer has an effect of improving the durability of the AgNW film. In the case of AgNW with the over-coating layer, heat was uniformly dissipated on the surface of AgNW film, whereas in the case of AgNW film without the over-coating layer, heat was generated locally. In the bending test under the current flow, the current density of the AgNW film was continuously decreased up to 52.4%. During bending, the AgNW was deformed due to mechanical deformation such as tensile, bending and sliding of the AgNW, consequently contact resistance of the AgNW was increased, leading to a electrical breakdown of AgNW by Joule heating. It was found that the application of the over-coating layer can improve the electrical and mechanical reliability of the AgNW film.

• Journal of the Semiconductor & Display Technology
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• v.3 no.3
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• pp.37-40
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• 2004

This study presents numerical solutions of three-dimensional laminar flow-field formed by photo resist flow in a slit-coater model. We discuss on the governing equations, laminar viscosities and the computational model applied in our numerical calculation and some results. We prove that the structure of tapered-cavity aid to make uniform pressure-field and boundary effect is an important problem to improve coating uniformity. In view of uniformity improvement, it is necessary to study for the structure of cavity and flow path.

• Journal of the Korean Vacuum Society
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• v.6 no.S1
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• pp.160-165
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• 1997

Yttria stabilized zirconia coating is an attractive material for several engineering applications. In order to produce coatings with consistent and reliable performance it is important to understand the influence of spraying parameters on the coating properties and optimize the spraying parameters. In this paper the low pressure plasma spray(LPPS) deposition of as-received zirconia powder has been investigated using simple one-factor-at-a-time approach. The deposition efficiency was chosen to evaluate the melting characteristics of the as-received zirconia powder. The results obtained indicated that the deposition efficiency of zirconia powder is very sensitive to the spraying parameters such as plasma gas flow rate and ranges from 24% to 57% The microstructure and the phase composition of zirconia coating deposited with the different plasma spraying parameters were also examined by SEM and XRD respectively. The relationship between deposition efficiency and the microstructure of zirconia coating was discussed.

• Journal of the Korean Ceramic Society
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• v.35 no.1
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• pp.33-40
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• 1998

A MgO-CaO-based coating material for ferrous melt refining is applied to the tundish operation for mol-ten steel having low carbon. The changes in the total oxygen content insoluble aluminum content and the content of inclusions in molten steel during tundish operation were measured at the pouring part strand of tundish and mold. On the basis of the experimental results the interfacial reaction occurring between the coating materials and the molten steel in tundish was discussed and compared with the theoretical con-sideration. It is concluded that interfacial reaction is not active at the strand part of tundish but is active at the pouring part because of the turbulent flow in the molten steel.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.6
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• pp.96-102
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• 2000

Spinning mechanism is generally used in coasting process on grass plates. Rebounding PR(Photo Resist) which leads to occur inferiority of coating process is caused by vibrational energy of whole coating system. In this study, the sensitivity analysis is performed to analyze and reduce vibrational terms in the spin coating system. The sensitivity analysis is bared on the numerical expression of this system. By the bond graph method. power flow of each system is represented by some basic bond graph elements. Any energy domain system is modeled using the unified elements. The modelled spin coater system is verified with power spectrum data measured by FFT analyzer. As the results of verifying model parameters and sensitivity analysis, principal factors causing vibration phenomenon are mentioned. A study on vibration method in the spin coating system is discussed.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.20-26
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• 2002

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be 1-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time various film thickness is analyzed according to the var ious solvent fraction in the coating liquid and in the bulk of the overlying gas and the temperature variation in the liquid film during the spin coating is estimated.

• Proceedings of the Korean Society of Rheology Conference
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• 2006.06a
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• pp.85-88
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• 2006