• 제어로봇시스템학회논문지
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• 제16권12호
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• pp.1233-1240
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• 2010

In the flat panel display and semiconductor industries, the visual alignment system is considered as a core technology which determines the productivity of a manufacturing line. It consists of the vision system to extract the centroids of alignment marks and the stage control system to compensate the alignment error. In this paper, we develop a Kalman filter algorithm to estimate the alignment mark postures and propose a coarse-fine alignment control method which utilizes both original fine images and reduced coarse ones in the visual feedback. The error compensation trajectory for the distributed joint servos of the alignment stage is generated in terms of the inverse kinematic solution for the misalignment in task space. In constructing the estimation algorithm, the equation of motion for the alignment marks is given by using the forward kinematics of alignment stage. Secondly, the measurements for the alignment mark centroids are obtained from the reduced images by applying the geometric template matching. As a result, the proposed Kalman filter based coarse-fine alignment control method enables a considerable reduction of alignment time.

• Asian Journal of Atmospheric Environment
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• 제12권1호
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• pp.78-86
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• 2018

Filter-based sampling techniques are the conventional way to collect particulate matter, but particles collected and entangled in the filter fibers are difficult to be removed and thus not suited for the following cell- and animal-based exposure experiments. Collecting aerosol particles in powder form using a cyclone instead of a filter would be a possible way to solve this problem. We developed a hybrid virtual-impactor/cyclone high-volume fine and coarse particle sampler and assessed its performance. The developed system achieved 50% collection efficiency with components having the following aerodynamic cut-off diameters: virtual impactor, $2.4{\mu}m$; fine-particle cyclone, $0.18-0.30{\mu}m$; and coarse-particle cyclone, $0.7{\mu}m$. The virtual impactor used in our set-up had good $PM_{2.5}$ separation performance, comparable to that reported for a conventional real impactor. The newly developed sampler can collect fine and coarse particles simultaneously, in combination with exposure testing with collected fine- and coarse-particulate matter samples, should help researchers to elucidate the mechanism by which airborne particles result in adverse health effect in detail.

• Journal of the korean society of oceanography
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• 제32권3호
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• pp.128-137
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• 1997

This study presents results from a detailed sedimentological investigation of surface sediments obtained from the Korea Strait region, the southern part of the East Sea (Sea of Japan). The distribution of different types of bottom sediments is controlled by the recent fine-grained sediment transport and deposition combined with the lowerings of sea level during the last glacial period, forming a diverse mixture of organic-rich fine-grained and shelly coarse-grained sediments. In comparison to high organic concentration of fine-grained sediments in the inner continental shelf and slope areas, the shell-rich coarse-grained sediments on the outer shelf are discernible being further modified. These coarse-grained sediments are confirmed as relict resulting from the sediment dynamics during the lower sea levels of the last glacial period. Clay mineral distribution of the fine-grained sediments gives information about the transport mechanism. Presence of present-day current system (the Tsushima Warm Current) is most probable source for the fine-grained particles into the open East Sea from the East China Sea, indicating that Holocene sediment dynamics may be used to explain the observed distribution of surface coarse-grained shell-rich sediments.

• 한국정밀공학회지
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• 제23권2호
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• 한국안전학회지
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• 제16권1호
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• pp.65-72
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• 2001

Portland cement concrete is made with coarse aggregate, fine aggregate, portland cement, water and, in some cases, selected chemical admixture such as air-entraining agents, water reducer, superplasticizer, and so on, and mineral admixture such as fly ash, silica fume, slags, etc. Typically, in the concrete, the coarse aggregate and fine aggregate will occupy approximately 80 percent of the total volume of the finished mixture. Therefore, the coarse and fine aggregates affect to the properties of the portland cement concrete. As the deposits of natural sands have slowly been depleted, it has become necessary and economical to produce crushed sand(manufactured fine aggregate). It is reported that crushed sand differs from natural sands in gradation, particle shape and texture, and that the content of micro fines in the crushed sand affect to the quality of the portland cement concrete. Therefore, the purpose of this paper is to investigate the characteristics of fresh and hardened concrete with higher micro fines. This study provides a firm data to apply crushed sand with higher micro fines.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2001년도 가을 학술발표회 논문집
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• pp.73-78
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• 2001

Portland cement concrete is made with coarse aggregate, fine aggregate, portland cement, water and, in some cases, selected chemical admixtures such as air-entraining agents, water reducer, superplasticizer, and so on, and mineral admixtures such as fly ash, silica fume, slags, etc. Typically, in the concrete, the coarse aggregate and fine aggregate will occupy approximately 80 percent of the total volume of the final mix. Therefore, the coarse and fine aggregates affect to the properties of the portland cement concrete. As the natural sands are drained, it is necessary and economical to utilize crushed sands(manufactured fine aggregate). It is reported that crushed sands differ from natural sands in gradation, particle shape and texture, and the micro fines in the crushed sands affect to the quality of the portland cement concrete. Therefore, the purpose of this paper is to investigate the characteristics of fresh and hardened concrete with high content of micro fines. This study provides firm data for the use of crushed sands with higher micro fines.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.56-62
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• 1999

We make a study of pricisioning apparatus that is used in the various industrial machine. The study was carried out to develope a pricision positioning apparatus, consisting of servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer and microsense to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense so, we can controlled positioning of one output by the coarse positioning in the system. Also we obtain the positioning resolution of 9nm in the system.

• 한국농공학회지
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• 제31권3호
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• pp.57-69
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• 1989

The study was carried out for the strength parameter of coarse grained Soil and slope stability analysis of earth dam. The test samples were taken fifteen kinds of soil from cohesive soil to coarse gravel. The degree of compaction of test samples for shear test and permeability test was chosen 95 percentage of maximum dry density. The results of this study are as follows ; 1.The maximum dry density(Yd) of coarse grained soil increase in proportion to coarse particles(P) with the relation of Y d= 1.609+0.0043P. 2.The coefficients of permeability(k) decrease by the increase of fine particles(n) with the relation of k=0.0426e-0 185n. 3.The cohesions of soil decrease by the increase of coarse particles, but internal friction angles are more increased in same condition. 4.The internal friction angles(${\Phi}$) decrease in inverse proportion to void ratio(e) with the relation of ${\Phi}$ = 73.068 - 69.268e. 5.The strength parameters( Ct ${\Phi}$t) by triaxial compression test are clearly smaller than that (Cd, ${\Phi}$d) by direct shear test in fine grained soil, but the differences between both parameters are a little in coarse grained soil.The relations of both parameters are as follows; Ct = O.544Cd + 0.04 ${\Phi}$t= 1.282${\Phi}$d-2306 6.In cohesive soil, the strength parameters( Cl ${\Phi}$l) by large size shear test apparatus are similar to the strength parameters(Cs , ${\Phi}$s) by small size shear test appratus, but Cs and ${\Phi}$s values are larger than Cl and ${\Phi}$l values from 10 percentage to 20 percentage in coarse grained soil. 7.The fine grained soil is inappropriate to high dam more than 20 meters and it must be taken coarse grained soil with high internal friction angle for high dam.

• 콘크리트학회논문집
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• 제12권4호
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• pp.103-111
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• 2000

The influence of the improvement of grain shape of the coarse aggregate to the unit powder content of concrete and the fine aggregate ratio for the increase of the flowability and segregation resistance of high performance concrete was examined. According to the experimental results, flowability and compacting of concrete presents best states in the S/a which has the smallest 패야 ratio. The coarse aggregate after improvement of grain shape, that has changed from the 0.68 of spherical rate of disk shape to 0.73, led fine aggregate ratio to be down 6% (i.e from 47% to 41%). The improvement of grain shape of the coarse aggregate also led the lowest unit powder content to be down 60kg/㎥ (ie from 530kg/㎥ to 470kg/㎥). And approximate 10% of unit water content has been reduced as unit powder content was down. However, the compressive strength after the improvement of grain shape of the coarse aggregate decreased to 5% due to decrease of adhesiveness of the aggregate and cement paste.

• 전기전자학회논문지
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• 제6권1호
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• pp.21-29
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• 2002

본 논문에서는 전부 디지털 회로로 구성된 고 해상도의 DLL(Delay Locked Loop)를 제안하였다. 제안된 회로는 위상 검출기, 지연 선택 블록, 그리고 각각의 지연 체인을 가지는 Coarse, Fine 그리고 Ultra Fine 위상조정 블록의 삼 단의 형식으로 되어 있다. 첫 번째 단은 Ultra Fine 위상조정블록으로 고 해상도를 얻기 위하여 Vernier Delay Line을 사용하였다. 두 번째와 세 번째 단은 Coarse와 Fine 위상조정블록으로 각각의 단위 지연 체인을 이루는 단위 지연 소자의 해상도 만큼의 위상 제어를 하게 되며, 두 단은 상당히 비슷한 구조를 이루고 있다. 회로는 HSPICE를 이용하여 공급 전압이 3.3V인 $0.35{\mu}m$ CMOS 공정으로 시뮬레이션 되었다. 시뮬레이션 결과 회로의 해상도를 약 10ps로 높일 수 있었으며, 동작 범위는 250MHz에서 800MHz 이다.