• Title/Summary/Keyword: Co-Cr박막

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Effects of Sputter Deposition Rate on the Thin Film Property (Sputtering 성막속도가 박막의 특성에 미치는 영향)

  • Lee, Ky-Am
    • Journal of the Korean Vacuum Society
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    • v.2 no.2
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    • pp.152-160
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    • 1993
  • In this study, we have investigated the influence of sputtering conditions (Ar pressure input powers, substrates) on coercivity and microstructures of GdFe, Co, CoCr thin films produced by the method of DC magnetron sputtering. In GdFe films, we have observed that the Gd atomic ratio was decreased with the deposition rate, and deposition rate decreased with the pressure of Ar gas and the increased linearly with input power. It was also observed that the coercivity of thin films was increased with input power. In Co films, we have investigated the deposition was increased and the Co thin film became finer structure with the increase in the input power, was increased and the Co thin film became finer structure with the increase in the input power, and the deposition rate was decreased with the pressure of Ar gas. In CoCr films, we have investigated the effects of substrates on the coercivity $(H_c)$ and the microstructure. We have found that the substrates plays a crucial role in the microstructure and the coercivity $(H_c)$.

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Preparation of Co-Cr Thin Films by Facing Targets Sputtering (대향타겟스퍼터링에 의한 Co-Cr 박막의 제작)

  • ;;;;;S. Nakagawa;M.Naoe
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.5
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    • pp.418-422
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    • 1998
  • The Co-Cr films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) system has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrate. In this study, we investigated the possibility of employing FTS system for depositing Co-Cr films. The Co-Cr thin films were deposited with various sputter gas pressure($P_Ar$, 0.1~10mTorr) by using FTS apparatus at temperature of $40^{\circ}C and 220^{\circ}C$, respectively. Crystallographic and magnetic characteristics were evaluated by x-ray diffractometry (XRD) and vibrating sample magnetometer(VSM), respectively. Under argon gas pressure at 0.1mTorr, films with morphologically dense microstructure, good c-axis orientation and higher coercivity were obtained. It has been confirmed that the FTS system is very useful for preparing Co-Cr thin film recording media.

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Effect of Crystallographic Orientation of CrNi Underlayer on Magnetic Properties of CoCrTa / CrNi Magnetic Recording Media Deposited by E-Beam Evaporator (E-Beam Evaporator로 제조된 CoCrTa/ Cr-Ni 자기기록 매체의 자기적 특성에 미치는 Cr-Ni 하지층의 결정배향효과)

  • 고흥재;남인탁
    • Journal of the Korean Magnetics Society
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    • v.7 no.4
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    • pp.205-211
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    • 1997
  • The magnetic properties change which was induced by addition of small amount of Ni into Cr underlayer in CoCrTa/ CrNi thin film deposited by electron beam evaporator was investigated. The additional Ni element was found to be beneficial for incease in the coercivity of the thin film deposited at the room temperature. The origin of coercivity increase was elucidated by crystal orientation and microstructure investigation using XRD and AFM respectively. It was found that the grain size were increased by Ni addition. The coercivity of the film with CrNi underlayer is lower than that of film with Cr underlayer when prepared with higher substrate temperature. This result may be originated with the increase in grain size. When film was deposited at 280 $^{\circ}C$ substrate temperature, Cr segregation in grain boundary is found to be the other factor for determining coercivity value.

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Magnetic Properties of Cr/CoPtCr/$SiO_2$Thin Films for High Density Magnetic Recording Media (고밀도 자기기록매체용 Cr/CoPtCr/$SiO_2$ 다층박막의 자기적 성질)

  • Choi, H.;Hong, Y.G.;Kim, C.O.
    • Korean Journal of Materials Research
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    • v.8 no.6
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    • pp.560-564
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    • 1998
  • CoPtCr magnetic layer was fabricated on the Cr underlayer by RF magnetron sputtering and the protective $SiO_2$ layer was deposited at room temperature. As the thickness of Cr underlayer increased, the coercive force of magnetic layer increased, then saturated slightly further increasing Cr underlayer thickness. Maximum coercive force was 860 Oe. It is thought that in-plane arrangement of magnetic phase and magnetic decoupling between the magnetic crystallites could lead to the increase of the coercive force. Post-annealing raised the coercive force exceedingly. and maximum coercive force value was 1650 Oe which was acquired from the sample annealed at 55$0^{\circ}C$ for 1hr.

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Structural and Magnetic Properties of (Mn, Cr)xCo1-xFe2O4 Thin Films Prepared by Sol-gel Method (졸-겔 방법을 이용하여 제작된 (Mn, Cr)xCo1-xFe2O4 박막의 구조적, 자기적 특성)

  • Kim, Kwang-Joo;Kim, Hee-Kyung;Park, Young-Ran;Park, Jae-Yun
    • Journal of the Korean Magnetics Society
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    • v.16 no.1
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    • pp.23-27
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    • 2006
  • By substituting Mn or Cr for Co in inverse spinel $CoFe_2O_4,\;Mn_xCo_{1-x}Fe_2O_4\;and\;Cr_xCo_{1-x}Fe_2O_4$ and thin films were prepared by sol-gel method and their structural and magnetic properties were investigated. X-ray diffraction indicates that the cubic lattice constant increase for the Mn substitution while it hardly changes for the Cr substitution. Substitution of $Mn^{2+}$ for octahedral $Co^{2+}$ sites can explain the increase of lattice constant in $Mn_xCo_{1-x}Fe_2O_4$. On the other hand, Substitution of $Cr^{3+}$ for octahedral $Co^{2+}$ and subsequent reduction of $Fe^{3+}$ ion into $Fe^{2+}$ are expected to happen. Mossbauer spectroscopy measurements on $Cr_xCo_{1-x}Fe_2P_4$ indicate the existence of tetrahedral $Fe^{2+}$ ions that are created through reduction of tetrahedral $Fe^{3+}$ ions in order to compensate charge imbalance happened by $Cr^{3+}$ substitution for octahedral $Co^{2+}$ sites. On the other hand, no $Fe^{2+}$ ions were detected by Mossbauer spectroscopy for $Mn_xCo_{1-x}Fe_2O_4$. A migration of $Fe^{3+}$ ions from octahedral to tetrahedral sites In $Mn_xCo_{1-x}Fe_2O_4$ was detected by Mossbauer spectroscopy for x>0.47. Vibrating sample magnetometry measurements on the samples at room temperature revealed that the saturation magnetization increases by Mn and Cr substitution for certain range of x, qualitatively explainable in terms of the comparison of spin magnetic moment among the related transition-metal ions.

Variation of Local Coercivity Distribution in CoCrPt Alloy Films with Pt Composition (Pt 함량에 따른 CoCrPt 합금박막의 국소보자력 분포 변화)

  • Im, Mi-Young;Choe, Sug-Bong;Shin, Sung-Chul
    • Journal of the Korean Magnetics Society
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    • v.12 no.1
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    • pp.20-23
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    • 2002
  • The local coercivity distribution of CoCrPt alloy films prepared by dc magnetron sputtering has been investigated by means of a magneto-optical microscope magnetometer (MOMM) capable of simultaneously measuring the local properties on 400 nm spatial resolutions. Serial samples of CoCrPt alloy films were prepared with the Pt composition of a range from 6 to 28 at. %. We find that the local coercivity distribution crosses over from Gaussian to non-Gaussian distribution in CoCrPt alloy films with increasing Pt composition, with increasing trends in the width of the distribution as well as the average local coercivity. Transmission electron microscopy (TEM) studies reveal that our findings are closely correlated with the dependences of the grain size distribution and its average size on Pt concentration.