• 반도체디스플레이기술학회지
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• 제7권2호
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• pp.59-62
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• 2008

The Lifetime of OLEDs by ITO/glass substrates cleaning method and cathode deposition method were investigated in the fabrication of green light emitting OLEDs with $Alq_3$-C545T fluorescent system. In our experiments, the optimum cleaning method was obtained at last processing of boiling IPA(isopropyl alcohol). And the optimum deposition methode was obtained at 3 steps deposition rate of Al. The deposition rate of 3 steps progressed changing from $0.5\AA$/sec to $3\AA$/ sec. The green light emitting OLED with plasma treatment at 150W for 2 minutes showed the highest luminance and efficiency of 20000 cd/$m^2$ and 16 lm/W. On the contrary, the OLED device without plasma treatment showed much lower performance with the luminance and efficiency of 3500 cd/$m^2$ and 2 lm/W.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3279-3281
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• 1999

This paper describes a method of direct wafer bonding using surfaces activated by a radio-frequency hydrogen plasma. The hydrogen plasma cleaning of silicon in the RIE mode was investigated as a pretreatment for silicon direct bonding. The cleaned silicon surface was successfully terminated by hydrogen, The hydrogen-terminated surfaces were rendered hydrophilic, which could be wetted by Dl water rinse. Two wafers of silicon and silicon dioxide were contacted to each other at room temperature and postannealed at $300{\sim}1100^{\circ}C$ in an $N_2$ atmosphere for 2 h. From the AFM results, it was revealed that the surface became rougher with the increased plasma exposure time and power. The effect of the plasma treatment on the surface chemistry was investigated by the AES analysis. It was shown that the carbon contamination at the surface could be reduced below 5 at %. The interfacial energy measured by the crack propagation method was 122 $mJ/m^2$ and 384 $mJ/m^2$ for RCA cleaning and hydrogen plasm, respectively.

• 한국태양에너지학회 논문집
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• 제35권1호
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• pp.21-28
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• 2015

A small washer powered directly and solely by thermal radiation was constructed and tested to explore the feasibility of using solar energy or other types of thermal radiation for washing and cleaning. In principle, TA (ThermoAcoustic) washers have the benefits of simpler design and operation and fewer energy conversion processes, thus should be more energy efficient and cost less than electric washing/cleaning systems. The prototype TA converter we constructed could sustain itself with consistent fluid oscillations for more than 20 minutes when powered by either concentrated solar radiation or an IR (infrared) heater. The frequencies of water oscillations in the wash chamber ranged from 2.6 to 3.6 Hz. The overall conversion efficiency was lower than the typical efficiencies of TA engines. Change in water temperature had little effect on the oscillatory flow in the TA washer due to its low efficiency. On the other hand higher water temperatures enhanced grease removal considerably in our tests. Methods for measuring the overall conversion efficiency, frictional loss, and grease removal of the TA washing system we designed were developed and discussed.

• 한국응용과학기술학회지
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• 제34권1호
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• pp.58-65
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• 2017

유동층가스화기는 경제적으로 기술적으로 입증된 기술로서 가장 상용화에 가까운 가능성을 보여주고 있다. 그러나 한국에서는 설계, 현장문제 해결뿐 아니라 파일럿 규모의 설비 운전 등이 부족하여 상용화에 이르지 못하고 있다. 본 연구에서는 바이오매스의 가스화를 위하여 3 MWth 급 순환유동층(CFB) 반응기를 개발하여 운전하였다. 유동층반응기는 순환유동층 반응기와 기포유동층 반응기로 구성되었으며 타르와 산성가스를 제거하기 위하여 세라믹필터, 급속냉각, 습식스크러버를 사용하였다. 3MWth 급 바이오매스 가스화기의 최적 운전조건을 도출하기 위하여 equivalence ratio에 따른 영향을 조사하였다

• 공업화학
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• 제19권6호
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• pp.640-644
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• 2008

저온 플라스마 공정을 이용하여 알루미늄 표면에 묻은 윤활유를 세정하였다. 아르곤이 혼합된 산소 플라스마를 사용하였으며, 아르곤의 혼합비, 방전전력, negative DC potential 등의 공정변수를 변화시키면서 실험을 수행하였다. 저온 플라스마 세정 후 케이스의 표면을 FTIR과 EDX를 사용하여 분석한 결과 순수 윤활유의 경우 대부분이 20 min 안에 제거되었다. 제거효율은 저온 플라스마 공정조건에 따라 크게 달라졌으며, 산소에 아르곤이 약 30% 혼합된 기체를 사용하여 케이스에 -500 V 이상의 negative DC potential을 걸어주고 300 W로 처리할 때 가장 높은 효율을 보였다. 하지만, 무기물이 함유된 윤활유의 경우에는 어떤 조건에서도 60% 이상의 제거효율을 얻을 수 없었다.

• 한국재료학회지
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• 제11권5호
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• pp.361-366
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• 2001

TiN barrier 막 위에 metal organic chemical vapor deposition (MOCVD)법으로 Cu막을 증착함에 있어 TiN막 표면을 먼저 세정처리하지 않고 바로 Cu막을 증착하려하면 Cu의 핵생성이 어렵고, 그 결과 연속된 Cu막이 형성되지 못한다. 본 연구에서는 SEM, AES, AFM 등의 분석방법을 사용하여 TiN 막 표면에 대한 플라즈마 전처리 세정이 Cu막의 핵생성에 미치는 효과에 관하여 조사하였다. Gu의 전처리 세정방법으로는 direct플라즈마 방식이 원거리 플라즈마 방식보다 훨씬 더 효과적이다. 또한 수소플라즈마 전처리 시 rf-power와 플라즈마 조사시간이 증가함에 따라 세정효과는 더 증대된다. 플라즈마 전처리가 Cu의 핵생성을 고양시키는 원리는 다음과 같다. 플라즈마 내의 수소이온이 TiN과 반응하여 $NH_3$가 됨으로서 질소 성분이 제거되어 TiN이 Ti로 환원된다. Cu는 TiN기판보다는 Ti기판상에서 핵생성이 더 잘 되므로 플라즈마 전처리는 Cu의 핵생성을 돕는 효과를 가져온다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권4호
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• pp.147-151
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• 2002

The resistances of metal2 contact to metall and poly Si are checked by various RF etch conditions in terms of pre-cleaning. The changes of resistance are evaluated by statistical analysis method(SAS) for the AC bias power, coil power and RF target. The contact area on poly Si is shown by TEM image and the distributions of contact resistance according to ar etch target and RTP are investigated. The RTP groups have larger variations than normal RF etch targets. When the RF etch target becomes lower and coil power becomes higher, the resistances of metal2 contact to metals and poly Si have lower contact resistance. But the condition of AC bias power did not satisfied low meta12 contacts resistance for metall and poly Si simultaneously. The R-square of ststistical analysis was 0.98 for resistances of meta12 contact to poly Si and 0.87 for resistances of meta12 contact to metall.

• Nuclear Engineering and Technology
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• 제54권9호
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• pp.3293-3298
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• 2022

Removing radioactive contaminated metal materials is a vital task during the decommissioning of nuclear power plants to reduce the cost of the post-dismantling process. The laser decontamination technique has been recognized as a key tool for a successful dismantling process as it enables a remote operation in radioactive facilities. It also minimizes exposure of workers to hazardous materials and reduces secondary waste, increasing the environmental friendless of the post-dismantling processing. In this work, we present a thorough and efficient laser decontamination approach using a single-mode continuous-wave (CW) laser. We subjected stainless steels to a surface-removal process that repetitively exposes the laser to a confined region of ~75 ㎛ at a high scanning rate of 10 m/s. We evaluate the decontamination performance by measuring the removal depth with a 3D scanning microscope and further investigate optimal removal conditions given practical parameters such as the laser power and scan properties. We successfully removed the metal surface to a depth of more than 40 ㎛ with laser power of 300 W and ten scans, showing the potential to achieve an extremely high DF more than 1000 by simply increasing the number of scans and the laser power for the decontamination of primary circuits.

• 진공이야기
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• 제4권1호
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• pp.16-23
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• 2017

Recently, KSTAR, Korea's superconducting fusion energy research and development device, has succeeded in driving the high performance plasma for 70 seconds for the first time in the world. Continuous plasma operation technology is an essential factor for commercialization of fusion energy power generation. Therefore, this achievement is expected to play a major role in the research of fusion technology required for future fusion power plants. In order to operate the KSTAR, the discharge process in which the neutral gas is turned into the plasma should be preceded in the start-up (breakdown) phase of tokamak operation. This process essentially involves the vacuum environment in the tokamak device. KSTAR has successfully operated a vacuum pumping system to achieve the target level of the vacuum environment through a high temperature baking operation, a discharge cleaning process and boronization.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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• pp.205.2-205.2
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• 2011

Micro hydraulic turbines take a growing interest because of its small and simple structure as well as high possibility of applying to micro and small hydropower resources. The differential pressure exiting within the city water pipelines can be used efficiently to generate electricity like the energy generated through gravitational potential energy in dams. In order to reduce water pressure at the inlet of water cleaning centers, pressure reducing valves are used widely. Therefore, pressure energy is wasted. Instead of using the pressure reduction valve, a micro counter-rotating hydraulic turbine can be replaced to get energy caused by the large differential pressure found in the city water pipelines. In this study, in order to acquire design data of counter-rotating tubular type micro-turbine, output power, head, and efficiency characteristics due to the diffuser.