• 한국산업보건학회지
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• 제25권4호
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• pp.542-553
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• 2015

Objectives: Many types of dust collector are used for industrial ventilation, with the most common types being the cylinder bag filter system, rectangular bag filter system and cylinder type cartridge filter system. The cylinder type cartridge bag filter, which has more filtering area than other types of bag filter, can increase the pulse time and extend the useful life of the filter. This can save operational costs and installation area. Materials: This study used cylinder type cartridge bag filter equipment and tested the impact of vibration level and filter pressure with different pulse jet cleaning conditions. The final, cleaning efficiency was calculated through input dust mass and cleaning dust mass Conclusions: Two optimum cleaning condition groups were found. The first condition group was $3kgf/cm^2$ pulse pressure, 15 cm pulse distance, 0.2 s pulse time with an H-10 type nozzle. The second condition group was $3kgf/cm^2$ pulse pressure, 15 cm pulse distance, 0.3 s pulse time with an H-10 type nozzle.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.117-119
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• 2002

A semiconductor cleaning technology has been based upon RCA cleaning which consumes vast amounts of chemicals and ultra pure water. This technology hence gives rise to many environmental issues, and some alternatives such as electrolyzed water are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed waters were obtained in anode and cathode with oxidation reduction potentials and pH of -1050mV and 4.8, and -750mV and 10.0, respectively. The electrolyzed water deterioration was correlated with $CO_2$ concentration changes dissolved from air. Overflowing of electrolyzed water during cleaning particles resulted in the same cleanness as could be obtained with RCA clean. The roughness of patterned wafer surfaces after EW clean maintained that of as-received wafers. RCA clean consumed about $9\ell$ chemicals, while electrolyzed water clean did only $400m\ell$ HCl or $600m\ell$ $NH_4$Cl to clean 8" wafers in this study. It was hence concluded that electrolyzed water cleaning technology would be very effective for releasing environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.ring.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.72-75
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• 2023

Carbon neutrality has been emerged as important mission for all the manufacturing industry to reduce energy usage and carbon emission equivalent. Korean semiconductor and display manufacturing industries are also in huge interest by minimize the energy usage as well as to find a less global warming product gases in both etch and cleaning. In addition, Korean government is also investing long term research and development plan for the safe environment in various ways. In this paper, we revisit previous research activities on carbon emission equivalent and current research activities performed in semiconductor process diagnosis research center at Myongji University with respect to the reduction of NF3 usage for the PECVD chamber cleaning, and we present the analytical result of the exhaust gas with residual gas analysis in both 6 inches and 12 inches PECVD equipment. The presented result can be a reference study of the development of new substitution gas in near future to compare the cleaning rate of the silicon oxide deposition chamber.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• 한국지반신소재학회논문집
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• 제23권2호
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• pp.63-75
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• 2024

마시는 물은 인간의 기본적인 생활권 보장을 위한 필수적 요소로 깨끗한 물에 대한 품질은 항상 확보되어야 한다. 하지만 국내 수도시설을 집중 설치하였던 2000년 초반을 기점으로 현재 노후 상수도 시설이 증가하고 있으며, 색도 및 탁도와 같은 물의 변색, 이물질 누출 등의 사고가 빈번히 발생하고 있다. 실제로 모든 관의 교체는 불가능하기 때문에 2021년 제정된 상수관망시설 유지관리업무 세부기준에서는 상수관 세척을 의무화 하였으며, 다양한 세척 공법들을 통해 유지관리가 이루어지고 있는 실정이다. 상수관 세척 공법 중 스왑피그 공법은 관 내 이물질을 물리적으로 제거하는 방법으로 세척 효율이 가장 높은 것으로 평가 받고 있다. 하지만, 세척과정에서 스왑피그의 파손 및 변형에 따라 세척 효율은 변화하며, 분실의 가능성이 존재한다. 따라서 본 연구에서는 피그 자체의 재료를 변경하여, 압축력 및 관 내벽과의 밀착력을 향상시키고자 하며, 세척 효율 극대화를 위해 회전 블레이드를 삽입된 회전식 스왑피그를 개발하였다. 또한, 분실 가능성을 제거하고, 피그의 위치 파악을 위해 고강도 와이어 및 권취 장치를 추가적으로 개발하여, 투입구부터 토출구까지를 연결하였다. 각 세부 기술의 성능 검증 이후에는 30m 구간의 테스트베드에서 본 기술을 적용하였으며, 현장 적용성 평가와 더불어 공정 시간을 측정하여 기술의 성능을 검증하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.2015-2016
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• 2011

Detection of data cleaning bed of because method of communication uses AODV(Ad hoc On-demand Distance Vector) Zig-Bee communication though communication method is important being separated by several part structurally data monitor ring do it way to understand be. Although data that detect in transmitter will get into several kinds, data of each senses is detected by 4 - 20 mA conclusively and remainder data is consisted of temperature data. That is measured in transmitter in mast baud via conversion relation to do monitorring norm of data being decided to PC mistake of measured value so that can do control between enforcement compose. Speak that can manage equipment of cleaning bed by number of persons who write if detect data detection in wide cleaning bed through Zig-Bee communication and is easy because also administration of data consists of real time.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2007년도 춘계학술대회 논문집
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• pp.1288-1292
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• 2007

Because the indoor spaces of the passenger cabin is generally airtight to secure the safety of passengers and enhance the efficiency of the cabin air conditioning performances, the contamination pattern of them are largely similar to that of general indoor spaces. Therefore, continuous supply of outdoor air is required to keep the amenity of indoor space. Heating, ventilation, and air-conditioning (HVAC) system is composed of air cleaning filter, heater and air conditioned, blower and ducts. To achieve the clean indoor environment, an integrated control of each HVAC equipment are required. In this study, we developed the air cleaning system to enhance the amenity of the railroad passenger cabin.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2006년도 추계학술대회 논문집
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• pp.1234-1239
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• 2006

Because the indoors spaces of the passenger cabin is generally airtight to secure the safety of passengers and enhance the efficiency of the cabin air conditioning performances, the contamination pattern of them are largely similar to that of general indoor spaces. Therefore, continuous supply of outdoor air is required to keep the amenity of indoor space. Heating, ventilation, and air-conditioning (HVAC) system is composed of air cleaning filter, heater and air conditioned, blower and ducts. To achieve the clean indoor environment, an integrated control of each HVAC equipment are required. In this study, we developed the air cleaning system to enhance the amenity of the railroad passenger cabin.

• 반도체디스플레이기술학회지
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• 제8권2호
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• pp.15-21
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• 2009

Atmospheric pressure plasma equipment was successfully applied to the flip chip BGA manufacturing process to improve the uniformity of flux printing process. The problem was characterized as shrinkage of the printed flux layer due to insufficient surface energy of the flip chip BGA substrate. To improve the hydrophilic characteristics of the flip chip BGA substrate, remote DBD type atmospheric pressure plasma equipment was developed and adapted to the flux print process. The equipment enhanced the surface energy of the substrate to reasonable level and made the flux be distributed over the entire flip chip BGA substrate uniformly. This research was the first adaptation of the atmospheric pressure plasma equipment to the flip chip BGA manufacturing process and a lot of possible applications are supposed to be extended to other PCB manufacturing processes such as organic cleaning, etc.

• Korean Chemical Engineering Research
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• 제47권6호
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• pp.688-694
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• 2009

PCB의 먼지 제거용 세정제로 사용되는 스프레이형 세정제를 선정하여 이에 대한 청정도를 평가하였다. 친환경적인 대체 세정제를 채택하기 위해서는 세정제의 세정성, 환경성, 경제성을 평가하여 체계적인 선정절차에 의거하여 도입 및 적용하여야 한다. 객관적이고 효율적인 세정성 평가방법의 정립이 현시점에서 매우 중요하다. 본 연구에서는 여러 세정성 평가 방법들 중 표면관찰평가법인 SEM-EDX(Scanning Electron Microscopy/Energy-Dispersive X-ray) 분석과 적외선열화상카메라(THERMOVISION A20 model)를 이용하여 청정도를 평가하였다. CT-2770 모델의 사운드카드를 $2{\times}2cm$로 잘라내어 스프레이 세정 전과 후의 청정도를 SEM의 이미지 분석을 통해 관찰할 수 있었고 EDX의 성분분석을 통해 먼지의 제거율을 정량화할 수 있었다. 컴퓨터의 P4T-E 모델의 마더보드와 IPC-A-36 모델의 기판을 사용, 오염물로 먼지와 철가루를 사용하여 열화상카메라로 세정 전, 후의 상온과 $50^{\circ}C$ Oven에 방치된 시간의 차이에 따른 온도의 변화를 비교하였다.