• Laser Solutions
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• v.6 no.3
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• Tribology and Lubricants
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• v.31 no.6
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Korean Membrane Journal
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• v.2 no.1
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• pp.60-63
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• 2000

The effect of Candida rugosa and steapsin lipase cleaning was investigated for ultrafiltration polyethersulphone membrane (30,000 dalton MWCO) fouled with the semi-synthetic type cutting oil. The experimental by the water circulator. The enzyme cleaning effect was measured with respect to temperature, cleaning time and enzyme concentration. The optimum cleaning condition for the system was 25$^{\circ}C$ and 2 hour cleaning with 1,000 unites/mL steapsin solution. The pure water flux improvement by the steapsin solution cleaning was about 17% at the optimum cleaning condition.

• Journal of the Korean Society of Clothing and Textiles
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• v.34 no.7
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• pp.1162-1174
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• 2010

Excavated gold brocade, often shows signs of serious damage and contamination from environmental factors such as exposure to soil or human remains. Therefore, most of the conservation procedures are focused on the consolidation of the gold thread and on cleaning with water or organic solvents. Indiscreet cleaning using solvents could damage the gold leaf, which identifies the features of fabric. There is a need to develop cleaning protocols appropriate for relics through the careful analysis of the condition of the relics. This study finds the appropriate cleaning method for the excavated gold brocade. Four different cleaning methods, vacuum cleaning, kneaded rubber eraser cleaning, immersion wet cleaning, and absorption wet cleaning were applied to the excavated gold brocade. The degree of cleaning and damage were examined depending on the cleaning methods, changes to the physical condition (before and after cleaning) were also analyzed through the surface observation. Although immersion cleaning showed the best cleaning result, this method had a risk of damage to the gold thread. Absorption wet cleaning safely eliminated the various soluble contaminants and the rotten smell of relics. Kneaded rubber eraser was suitable for the excavated gold brocade fabric because it can be applied to selective parts, intentionally excluding some sensitive parts such as the gold thread. The vacuum cleaning method required special attention because of a possibility of suctioning off loosely attached gold leaf. Dual cleaning, the kneaded rubber eraser cleaning, followed by the absorption cleaning was the most effective method to preserve and clean excavated gold brocade.

• Journal of Korean Society of Water and Wastewater
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• v.25 no.3
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• pp.285-291
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• 2011

Membrane fouling is an unavoidable phenomenon and major obstacle in the economic and efficient operation under sea water reverse osmosis (SWRO). When fouling occurs on the membrane surface, the permeate quantity and quality decrease, the trans-membrane pressure (TMP) and operation costs increase, and the membrane may be damaged. Therefore, chemical cleaning process is important to prevent permeate flow from decreasing in RO membrane filtration process. This study focused on proper chemical cleaning condition for Shuaibah RO plant in Saudi Arabia. Several chemical agents were used for chemical cleaning at different contact time and concentrations of chemicals. Also autopsy analysis was performed using LOI, FT-IR, FEEM, SEM and EDX for assessment of fouling. Specially, FEEM analysis method was thought as analyzing and evaluating tool available for selection of the first applied chemical cleaning dose to predict potential organic fouling. Also, cleaning time should be considered by the condition of RO membrane process since the cleaning time depends on the membrane fouling rate. If the fouling exceeds chemical cleaning guideline, to perfectly remove the fouling, certainly, the chemical cleaning is increased with membrane fouling rate influenced by raw water properties, pre-treatment condition and the point of the chemical cleaning operation time. Also choice of cleaning chemicals applied firstly is important.

• Journal of Power System Engineering
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• v.18 no.1
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• pp.63-68
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• 2014

The numerical analysis of fluid flow in the tube cleaning system is examined. The working flow used in this study is seawater, and the temperature change is not considered as the temperature change of seawater in the tube cleaning system is negligible. Also, the analysis is performed under the assumption of steady state. The screens of complicated morphologies are simplified for the analysis, and only one fourth of the tube cleaning system is modeled as the system has a symmetrical shape. The velocity inlet boundary condition is employed for the seawater inlet, whereas the outflow boundary condition is employed for two seawater outlets. In applying the outflow boundary condition for the system with more than two outlets, the flow rate can be arbitrarily assigned. In the analysis, the finite-volume method based numerical analysis tool, the pressure based solver, the standard k-$\varepsilon$ model are utilized, and the under relaxation factor is modified appropriately. From the analysis, the distribution of velocity vectors, pressure and path lines are obtained, and the physical characteristics of fluid flow in the tube cleaning system is well-examined.

• The Journal of the Korea Contents Association
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• v.17 no.8
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• pp.144-151
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• 2017

The aim of this cross-sectional study was to investigate the relationship between regular interdental cleaning and periodontal condition. A total of 319 pregnant women were recruited at 21 to 24 weeks of gestation. Information on demographics, health status and health behaviors including regulary use of interdental cleaning aids, that can influence periodontal condition was collected. Full mouth periodontal probing was performed. Periodontitis was defined as CAL of 4.0 mm or greater on 2 or more sites not on the same tooth. Gingivitis was defined as 15 percent and more sites showed bleeding on probing. Gingival crevice fluid sample was collected for bacterial analysis. We studied a total of 319 subjects, comprised of 116 subjects who use interdental cleaning device regularly and 203 subjects who didn't. Subjects who do not use interdental cleaning regularly had 2.3 times higher risk of gingivitis and 2.7 times of periodontitis, 2.3 times more amount of P. gingivalis. There was a significant relationship between regular interdental cleaning and periodontal condition in Korea.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2019.05a
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• pp.244-245
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• 2019

Recently, a variety of window cleaning devices have been developed. There are, however, few cases of anticipated problems and countermeasures that may arise after these devices are installed. Therefore, in this study, the emergency condition was derived and the emergency scenario was derived for the rail-mounted cleaning device. Emergency scenarios and countermeasures derived from this study will be used for continuous improvement and supplementation of cleaning devices through prototyping and testing.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.37 no.3
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• pp.17-22
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• 2005

The cleaning efficiency of papermaking felt which is contaminated with fiber fines and various micro-materials was investigated and compared between the application of enzyme and commercial detergent. It was found that the cleaning efficiency by the treatment of acidic-based detergent was more efficient than that of alkaline-based one in the conventional commercial detergent. it was also observed that the treatment design of first acidic-based detergent treatment to second alkaline-based detergent procedure was better in the cleaning efficiency, compared to alkaline based-to-acidic based one. The cleaning property of felt with enzyme was resulted in good cleaning efficiency, without any addition of surfactant. Especially, the enzyme treatment under alkaline condition (pH 10) showed a better cleaning result than that under acidic condition(pH 5). The addition of nonionic surfactant to the enzyme increased the cleaning efficiency of felt and decreased the cationic demand of wastewater. These results showed more favour than the application of conventional commercial detergent.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.4
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• pp.542-553
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• 2015

Objectives: Many types of dust collector are used for industrial ventilation, with the most common types being the cylinder bag filter system, rectangular bag filter system and cylinder type cartridge filter system. The cylinder type cartridge bag filter, which has more filtering area than other types of bag filter, can increase the pulse time and extend the useful life of the filter. This can save operational costs and installation area. Materials: This study used cylinder type cartridge bag filter equipment and tested the impact of vibration level and filter pressure with different pulse jet cleaning conditions. The final, cleaning efficiency was calculated through input dust mass and cleaning dust mass Conclusions: Two optimum cleaning condition groups were found. The first condition group was $3kgf/cm^2$ pulse pressure, 15 cm pulse distance, 0.2 s pulse time with an H-10 type nozzle. The second condition group was $3kgf/cm^2$ pulse pressure, 15 cm pulse distance, 0.3 s pulse time with an H-10 type nozzle.