• Proceedings of the Korean Institute of Building Construction Conference
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• 2013.11a
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• pp.224-225
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• 2013

Most of the building exterior wall cleaning robots use a water jet device for spraying water. However this method is sprayed excessive water usage than water quantity required for cleaning. And setting weight of the water pump cleaning device increase the weight of the building exterior wall cleaning robot. Therefor, this paper suggest that the mechanisms scatter minimal cleaning water using a spinning device of the building exterior wall cleaning robot.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2016.05a
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• pp.85-86
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• 2016

Recently, needs for the window cleaning for 2~5 stories in a building has been increased but existing window cleaning work by workers is not easy to clean the windows. Therefore a demand for development of alternative techniques have been raised. The purpose of this study is to analyze feasibility of development of the guide rail-type cleaning device for cleaning window for the lower stories. For this, we analyze the status of the job, such as risk, limitations of by workers and examine the potential producer needs through interviewing field experts of the cleaning work. Futhermore, we define the required features of the window cleaning device and proposed the validity of the relised device development of the function.

• Tribology and Lubricants
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• v.31 no.6
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1279-1280
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• 2013

• Journal of Environmental Health Sciences
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• v.30 no.5 s.81
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• pp.481-486
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• 2004

Vehicle occupant exposure to air pollutants has been a subject of concern in recent years because of higher levels of air pollutants inside gasoline or diesel-using vehicle, comparing to the surrounding atmosphere. Contrary to previous studies, fuel of vehicles operated in this study was liquefied petroleum gas (LPG). This study examined the potential exposure and removal efficiency of selected volatile organic compounds (VOCs), nitrogen dioxide ($NO_2$) and respirable suspended particle (RSP) by commercial air cleaning device inside vehicle under different ventilation conditions. Vehicle concentrations inside of benzene, toluene, m,p-xylene, $NO_2$ and RSP were lower under the low ventilation condition. This was indicated that outdoor air pollutants could affect the vehicle air quality inside in case metropolitan cities such as Daegu. The urban vehicle concentrations inside of benzene, toluene, m,p-xylene, $NO_2$ and RSP with air cleaning device were higher than those without air cleaning device. This means that the use of air cleaning device equipped with activated carbon filter, which was used in this study, in the interior of vehicles could be expected to reduce the vehicle occupants exposure to air pollutants effectively. In batch type reactor of laboratory scale, removal efficiencies of air cleaning device used were $97.0\%,\;95.7\%,\;94.6\%\;and\;85.5\%$ respectively in benzene, toluene, m,p-xylene and $NO_2$.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.1335-1341
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• 2011

Conserving clean air and removing contaminants and particular matters accumulated in the ventilation system of the subway stations are key issue for green railway environment. There is no national guideline or industrial regulations to sustain clean duct and ventilation system, which requires rapid reformation of cleaning procedure and system. In fact, accumulated various particular matters and dusts can occur secondary air contamination and become a primary health harm factor for subway passengers. This study investigates various duct cleaning technologies and trends. In additon, effective cleaning method with an automated robot device is proposed. In particular, current dust cleaning technologies and duct cleaning robots are analyzed based on their functions and feasibilities. The proposed design of automated device is expected to save the operating cost of subway HVAC system and sustain clean air environment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.257-258
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• 2012

• Proceedings of the Korean Institute of Building Construction Conference
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• 2019.05a
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• pp.244-245
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• 2019

Recently, a variety of window cleaning devices have been developed. There are, however, few cases of anticipated problems and countermeasures that may arise after these devices are installed. Therefore, in this study, the emergency condition was derived and the emergency scenario was derived for the rail-mounted cleaning device. Emergency scenarios and countermeasures derived from this study will be used for continuous improvement and supplementation of cleaning devices through prototyping and testing.

• Journal of the Korea Institute of Building Construction
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• v.16 no.6
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• pp.587-594
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• 2016

This study aims to analyze the benefit-cost of the cleaning device for photovoltaic power generation systems in buildings in order to check its economic feasibility. A product, which has similar characteristics to the ultrasound-based cleaning device and is widely used in South Korea, was selected to compare with the benefit-cost value of the ultrasound-based cleaning device in this study. In order to quantitatively and qualitatively analyze benefit and cost aspects of the two products, categories and evaluation factors of each aspect as well as evaluation criteria were identified. Based on the identified evaluation factors and criteria, this study conducted face-to-face interviews with 15 experts to measure weights of benefit and cost aspects of the products. As the results, the total benefit weight of the ultrasound-based cleaning device was larger than its total cost weight since the benefit-cost value was greater than 1, which was 1.6 times of that of to compared product. Therefore, from the economic perspective, it is worth to develop the cleaning device for photovoltaic power generation systems applying ultrasound technology.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.1-6
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• 2003

In the rapid changes of the semiconductor manufacturing technologies for early 21st century, it may be safely said that a kernel of terms is the size increase of Si wafer and the size decrease of semiconductor devices. As the size of Si wafers increases and semiconductor device is miniaturized, the units of cleaning processes increase. A present cleaning technology is based upon RCA cleaning which consumes vast chemicals and ultra pure water (UPW) and is the high temperature process. Therefore, this technology gives rise to environmental issue. To resolve this matter, candidates of advanced cleaning processes have been studied. One of them is to apply the electrolyzed water. In this work, electrolyzed water cleaning was compared with various chemical cleaning, using Si wafer surfaces by changing cleaning temperature and cleaning time, and especially, concentrating upon the contact angle. It was observed that contact angle on surface treated with Electrolyzed water cleaning was $4.4^{\circ}$ without RCA cleaning. Amine series additive of high pKa (negative logarithm of the acidity constant) was used to observe the property changes of cathode water.