• ETRI Journal
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• v.38 no.4
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• Proceedings of the Korean Geotechical Society Conference
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• 1997.10a
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• pp.203-210
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• 1997

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.252-253
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• 2010

• Journal of the Korea Institute of Building Construction
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• v.24 no.4
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• pp.413-424
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• 2024

To expedite construction of small precast concrete buildings using dry joints, this study developed and evaluated a connector system for solid slabs. The research included a comprehensive literature review on seismic design requirements for precast concrete floors, followed by an analytical evaluation of the connector's bearing capacity in 3-story buildings. Experimental assessments were conducted to determine the in-plane and out-of-plane capacities of the newly designed semi-circular connector. Finally, the constructability of both the semi-circular and flat connector configurations was compared through tests on single-story precast concrete frames.

• Steel and Composite Structures
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• v.18 no.1
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• pp.135-148
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• 2015

The cutout hole locating at the place of rib-to-diaphragm welded connection is adopted to minimize the restraint, which is caused by the floor-beam web to rib rotation at the support due to the unsymmetrical loads in orthotropic deck. In practice, an inevitable problem is that there is a large number of welding joint's cracks formed at the edge of cutout hole. In this study, a comparative experiment is carried out with two types of cutout hole, the circular arc transition and the vertical transition. The fatigue life estimation of specimens is investigated with the application of the structural hot spot stress approach by finite element analyses. The results are compared with the ones of the fatigue tests which are carried out on these full-scale specimens. Factors affecting the stress range are also studied.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1254-1258
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• 2007

Electro-active polymer (EAP), one of the smart materials, is a new alternative offering ultra-precise movements and bio-compatibility. We present the results of the design, fabrication, and performance evaluation of a fabricated diaphragm-type polymer actuator using segmented polyurethane(SPU). This paper illustrates the relationship between the elastic modulus and maximum deflection as a key property of the Maxwell stress effect and also presents the relationship between the dielectric constant and maximum deflection as a key property of the electrostriction effect, especially in polymer actuators using SPU. A diaphragm-type actuator was used to induce an equation of the vertically distributed load by using a fully clamped circular plate as the boundary condition. To verify the equation, the results were compared to the data measured from load cell. In the near future, a low-cost check valves and bio-robot can be applied by its actuators.

• Transactions of Materials Processing
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• v.23 no.1
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• pp.10-15
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• 2014

Recently, micro-speakers have attracted much attention due to their increasing demand in mobile devices. Micro-speakers use polymer diaphragms, which are manufactured from thin polymer film by the thermoforming process. The diaphragm is generally designed to be a circular membrane with a cross section consisting of a double dome structure, and a number of corrugations are located in the outer region to produce better sound quality. In the current study, a finite element (FE) analysis is performed for thermoforming, and the resulting thickness reduction in the corrugation regions is estimated. The estimated thickness distribution is used in further structural and modal FE analyses, from which the effects of local thickness reduction on the stiffness and vibration characteristics are determined.

• Proceedings of the Korean Geotechical Society Conference
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• 2010.03a
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• pp.14-25
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• 2010

The Yi Sun-Sin grand bridge is the suspension bridge which connects Myodo and Gwangyang. It is over the main navigation channel of Gwangyang Harbor. South anchorage(AN1, Myodo side) of the bridge is designed as rock anchored type. It sustains using the resistance of the underground rock's mass in Myodo. As this type of anchorage can minimize the exposure of the structure, It is economically efficient and environmentally friendly. North anchorage (AN2, Gwangyang side) is designed as the gravity type. This anchorage is 68 meters in diameter and use its own weight to support. Instead of normal rectangular diaphragm wall, the circular shape diaphragm wall is adopted to the north anchorage. It doesn't need to use internal temporary facilities, so it can significantly improve the constructability of the structure.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.207-209
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• 1993

In this paper, an electrostatic silicon micro actuator has been designed and fabricated using the micro machining technology. The actuator consists of two counter electrodes. One is an Al film deposited on a pyrex glass, and the other is a circular corrugated diaphragm with boron doped. The diaphragm is fabricated by boron etch stop technique using an anisotropic etchant, EPW.

• Steel and Composite Structures
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• v.6 no.1
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• pp.55-69
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• 2006

The results of tests conducted on 11 concrete-filled steel tubular columns were reported. Concrete was partially filled in circular steel tubular columns. The primary test parameters were radius and thickness of steel tubes, concrete height, loading patterns and attachment of diaphragm and studs. Concrete strain was measured directly by embedding strain gauges so that the effect of diaphragm on concrete confinement could be investigated. The effects of concrete height and diaphragm on ultimate strength and ductility of steel tubes were investigated. The comparisons of the test results with the existing results for rectangular cross-sections were made on the basis of ultimate strength and ductility of concrete-filled steel tubular columns.