• Title/Summary/Keyword: Circular Deviation

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A Wafer Alignment Method and Accuracy Evaluation (웨이퍼 정렬법과 정밀도 평가)

  • Park, Hong-Lae;Lyou, Joon
    • Journal of Institute of Control, Robotics and Systems
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    • v.8 no.9
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    • pp.812-817
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    • 2002
  • This paper presents a development of high accuracy aligner and describes a method to find the orientation of a substantially circular disk shaped wafer with at least one flat region on an edge thereof. In the developed system, the wafer is spun one 360 degree turn on a chuck and the edge position is measured by a linear array to obtain a set of data points at various wafer orientation. The rotation axis may differ from wafer center by an unknown eccentricity. The flat angle is found by fitting a cosine curve to the actual data to obtain a deviation. The maximum deviation is then corrected for errors due to a finite number of data points and wafer eccentricity by calculating an adjustment angle from data points on the wafer fiat. After determining the flat angle the wafer is spun to the desired orientation. The wafer eccentricity can be calculated from four of the data points located away from the flat edge region. and the wafer is then centered.

Probabilistic stability analysis of underground structure using stochastic finite element method

  • Na, Sang-Min;Moon, Hyun-Koo
    • 한국지구물리탐사학회:학술대회논문집
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    • 2003.11a
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    • pp.192-197
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    • 2003
  • It can be said that rock mass properties are characterized not by a mean value but by values with variation due to its characteristic uncertainty. This characteristic is one of the most important parts for the design of underground structures, but yet to be fully examined. Stochastic finite element method (SFEM) has been developed in order to take the randomness of structural systems into account. Using SFEM, the response variability of structural system can be obtained and it leads probabilistic stability of structure to be analyzed. In this study, displacements response variability of circular opening with hydrostatic stress field are analyzed in terms of rock mass properties having a certain mean and a standard deviation using the SFEM. The analyzed response variability shows that the necessity of probabilistic stability analysis of underground structures using reliable mean value and standard deviation of deformation modulus.

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Analysis of Water Flux Uniformity for Various Fire Sprinkler Head Type (화재 진압용 스프링클러 헤드 유형에 따른 살수 균일도 분석)

  • Saemi Bang;Chanseob Ahn;Taehoon Kim
    • Journal of ILASS-Korea
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    • v.28 no.2
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    • pp.97-104
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    • 2023
  • A sprinkler is a fire suppression system that extinguishes combustible materials in the early stages of a fire, creating a spray. However, spray formation method of the sprinkler can result in an uneven distribution of water spray on the surface of combustible materials. It is necessary to ensure a consistent water flux density regardless of the spray direction and angle. In this study, the water flux distribution was analyzed for the various types of sprinkler head: circular, flush, pendent, and upright types. All sprinkler heads have a K-factor of 80 LPM/(0.1MPa)0.5. In this study, water collection cubes were used to examine the water flux distribution. The upright type sprinkler head showed a low standard deviation in total sprayed area, indicating a high level of uniformity. The upright type head showed the lowest standard deviation in the radial direction, and also showed the lowest standard deviation in the azimuthal direction. Upright sprinkler head has no obstructing structure along the path of droplets after they are generated. For this reason, upright sprinkler head showed the most uniform water flux distribution on the floor.

Driving Performance Evaluation Using Foot Operated Steering System in the Virtual Driving Simulator (가상 운전 시뮬레이터를 이용한 족동 조향 시스템의 운전 성능 평가)

  • Song, Jeongheon;Kim, Yongchul
    • Journal of Biomedical Engineering Research
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    • v.38 no.4
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    • pp.197-204
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    • 2017
  • The aim of this study was to evaluate driving performance of normal subjects for controlling the steering wheel by using foot operated steering devices in the driving simulator. Many people with complete bilateral loss or loss of use of upper limbs but with normal lower limbs are frequently left without use and/ or control of their hands, arms, or the upper extremities of their bodies. As a result, persons disabled in this manner have problems in operation an automobile because they cannot grasp and manipulate a conventional steering wheel. Therefore, if foot operated steering devices are used for controlling the vehicle on in people with disabilities, the disabled people could improve their community mobility by driving a car safely. Ten normal subjects were involved in this research to evaluate steering performance by using three types of steering devices(conventional steering wheel, pedal type foot steering, circular type foot steering) in driving simulator. STISim Drive 3 program was used for testing the driving performance in two road scenarios: straight road and curved road at low and high speed of vehicle (40 km/h and 80 km/h). This study used two-way ANOVA to compare the influences of two factors(type of foot steering device and road scenario) in the three dependent variables of steering performance(standard deviation of lateral position, the lateral position of vehicle and the number of line crossing). The average values of the three dependent variables(standard deviation of lateral position, lateral position and the number of line crossing) of driving performance were significantly smaller for conventional steering wheel or pedal type foot steering than circular type foot steering.

Large-scale structure of circular jet in transitional region at reynolds number of ${10}^{4}$ (Reynolds수 ${10}^{4}$일때 천이영역에서의 왼형제트의 Large-Scale 구조에 관한 연구)

  • 이택식;최은수
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.10 no.6
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    • pp.823-829
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    • 1986
  • The Large-scale structure of the circular jet in the transition region, which influences the subsequent flow in the turbulent region, was studied experimentally. Measuring equipments are composed of the two channel hot-wire anemometer, the computer controlled two-directional traverse mechanism, the data acquisition system, and FFT-analyzer. The circular jet has 50mm diameter. The mean velocity distribution, the velocity fluctuation, the auto 'cross correlations and the power spectra were acquired at moderate Reynolds number of 10$^{4}$. And the VITA method was used to measure the convection velocity of Large-scale eddy. The phase of u'is in advance of that of v'in all regions. .over bar. $R_{u}$(.tau.=0) is approximately zero in the potential core region, but a small regular deviation is observed. At a position in the mixing layer region the convection velocity is different along the part of the eddy, and in this experiment the convection velocity of the inner region is larger than the outer region. The averge convection velocity of the eddy along y/D=0 was approximately constant in the transition region.D=0 was approximately constant in the transition region.

Experimental Study on the Wall Jet Flow Induced by Impinging Circular Jet on Arotating Disk (충돌제트로 인한 회전원판 위의 벽제트유동에 관한 실험적 연구)

  • 강형석;유정열
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.12
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    • pp.3386-3394
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    • 1994
  • An experimental study has been performed on the flow over a rotating disk, where the diameter of the disk is 500 mm and the maximum vertical deviation of the upper surface is $50 \mu{m}$ for the whole range of the angular velocity up to 3400 rpm. The flow visualization experiment for the wall jet flow induced by impinging circular jet is carried out using schlieren system and measurements are made by 3-hole and 5-hole pitot tubes. Schlieren photographs show that as the rotating speed increases the wall jet flow becomes more stable and the size of the largest eddies becomes smaller. Measurements for impinging jet flow on the stationary disk verify the accuracy of the present experiment, and those for free rotating disk flow display the existence of transition region from laminar to turbulent flows. Measurements for impinging jet flow on the rotating disk exhibit the interaction between the wall jet and the viscous pumping effect, which explains the decay in size of turbulent eddies illustrated by the schlieren photographs.

A Study on the Torque Transmitting Capability of a Disk Coupling by Finite Element Analysis (유한요소해석을 이용한 디스크 커플링의 토크전달 능력에 대한 연구)

  • Seo, Won Sang;Kim, Sung Muk;Kim, Jong-Bong
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.11
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    • pp.1171-1177
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    • 2013
  • In this study, the torque transmitting capability of a flexible disk coupling was investigated. Flexible disc coupling is used to transmit power between two axes, and there exist mis-alignments such as angle of deviation and end play between two shafts. A disk is an important part in the flexible disk coupling because the disk has to transmit power between two mis-aligned shafts. To investigate the effect of mis-alignment on load carrying capacity, finite element analyses were carried out. Analyses were carried out for two types of disk; i.e., circular and square disks. The rotational and bending stiffness of disk plates was predicted to investigate the effect of mis-alignment on stress. As a result, it was shown that the mis-alignment can cause severe decrease in load-carrying capacity. And, the square disk showed better performance than the circular disk.

High Dose Rate Ir-192 Source Calibration Method with Newly Designed Calibration Jig (고선량 Ir-192선원 교정기의 제작 및 특성)

  • Yi, Byong-Yong;Choi, Eun-Kyung;Chang, Hye-Sook
    • Radiation Oncology Journal
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    • v.7 no.2
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    • pp.299-303
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    • 1989
  • Authors have developed highly reproducible calibration method for the Micro-Selectron HDR Ir-192 system (Nucletron, Motherland). The new jig has a 10cm radius circular hole in the $30cm{\times}30cm{\times}0.2cm$ acrylic plate, and 5F flexible bronchial tubes are attached around the hole. The source moves along the circle in the tubes and the ionization chamber is placed verticaly at the center of the circular hole (center of the jig). Dose distribution near the center was derived theoretically, and measured with the film dosimetry system. Theoretical calculation and measurement show the error margin below $0.1\%$ for 1mm or 2mm position deviation. We have measured at 12 and 24 points of circle with 1, 6, 11 and 21 second dwell time of source in order to calculate the activity of the source. Measurements have been repeated daily for 50 days. The accuracy and the reproducibility are below $1\%$ error margin. The half life of the source from our measurement is estimated $73.4\pm0.4$ days.

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Pressure Drop in Microtubes and Correlation Development (마이크로관 내 압력강하 특성 및 상관식에 관한 연구)

  • Hwang, Yun-Wook;Kim, Ju-Hyok;Kim, Min-Soo
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.18 no.1
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    • pp.38-46
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    • 2006
  • The characteristics about the pressure drop in microtubes have been investigated. The test tubes are the circular, seamless, stainless steel tubes with an inner diameter of 0.244, 0.430, and 0.792 mm, respectively. R-l34a was used as a test fluid. Early flow transition which has been reported in some previous studies is not found in single-phase flow pressure drop tests. The conventional theory between friction factor and Reynolds number predicted the experimental friction factors within an absolute average deviation of $8.9\%$. The two-phase flow pressure drop increases for higher quality and mass flux, and for reduced inner diameter. The existing correlations fail to predict the experimental data. A new correlation to predict the two-phase flow pressure drop is developed in the form of the Lockhart-Martinelli correlation. The effects of the tube diameter and the surface tension were considered, and the correlation predicted the experimental data within an average absolute deviation of $8.1\%$.