• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.5 no.1
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• pp.27-32
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• 1996

This paper deals with the distributions of magnetic flux of an electro-magnetic chuck which is one of the most commonly used chucking attachments in a surface grinding machine. The measured results showed good correspondence with the theoretical results which were previously presented by the same author. The normal and tangential components of the magnetic flux density were measured using the gauss meter. The measured results indicated that the magnetic flux density was periodically changing over the transverse position to the magnetic pole. The normal component of magnetic flux decreases very rapidly for the increased z position.

• Journal of the Korean Society for Precision Engineering
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• v.8 no.4
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• pp.126-136
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• 1991

In order to reduce the possibilities of personnel injuries and damages to machines and to obtaim higher efficiency and machining accuracy in the manufacturing system, the chucking technology has recentry become important. The chucking technology of work greatly affects both the grometrical accuracy and fonctional performance of the workpiece. In this study, the dynamic gripping force of a 3-jaw power chuck is investigated on the factors of the shape of jaw and the shape of workpiece. From this investigation, the following observations are obtained. 1) The higher stiffness of workpiece is, the higher decrease of dynamic gripping force is. 2) The nearer to the root of jaw is, the higher decrease of dynamic gripping force is. 3) The centrifugal force of affectting the decrease of dynamic gripping force has to be considered in the centrifugal force of affecting jaw.

• Current Optics and Photonics
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• v.1 no.6
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• pp.618-625
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• 2017

In the present research, a new bending system using a segmented vacuum chuck for Stressed Mirror Polishing (SMP) is developed. SMP is a special fabrication method for thin aspheric mirrors, where simple flat or spherical fabrication is applied while a mirror blank is deflected. Since a mirror blank is usually glued to a bending fixture in the conventional SMP process, there are drawbacks such as long curing time, inconvenience of mirror replacement, risk of mirror breakage, and stress concentration near the glued area. To resolve the drawbacks, a new bending system is designed to effectively hold a mirror blank by vacuum. For the developed bending system, the optimal bending load to achieve the designated mirror deflection is found by finite element analysis and an optimization algorithm. With the measurement results of the deflected mirror surfaces with the optimal bending loads, the feasibility of the developed bending system is investigated. As a result, it is shown that the bending system is appropriate for the SMP process.

• Tribology and Lubricants
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• v.24 no.6
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• pp.326-331
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• 2008

The contact surfaces between mold and target should be in parallel for a proper imprinting process. However, large size of contacting area makes it difficult for both mating surfaces (mold and target planes) to be in all uniform contact with the expected precision level in terms of thickness and position. This is caused by the waviness of mold and target although it is very small relative to the area scale. The gripping force for both mold and target by the vacuum chuck is other major effect to interrupt the uniform contact, which must be avoided in imprinting mechanism. In this study, the cause of non-conformal contact mechanism between mold and target is investigated with the consideration of deformation due to the vacuum gripping for the size $470{\times}370\;mm^2$ LCD panel.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.269-272
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• 2006

Surface contacts between mold and target should be in parallel for the imprinting mechanism. However, the size of contacting area makes it difficult for both mating surfaces to be in all contact because of precision level of the imprinting machine and the waviness of mold and target. The gripping force for both mold and target with the vacuum chuck is also major effect to interrupt the full contact, which must be avoided in imprinting mechanism. In this study, the preliminary study for the causes of non-uniformity of contacting surfaces such as mold and target is performed with $470{\times}370mm^2$ LCD panel size.

• Polymer Science and Technology
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• v.4 no.1
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• pp.35-44
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• 1993

• Current Research on Agriculture and Life Sciences
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• v.1
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• pp.165-167
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• 1983

Oxy - and metmyoglobin concentrations in beef chuck were measured by Hunter-Lab and spectrophotometer. The values of oxymyoglobin by Hunter-Lab got 34.03, 10.40, and 6.50 as average in L, a, and b while the CIE color primaries were 13.33, 11.58, and 9.94 in X, Y, and Z, respectively. The metmyoglobin values recorded 39.10, 13.20, and 10.13 in L, a, and b, of which values were converted to 17.88, 15.29, and 11.40 in X, Y, and Z of the CIE primaries. Absorption spectrum of oxymyoglobin showed 2 peaks which were 0.79 and 0.83 pf extinction coefficient with 530 and 570nm in wavelengh, and that of metmyoglobin appeared on an irregular curve with a summit of 0.58 and 500 in extinction coeffcient ($cm^2$/mg) and wavelength(nm) each.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.88-88
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• 2003

Optical Emission Spectroscopy(OES) is a very important technology for real-time monitoring of plasma in a reactor during dry etching process. OES technology is non-invasive to the plasma process. It can be used to collect information on excitation and recombination between electrons and ions in the plasma. It also helps easily diagnose plasma intensity and monitor end-point during plasma etch processing. We studied high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar plasma with an OES as a function of processing pressure, RIE chuck power, ICP source power and gas composition. The scan range of wavelength used was from 400 nm to 1000 nm. It was found that OES peak Intensity was a strong function of ICP source power and processing pressure, while it was almost independent on RIE chuck power in BCl$_3$-based planar ICP processes. It was also worthwhile to note that increase of processing pressure reduced negatively self-induced dc bias. The case was reverse for RIE chuck power. ICP power and gas composition hardly had influence on do bias. We will report OES results of high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar Plasma in detail in this presentation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.361-365
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• 2003

Planar Inductively Coupled Plasma (PICP) etching of InGaP was performed in $BCl_3,\;BCl_3/Ar\;and\;BCl_3/Ne$ plasmas as a function of ICP source power ($0\;{\sim}\;500\;W$), RIE chuck power ($0\;{\sim}\;150\;W$), chamber pressure ($5\;{\sim}\;15\;mTorr$) and gas composition of $BCl_3/Ar\;and\;BCl_3/Ne$. Total gas flow was fixed at 20 sccm (standard cubic centimeter per minute). Increase of ICP source power and RIE chuck power raised etch rate of InGaP, while that of chamber pressure reduced etch rate. We also found that some addition of Ar and Ne in $BCl_3$ plasma improved etch rate of InGaP. InGaP etch rate was varied from $1580\;{\AA}/min$ with pure $BC_3\;to\;2800\;{\AA}/min$ and $4700\;{\AA}/min$ with 25 % Ar and Ne addition, respectively. Other process conditions were fixed at 300 W ICP source power, 100 W RIE chuck power and 7.5 mTorr chamber pressure. SEM (scanning electron microscopy) and AFM (atomic force microscopy) data showed vertical side wall and smooth surface of InGaP at the same condition. Proper addition of noble gases Ar and Ne (less than about 50 %) in $BCl_3$ inductively coupled plasma have resulted in not only increase of etch rate but also minimum preferential loss and smooth surface morphology by ion-assisted effect.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.9
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• pp.2223-2228
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• 2014

Available shafts with gears at each end of the cylinder-shaped steel are widely used as power train components for automobiles. In order to automate the production of a geared shaft, there are problems to be solved. After one side of the cylinder is cut in gears, one of the problems is to determine the position of the cylinder which has been already cut. The shaft is then to be fed ahead with geared position to the chuck with jaws in geared shape. The other problem is to acquire information on an angular position of the shaft to fit to the jaws of the chuck. This paper deals with the magnetic detection sensor of gear position. Coils are installed in two places. Self-inductances of coils are detected by the changes of reluctance and are then compared. The magnetic analysis also has been carried out by the finite element analysis (FEM).