• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.1
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• pp.1-5
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• 2011

To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.72-73
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• 2005

In this paper, the simulation of the n-p-n-p layer stacked color detector is presented. A color detector based on vertically integrated structures of silicon can overcome color moire or color aliasing effect. The color detector is designed to separate the fundamental chromatic components at each junction and exhibits maxima of the spectral sensitivity at red, green, and blue region, respectively. From this result, it is observed that the spectral response can be controlled by the doping concentration and structure of the devices.

• Korean Journal of Optics and Photonics
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• v.29 no.6
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• pp.268-274
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• 2018

In this study we suggest a humidity-sensitive color sensor using a one-dimensional photonic crystal and Hong Kong University of Science and Technology-1 (HKUST-1), which is a metal-organic framework (MOF) substance. One-dimensional photonic crystals have a photonic band gap, due to a periodic refractive-index change, and block and reflect light components in a specific wavelength band. The refractive index of HKUST-1 differs in dry and humid environments. Herein we designed a sensor using the presence of the photonic band gap, with FDTD simulation. As a result of optical analysis, the color conversion of the reflected light was superior to the color conversion of the transmitted light. When the center wavelength of the photonic band gap was 550 nm, the maximum peak value of the wet environment increased by a factor of about 9.5 compared to the dry environment, and the color conversion from achromatic to green was excellent as a sensor. The results of this study suggest the application of MOF materials to moisture sensors, and the nanostructure design of MOF materials will expand the applications to industrial devices.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.45 no.5
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• pp.9-17
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• 2008

This paper proposes a method of color reproduction considering the viewing conditions of a PDP TV. Because of a change of peripheral environments by a temporal and spatial location of observers, the ambient lightings should be considered in the process of color reproduction of displays. A conventional method enhances the contrast and saturation of images by controlling voltage gains in each channel, so that there is a limit to implementing the phenomenon of human adaptation. This method also faces difficulties in reproducing the perceived colors under a variety of viewing conditions. Accordingly, in order to solve this problem, we first characterize the device by considering the brightness and the flare effect. The chromatic adaptation is finally applied to reproduce colors in a PDP TV using the information from the viewing conditions by the sensor. The images reproduced by the proposed method are visually more superior to those reproduced by a conventional method in the experiments.