• Tribology and Lubricants
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• v.38 no.4
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• pp.152-161
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• 2022

Chemical mechanical planarization (CMP) is a technology that planarizes the surfaces of semiconductor devices using chemical reaction and mechanical material removal, and it is an essential process in manufacturing highly integrated semiconductors. In the CMP process, a conditioning process using a diamond conditioner is applied to remove by-products generated during processing and ensure the surface roughness of the CMP pad. In previous studies, prediction of pad wear by CMP conditioning has depended on numerical analysis studies based on mathematical simulation. In this study, using an artificial neural network, the ratio of conditioner coverage to the distance between centers in the conditioning system is input, and the average conditioning density, standard deviation, nonuniformity (NU), and conditioning density distribution are trained as targets. The result of training seems to predict the target data well, although the average conditioning density, standard deviation, and NU in the contact area of wafer and pad and all areas of the pad have some errors. In addition, in the case of NU, the prediction calculated from the training results of the average conditioning density and standard deviation can reduce the error of training compared with the results predicted through training. The results of training on the conditioning density profile generally follow the target data well, confirming that the shape of the conditioning density profile can be predicted.

• 대한예방의학회:학술대회논문집
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• 1994.02a
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• pp.405-411
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• 1994

Hazardous wastes released into the general environment are of concern to the public and to public health authorities. In response to this concern, the Comprehensive Environmental Response, Compensation, and Liability Act, as amended (commonly called Superfund), was enacted in 1980 to provide a framework for environmental, public health, and legal actions concerning uncontrolled releases of hazardous substances. The Agency for Toxic Substances and Disease Registry (ATSDR) was created by Superfund to address the public health issues of hazardous wastes in the community environment. Two key Agency programs, Public Health Assessments and Toxicological Profiles, are designed to assess the risk to human health of exposures to hazardous substances that migrate from waste sites or through emergency releases (e.g., chemical spills). The Agency's public health assessment is a structured process that permits ATSDR to identify which waste sites or other point sources require traditional public health actions (e.g.. human exposure studies, health studies, registries, health surveillance, health advisories). The ATSDR qualitative public health assessment complements the U.S. Environmental Protection Agency's quantitative risk assessment. For Superfund purposes, both assessments are sitespecific. ATSDR's toxicological profiles are prepared for priority hazardous substances found most frequently at Superfund sites. Each profile presents the current toxicologic and human health effects information about the substance being profiled. Each profile also contains Minimal Risk Levels (MRLs), a type of risk assessment value. This paper covers ATSDR's experience in conducting public health assessments and developing MRLs, and it relates this experience to recommendations on how to improve chemical risk assessments.

• Journal of The Geomorphological Association of Korea
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• v.27 no.3
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• pp.1-11
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• 2020

A CIA analysis (A-CN-K and A-CNK-FM ternary diagram) indicates that, unlike the general granitic hills of the Korean Peninsula, the chemical weathering of the granitic grus (sandy regolith) in the eastern Jincheon basin is variable in geomorphic site except the Chuncheon basin. In the study area, there are three types of hills, such as; inner hills, linear isolated hills, and outer hills. The weathered mantles of the outer hills and linear isolated hills are weakly altered, whereas the inner hill, the Bonghyeon profile, shows a stronger chemical loss of the compositions approximating saprolite. There are small differences between the outer hills and linear isolated hills. The Geumwang site is considered fresh rock due to a low lever of alteration, although its sampling profile shows sandy weathering mantles. In the profiles of the Masan and Mugeuks sites, the lower part of weathering mantles has not experienced a significant level of component loss, but the upper regoliths have substantially been modified. The alteration of the hills occurs by chemical loss of CaO and Na₂O. K₂O exhibited little variation at all sampling suites and it has not changed into saprolite.

• Asian-Australasian Journal of Animal Sciences
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• v.22 no.12
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• pp.1718-1734
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• 2009

The aim of this review is to address some characteristics that influence meat quality. Genetic groups, nutrition, finishing systems and gender are the major factors that change carcass characteristics, chemical composition and fatty acid profile. Genetic groups that have zebu genes in their composition show higher hot carcass dressing than genetic groups without zebu genes. Genetic groups that have European breeds in their composition have higher marbling scores. On the other hand, genetic groups that have zebu breeds show low marbling scores. Bulls finished in feedlots present higher final weight than steers, cull cows and heifers. Fat thickness is one of the principal parameters that are affected by different gender. Cull cows (4.72 mm) and heifers (4.00 mm) present higher values than bulls (1.75 mm) and steers (2.81 mm). The major effects observed by different systems of termination are fat thickness and marbling. Crude protein presents variation due to nutrition. Nutrition influences variation of fatty acid profile. Genetic groups also influence fatty acid profile. Genetic groups that have zebu genes in their composition show high percentage of PUFA. The major class of fatty acids that is changed with nutrition is PUFA. The better ratios of PUFA/SFA and n-6/n-3 are found in Longissimus muscle of animals finished in pasture systems.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.4
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• pp.387-396
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• 2003

A field study was conducted during the summer time of 2002 to determine compositions of volatile organic compounds (VOCs) emitted from vehicles and to develop source emission profiles that is applied to CMB model to estimate the source contribution of certain area. Source emission profile is widely used for the estimation of source contribution by the chemical mass balance model and have to be developed applicable for the target area of estimation. This study was aimed to develop source emission profile and estimation of source contribution of VOCs after application of the chemical mass balance (CMB) receptor model. After considering the emission inventory and other research results for the VOCs in Seoul, Korea, the sources like vehicle emission (tunnel), gas station (gasoline, diesel), solvent usage (painting operation, dry cleaning, graphic art), and gas fuels were selected for the major VOCs sources. Furthermore, ambient air samples were simultaneously collected from 09:00 to 11:00 for four days at eight different official air quality monitoring sites as receptors in Seoul during summer of 2001. Source samples were collected by canisters, and then about seventy volatile organic compounds were analyzed by gas chromatography with flame ionization detector (GC/FID). Based on both the developed source profiles and the database of the receptors, CMB model was intensively applied to estimate mass contribution of VOCs sources. Examining the source profile from the vehicle, the portion of alkanes of VOCs was highest, and then the portion of aromatics such toluene, m/p-xylene were followed. In case of gas fuel. they have their own components; the content of butane, propane, ethane was higher than any other component according to the fuel usage. The average of the source apportionment on VOCs for 8 sites showed that the major sources were vehicle emission and gas fuels. The vehicle emission source was revealed as having the highest contribution with an average of 49.6%, and followed by solvent with 21.3%, gas fuel with 16.1%, gasoline with 13.1%.

• Advances in nano research
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• v.10 no.3
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• pp.221-234
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• 2021

During the previous few years, phenomenon of bioconvection along with the use of nanoparticles showed large number of applications in technological and industrial field. This paper analyzed the bioconvection phenomenon in magnetohydrodynamic boundary layer flow of a Powell-Eyring nanoliquid past a stretchable cylinder with Cattaneo-Christov heat flux. In addition, the impacts of chemical reaction and heat generation/absorption parameter are considered. By the use of appropriate transformation, the governing PDEs (nonlinear) have been transformed and formulated into nonlinear ODEs. The resulting nonlinear ODEs subjected to relevant boundary conditions are solved analytically through homotopy analysis method which is programmed in Mathematica software. Graphical and numerical results versus physical quantities like velocity, temperature, concentration and motile microorganism are investigated under the impact of physical parameters. It is noted that velocity profile enhances as the curvature parameter A and Eyring-Powell fluid parameter M increases but a decline manner for large values of buoyancy ratio parameter Nr and bio-convection Rayleigh number Rb. In the presence of Prandtl number Pr, Eyring-Powell fluid parameter M and heat absorption parameter ��, temperature profile decreases. Nano particle concentration profile increases for increasing values of magnetic parameter Ha and thermophoresis parameter Nt. The motile density profile has revealed a decrement pattern for higher values of bio-convection Lewis number Lb and bio-convection peclet number Pe. This study may find uses in bio-nano coolant systems, advance nanomechanical bio-convection energy conversion equipment's, etc.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.4
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• pp.1982-1987
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• 2011

In this study, we proposed a new method that can estimate viscosity curves of unknown samples or high viscous resins like LFT(Long Fiber Thermoplastics). First, we built the system that could detect the pressure of melt during filling the cavity in a mold. It consists of both pressure sensors which are installed in a mold and the Kit which can convert analog signal to digital signal. The kit measures the melt pressure in mold cavity. We could also simulate the cavity pressure during filling process with commercialized CAE softwares(ex, Moldflow). If the viscosity data in CAE Database were correct, the simulated pressure profile coincided with the measured one. According to our proposed algorithm, we obtained correct viscosity data by iterating the process of comparing the simulated profile with the measured one until both coincided each other. In order to verify this algorithm, we selected well-defined PP resin and concluded that the experimental profile comply with the CAE profile. We could also estimate the optimized viscosity curves for PP-LFT by applying our method.

• Korean Chemical Engineering Research
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• v.55 no.2
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• pp.275-278
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• 2017

Heterogeneous semiconductor composites have been widely used to establish high-performance microelectronic or optoelectronic devices. During a deposition of silicon atoms on silicon/germanium compound surfaces, germanium (Ge) atoms are segregated from the substrate to the surface and are mixed in incoming a silicon layer. To suppress Ge segregation to obtain the interface sharpness between silicon layers and silicon/germanium composite layers, approaches have used silicon hydride gas species. The hydrogen atoms can play a role of inhibitors of silicon/germanium exchange. However, there are few kinetic models to explain the hydrogen effects. We propose using segregation probability which is affected by hydrogen atoms covering substrate surfaces. We derived the model to predict the segregation probability as well as the profile of Ge fraction through layers by using chemical reactions during silicon deposition.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.4
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• pp.61-64
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• 2003

The fractography was used to observe the stress profile on a single ion-exchanged glass. In the processing, the temperature was varied during the ion exchange, and then the stress profile on the single ion-exchanged glass was shifted from glass surface to slightly below the glass surface. The hackle mark and mirror surface were varied according to process conditions, and the glass strength was increased with increasing the number of hackle markers. In case of breaking the stress profile by using indenter, the breaking property was similar to the annealed glass.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.476-481
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• 1999

Characteristics of platinum dry etching were investigated in a cryogenic magnetized inductively coupled plasma (MICP). The problem with platinum etching is the redeposition of sputtered platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned platinum structure produces feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape [1]. The main object of this study was to investigate a new process technology for fence-free Pt etching As bias voltage increased, the height of fence was reduced. In cryogenic etching, the height of fence was reduced to 20% at-$190^{\circ}C$ compared with that of room temperature, however the etch profile was not still fence-free. In Ar/$SF_6$ Plasma, fence-free Pt etching was possible. As the ratio of $SF_6$ gas flow is more than 14% of total gas flow, the etch profile had no fence. Chemical reaction seemed to take place in the etch process.