• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.31-34
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• 2000

It is very important to understand the correlation of between inter layer dielectric(ILD) CMP process and various facility factors supplied to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD CMP process were studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyzed various facilities supplied at supply system. With facility shortage of D.I. water(DIW) pressure, we introduced an adding purified $N_2(PN_2)$ gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and PN2 gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and PN2 gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• Journal of the Korea Institute of Building Construction
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• v.11 no.2
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• pp.189-199
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• 2011

Installation of a proper root barrier in a green roof system is very important in order to protect the concrete slab of roof and the root penetration in the waterproofing layer. To select the proper root barrier materials and methods, it is necessary to understand the environmental conditions affecting the waterproofing-root barrier system in green roof construction site. Therefore, we suggested as the environmental performance indexes four kinds of performance requirements; root penetration, chemical attack by chemical agent or fertilizer, load impact by soil depth and size of plant, and water pressure. The related four test methods were suggested for the inspection of these performance indexes. In this research, we could suggest for kinds of test methods as standard test methods to evaluate the environmental performance of waterproofing-root barrier for greening roof system.

• Journal of the Korean Chemical Society
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• v.22 no.3
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• pp.150-157
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• 1978

The rate constants for the hydrolysis of the derivatives of N-(p-nitrophenyl)-benzohydrazonyl azide (p-$CH_3,\;p-CH_3O,\;p-NO_2$, p-Cl, p-Br) have been determined by UV spectrophotometry in 50% dioxane-water at $25^{\cicr}C$ and a rate equation which can be applied over wide pH range was obtained. Below pH 5, the rate of hydrolysis of hydrazonyl azides is accelerated by electron-donating group ($\rho$ = -0.47), whereas at the pH values greater than 7, the $\rho$-value is 0.68. The effect of salt, solvent, substituent and azide ion on the rate of hydrolysis are rationalized in terms of $S_N1$ and $S_N2$ mechanism; below pH 5, the hydrolysis proceed through $S_N1$, however, above pH 7, the hydrolysis is started by the attack of hydroxide ion and in the range of pH 5∼7, these two reactions occur competitively.

• Journal of the Korean Chemical Society
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• v.22 no.3
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• pp.164-172
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• 1978

Carboxypeptidase A-catalyzed hydrolysis of ester substrates was carried out at room temperature in the presence of a number of external reagents. If the acyl-enzyme intermediate, an anhydride, is attacked by the external reagents, products formed by trapping at the acyl portion or at the enzyme portion of the anhydride group can be obtained. Examination of the uv/vis spectral properties of the reaction products and of changes in enzyme activity indicated that such trapping reactions did not occur. Also performed was evaluation of enzymatic rate parameters for the the hydrolysis of O-(o-hydroxyphenylacetyl)-L-${\beta}$-phenyllactate. Detection of 2-coumaranone possibly formed by attack of the o-hydroxy group as an intramolecular trapping group at the acyl-enzyme intermediate was tried, but no evidences for the intramolecular trapping reaction were obtained. Failure to trap the intermediate was discussed in terms of steric hindrance imposed on the approach of the trapping reagents to the anhydride group of the acyl-enzyme intermediate and of the fast enzymatic breakdown of the intermediate.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.19 no.4
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• pp.320-328
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• 2007

The durability of marine concrete structures is severely degraded by corrosion due to seawater attack and diffusion of chloride in concrete. The deduction of durability causes high repair cost for maintenance of marine concrete structure. So, the applicability of high-durable materials is investigated to improve the durability in marine concrete structures. For these, the characteristics of corrosion prevention of marine concrete structures mixed with the mineral admixtures(SF, FA and BFS), the modified steel(stainless and coating steel), and corrosion inhibitors are evaluated using electro-chemical methods. As a results of this study, it is quantified for the effect of promotion of durability by high-durability materials in marine concrete structures.

• Journal of the Korean Chemical Society
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• v.17 no.5
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• pp.363-370
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• 1973

The rate constants of the nucleophilic addition of n-propyl-mercaptan to $\alpha$-cyano-$\beta$-piperonylacrylic acid were determined at various pH and a rate equation which can be applied over wide pH range is obtained. The rate equation reveals that below pH 4.5 the reaction is initiated by the attack of n-propylmercaptan to $\alpha$-cyano-$\beta$-piperonylacrylic acid. At pH 4.5~6.5, however, n-propylmercaptan is added to $\alpha$-cyano-$\beta$-piperonylacrylate ion; at pH 7.04~9.5 the competitive reaction between n-propylmercaptan and n-propylmercaptide ion is anticipated to occur. Above pH 10 the addendum is n-propylmercaptide ion and the acceptor is $\alpha$-cyano-$\beta$-piperonylacrylate ion.

• Journal of the Korean Chemical Society
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• v.27 no.2
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• pp.157-164
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• 1983

N-Methylidene-2,6-diethylaniline (III) was prepared by the reaction of 2,6-diethylaniline (II) with an excess paraformaldehyde. The protons of N=$CH_2$in the compound III exhibited a second order NMR spectrum. The compound III reacted with bifunctional chlorocarbonylsulfenyl chloride(IV) to give N-(chloromethyl)-N-(2,6-diethylphenyl)-carbamoylsulfenyl chloride(V). The reaction of the compound V with various alcohols resulted in the formation of Alkyl N-(chloromethyl)-N-(2,6-diethylphenyl)-carbamoylsulfenate esters(VI${\sim}$XVI) in 71${\sim}$95% yields. The compound VI${\sim}$XVI decomposed gradually, but the thermal rearrangement of S-O bonding to S=O bonding was not found. The nucleophilic attack of an excess alcohol to the compound Ⅴ was made on both divalent sulfur and ${\alpha}$-carbon of N-chloromethyl group. The corresponding substituted products(XVII, XVIII) had considerable stability.

• Journal of the Korean Chemical Society
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• v.45 no.3
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• pp.213-218
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• 2001

The reaction of peroxo vanadium(V) complexes, $VO(O_2)_2(pic)^{2-}$, $VO(O_2)(nta)^{2-}$, and $VO(O_2)(dipic)^-$ with thiolato-cobalt(III), $(en)_2Co(SCH_2CH_2NH_2)^{2+}$ resulted in an oxygen-atom transfer in aqueous solutions. Rate constants ($M^{-1}S^{-1}$) for these reactions were (35$\pm$1), $(4.8{\pm}0.4){\times}10^{-2}$ , and $(8.6{\pm}0.5){\times}10^{-4}$, respectively. The coordinate peroxide was activated in the oxygen-atom-transfer reaction of $VO(O_2)_2(pic)^{2-}$, but it is not the case for VO(O$_2$) $(nta)^{2-}$ and VO(O$_2$) $(dipic)^-$. In this paper, we proposed that the direct attack of an electrophilic peroxide to a nucleophilic substrate occurs in the oxygen-atom transfer pathway of peroxo vanadium(V) complexes.

• Journal of the Korean Chemical Society
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• v.40 no.12
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• pp.733-740
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• 1996

The rate constants for the hydrolysis of 4'-[N-(9-acridinyl)]-1'-(N-methanesulfonyl)-3'-methoxyquinonediimide(AMQD) were determined by ultraviolet visible spectrophotometer in water at $25^{\circ}C.$ The rate equation which could be applied over wide pH ranges were obtained. On the basis of pH-rate profile, Bronsted plot, hydrolysis product analysis, general base catalysis and substituent effect, the plausible hydrolysis mechanism was proposed: Below pH 3.00, the hydrolysis reaction was proceeded by the attack of water to 4'-position of quinonoid after protonation at nitrogen of acridinyl and between pH 3.00 and 9.00, the addition of water and hydroxide occurred competitively. However, above pH 9.00, the rate constants were dependent upon only the concentration of hydroxide ion.

• Journal of the Korean Chemical Society
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• v.41 no.2
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• pp.69-76
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• 1997

Kinetic studies for the nucleophilic substitution reactions of the benzoic anhydrides with anilines in methanol-acetonitrile mixtures at$35.0{\circ}C$have been carried out in order to elucidate the reaction mechanism. Individual rate constants$k_{XY}$and$k_{XZ}$were decided from the ratios of the reaction products for the competitive substitution reaction at either one of the two carbonyl carbons in benzoic anhydride. Transition state structure and reaction mechanism were elucidated by the Hammett$p_x,\;p_y$and$p_z$values and cross interaction constant$p_x\;p_y$and$p_zvalues. The reaction of the benzoic anhydride has been proposed to proceed by a frontside attack$S_N2 $mechanism with four-membered ring transition state from unusually large magnitude of the$ρ_X,\;ρ_{XY},\;ρ_{XZ}$and positive$p_Y$values.