• 제어로봇시스템학회:학술대회논문집
• /
• 2005.06a
• /
• pp.1309-1312
• /
• 2005

A multi-chemical supply system is developed and applied to a wet station, which uses the multi-chemical process in one bath. To control the concentration of two chemicals, control logic of a supply pump is programmed using the programable logic controller (PLC). By using the multi-chemical supply system, wet station with single bath is applied to cleaning process using multi chemicals such as buffed oxide etchant (BOE) and standard clean 1 (SC-1). The concentration of each chemical is measured in the bath to verify the multi-chemical supply system. The control range in the each chemical concentration is measured to 1.33weight% in NH4OH and 0.23weight% in H2O2. The multi-chemical supply system can be movable and usable as an independent module of fixed wet station. By simply midifying the PLC, a multi-chemical supply system can be developed for a wet station.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2004.05a
• /
• pp.123-128
• /
• 2004

Semiconductor Wet Station has a very important place in semiconductor process. It is important that to discharge chemical with fit concentration and temperature using chemical supply system for clean process. The chemical supply system which is used currently is not only difficult to make a fit mixing rate of chemical which is need in clean process, but also difficult to make fit concentration and temperature. Moreover, it has high stability but it is inefficient spatially because its volume is great. We propose In-line System to improve system with implement analysis of fluid and thermal transfer on chemical supply system and understand problem of system.

• Proceedings of the Korean Institute of Intelligent Systems Conference
• /
• 2004.10a
• /
• pp.67-70
• /
• 2004

Semiconductor Wet Station has a very important place in semiconductor process. It is important that to discharge chemical with fit concentration and temperature using chemical supply system for clean process. The chemical supply system which is used currently is not only difficult to make a fit mixing rate of chemical which is need in clean' process, but also difficult to make fit concentration and temperature. Moreover, it has high stability but it is inefficient spatially because its volume is great. We propose In-line System to improve system with implement analysis of fluid and thermal transfer on chemical supply system and understand problem of system.

• Transactions of the Korean hydrogen and new energy society
• /
• v.34 no.2
• /
• pp.212-225
• /
• 2023

This study presents a modularized process of a hybrid renewable energy system that combines photovoltaic power and wind power to supply stable power in a unit area (1 km²). The water electrolysis process and fuel cells process also contributes to the supply of the stable power. The entire system can constantly supply power of 4.39 MW/km². Actual meteorological data is used for simulation.

• Korean Journal of Chemical Engineering
• /
• v.36 no.1
• /
• pp.12-20
• /
• 2019

An energy storage system consisting of a battery and a power-to-methanol (PtM) unit was investigated to develop an energy storage system for renewable energy systems. A nonlinear programming model was established to optimize the energy storage system. The optimal installation capacities of the battery and power-to-methanol units were determined to minimize the cost of the energy system. The cost from a renewable energy system was assessed for four configurations, with or without energy storage units, of the battery and the power-to-methanol unit. The proposed model was applied to the modified electricity supply and demand based on published data. The results show that value-adding units, such as PtM, need be included to build a stable renewable energy system. This work will significantly contribute to the advancement of electricity supply and demand management and to the establishment of a nationwide policy for renewable energy storage.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2005.05a
• /
• pp.157-162
• /
• 2005

The wafer's size has been increased up to 300mm according as the devices have been integrated sophisticatedly. For this process to make 300mm-wafer, it is required strict level which removes the particulates on the surface of wafer. Therefore we need new type wet-station which can reduce DI water and chemical in the cleaning process. Moreover, it is very important to control the temperature and the concentration of chemical wet-stat ion. The chemical supply system which is used currently is not only difficult to make a fit mixing rate of chemical in cleaning process, but also it is difficult to make fit quantity and temperature. We propose new chemical supply system, which overcomes the problems via analysis of fluid and thermal transfer on chemical supply system,

• Journal of the Semiconductor & Display Technology
• /
• v.4 no.3 s.12
• /
• pp.29-33
• /
• 2005

As the integrated devices become more and more sophistcated, the diameter of wafers increased up to 300 mm and strict level of cleaning is necessary to remove the particulates on the surface of wafer. Therefore we need a new type of wet-station which can reduce DI water and chemical in the cleaning process. Moreover, it is important to control the temperature and the concentration of chemical in the wet-station. In the conventional chemical supply system, it is difficult not only to fit the mixing rate of chemicals in cleaning process, but also to fit the quantity and temperature. Thus, we propose a new chemicals supply system, which overcomes above problems by the analysis of fluid and thermal transfer on chemical supply system.

• Environmental Engineering Research
• /
• v.12 no.5
• /
• pp.238-243
• /
• 2007

The Fenton reaction, which refers to the reaction between ferrous ions and hydrogen peroxide to produce the OH radical, has not been widely applied to the disinfection of microorganisms despite being economic and environmentally friendly. Cho et al. have previously proposed the neutral photo ferrioxalate system as a solution to the problems posed by the Fenton reaction in acidic conditions, but this system still requires an external hydrogen peroxide supply. In the present study, we developed a simple disinfection technology using the photo or solar ferrioxalate reaction without the need for an external hydrogen peroxide supply. E. coli was employed as the indicating microorganism. The study results demonstrated the effectiveness of the photo ferrioxalate system in inactivating E. coli without any external hydrogen peroxide supply, as long as dissolved oxygen is supplied. Furthermore, the solar ferrioxalate system achieved faster inactivation of E. coli than an artificial light source at similar irradiance.

• Transactions of the Korean hydrogen and new energy society
• /
• v.25 no.1
• /
• pp.72-78
• /
• 2014

The study has been designed to develop water vapor supply for semiconductor industry, industrial gas manufacturing, impurities analysis, and fuel cell. Water concentration in air reached $1019{\mu}mol/mol$ at dew temp ($-20^{\circ}C$) and water concentration in CO2 reached $127{\mu}mol/mol$ at dew temp ($-40^{\circ}C$. Carbon dioxide needs more wet gas than air because interaction potential of carbon dioxide shows more strong attraction than air.

• Korean Chemical Engineering Research
• /
• v.53 no.2
• /
• pp.164-173
• /
• 2015

This study aims to design energy supply systems from various energy sources for transportation sectors and comparatively analyze the life cycle cost of different scenario-based systems. For components of the proposed energy supply system, we consider a typical oil refinery, byproduct hydrogen system, renewable energy source (RES)-based electric generation system and existing electricity grid. We also include three types of vehicles in transportation sector such as internal combustion engine vehicle (ICEV), electric vehicle (EV), fuel cell vehicle (FCV). We then develop various energy supply scenarios which consist of such components and evaluate the economic performance of different systems from the viewpoint of life cycle cost. Finally we illustrate the applicability of the proposed framework by conducting the design problem of energy supply systems of Jeju, Korea. As the results of life cycle cost analysis, EV fueled by electricity from grid is the most economically feasible. In addition, we identify key parameters to contribute the total life cycle cost such as fuel cost, vehicle cost, infra cost and maintenance cost using sensitivity analysis.