• Journal of the Semiconductor & Display Technology
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• v.16 no.3
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• pp.1-7
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• 2017

Multi-wafer planetary type chemical vapor deposition reactors are widely used in thin film growth and suitable for large scale production because of the high degree of growth rate uniformity and process reproducibility. In this study, a two-dimensional model for estimating the effect of the gap between satellite and wafer on the wafer surface temperature distribution is developed and analyzed using computational fluid dynamics technique. The simulation results are compared with the results obtained from an analytical method. The simulation results show that a drop in the temperature is noticed in the center of the wafer, the temperature difference between the center and wafer edges is about $5{\sim}7^{\circ}C$ for all different ranges of the gap, and the temperature of the wafer surface decreases when the size of the gap increases. The simulation results show a good agreement with the analytical ones which is based on one-dimensional heat conduction model.

• Applied Chemistry for Engineering
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• v.22 no.3
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• pp.261-265
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• 2011

The sterilization effects of atmospheric pressure plasma with the mixture of argon and oxygen were analyzed. The plasma reactor with the shape of dielectric barrier discharge produced the uniform distribution of glow discharge and generated ozone gas effectively according to the various process parameters. The sterilization for E. coli was affected by power, oxygen ratio in the mixture gas, treatment time and distance between reactor and sample. The concentration of ozone was a major source for the sterilization of E. coli, which was enhanced by the increase of power and oxygen ratio. In this study, the effect of atmospheric pressure plasma treatment for the sterilization was confirmed and its result can deliver the atmospheric pressure plasma treatment as the novel sterilization method instead of conventional methods.

• Bulletin of the Korean Chemical Society
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• v.6 no.4
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• pp.196-202
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• 1985

A Very Low Pressure Reactor (VLPR) is constructed for the kinetic study of atom-molecule bimolecular elementary reactions. The basic principles and the versatility of the method are described. By using the VLPR technique the forward (k1) and the reverse (k-1) rate constants for Br atom reaction with trimethylsilane are studied; Br + $(CH_3)_3$SiH k1 ${\leftrightarrow}$ k-1 HBr + $(CH_3)_3$Si. From the kinetic data and the entropy estimation the bond dissociation energy for Si-H bond in trimethylsilane is calculated to be 90.1 kcal/mole $({\pm}1.1$ kcal/mole). The Arrhenius parameters for k1 are found to be log A = 10.6 l/mole·sec, $E_a$ = 4.4 kcal/mole respectively. For the comparison purpose analogous reaction for carbon compound ; Br + $(CH_3)_3$CH ${\rightarrow}$ HBr + $(CH_3)_3$C was also studied. The corresponding rate constant and equilibrium constant at $25^{\circ}C$ are found to be 2.67 ${\times}$ $10^6l$/mole${\cdot}$sec and 160 respectively.

• Korean Chemical Engineering Research
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• v.45 no.6
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• pp.656-662
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• 2007

Fuel reformer using plasma and shift reactor for CO oxidation were designed and manufactured as $H_2$ supply device to operate a polymer electrolyte membrane fuel cell (PEMFC). $H_2$ selectivity was increased by non-thermal plasma reformer using GlidArc discharge with Ni catalyst simultaneously. Shift reactor was consisted of steam generator, low temperature shifter, high temperature shifter and preferential oxidation reactor. Parametric screening studies of fuel reformer were conducted, in which there were the variations of the catalyst temperature, gas component ratio, total gas ratio and input power. and parametric screening studies of shift reactor were conducted, in which there were the variations of the air flow rate, stema flow rate and temperature. When the $O_2/C$ ratio was 0.64, total gas flow rate was 14.2 l/min, catalytic reactor temperature was $672^{\circ}C$ and input power 1.1 kJ/L, the production of $H_2$ was maximized 41.1%. And $CH_4$ conversion rate, $H_2$ yield and reformer energy density were 88.7%, 54% and 35.2% respectively. When the $O_2/C$ ratio was 0.3 in the PrOx reactor, steam flow ratio was 2.8 in the HTS, and temperature were 475, 314, 260, $235^{\circ}C$ in the HTS, LTS, PrOx, the conversion of CO was optimized conditions of shift reactor using simulated reformate gas. Preheat time of the reactor using plasma was 30 min, component of reformed gas from shift reactor were $H_2$ 38%, CO<10 ppm, $N_2$ 36%, $CO_2$ 21% and $CH_4$ 4%.

• Korean Chemical Engineering Research
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• v.57 no.3
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• pp.420-424
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• 2019

In SNG (synthetic natural gas) process by proposed RIST(Research Institute of Industrial Science & Technology)-IAE(Institute for Advanced Engineering) (including three adiabatic reactors and one isothermal reactor), the methanation reaction and water gas shift (WGS) reaction take place simultaneously, and the supply of steam with syngas might control the temperature in catalyst bed and deactivate the catalyst. In this study for development of SNG process, the characteristics of the methanation reaction with a Ni-based catalyst by prepared RIST and using a low $H_2/CO$ mole ratio (including $CO_2$ 22%) are evaluated. The operating conditions ($H_2O/CO$ ratio of the $1^{st}$ adiabatic reactor, operating temperature range of $4^{th}$ isothermal reactor, etc.) were reflected the results from previous studies and in the same condition a pilot scale SNG process is carried out. As a results, the pilot scale SNG process is stable and the CO conversion and $CH_4$ selectivity are 100% and 96.9%, respectively, while the maximum $CH_4$ productivity is $660ml/g_{cat}{\cdot}h$.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1870-1873
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• 2004

The objective of this study is to investigate the possibility of chemical process synthesis purely based on mathematical programming when given an objective, feed conditions, product specifications, and model equations for available process units. A method based on a state space approach is proposed, and applied to an example problem with a reactor, a heat exchanger, and a separator. The results indicate that a computer can automatically synthesize an optimal process without any heuristics or expertise in process design provided that global optimization techniques are improved to be suitable for large problems.

• Korean Chemical Engineering Research
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• v.56 no.3
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• pp.416-420
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• 2018

A comprehensive kinetic study has been conducted on dimethyl carbonate synthesis by transesterification reaction of ethylene carbonate with methanol. An alkali base metal (KOH) was used as catalyst in the synthesis of DMC, and its catalytic ability was investigated in terms of kinetics. The experiment was performed in a batch reactor at atmospheric pressure. The reaction orders, the activation energy and the rate constants were determined for both forward and backward reactions. The reaction order for forward and backward reactions was 0.87 and 2.15, and the activation energy was 12.73 and 29.28 kJ/mol, respectively. Using the general factor analysis in the design of experiments, we analyzed the main effects and interactions according to the MeOH/EC, reaction temperature and KOH concentration. DMC yield with various reaction conditions was presented for all ranges using surface and contour plot. Furthermore, the optimal conditions for DMC yield were determined using response surface method.

• 제어로봇시스템학회:학술대회논문집
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• 1999.10a
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• pp.248-251
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• 1999

The optimal reaction conditions are determined for a PET process, which consists of transesteriflcation, prepolymerization and polycondensation reactors in series. Based on the simulation results of the reactor system, we scrutinize the cause and effect between the reaction conditions and the final properties of the polymer product. We then select the process variables with significant influence on the properties of polymer as control variables and calculate the optimal reaction conditions by iterative dynamic programming (IDP) algorithm with constraints. A new reaction scheme incorporating reactions for by-products as well as three main reactions is considered in the constrained IDP method.

• Transactions of the Korean hydrogen and new energy society
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• v.28 no.5
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• pp.453-458
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• 2017

A study on the modeling of the methane Chemical Looping Reforming system was carried out. It is aimed to predict the temperature and concentration behavior of the product through modeling of oxygen carrier fixed bed reactors composed of multiple stacks. In order to design the reaction system, first of all, the flow rate of the hydrogen to be produced was calculated. The flow rate ratio of the oxidation/reduction reactor was calculated considering the heat of reaction between adjacent reactors. Finally, in this paper, kinetic model including empirical coefficients was suggested.

• Nuclear Engineering and Technology
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• v.29 no.1
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• pp.58-67
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• 1997

A numerical study has been peformed to investigate the flow and mixing characteristics of a chemical injection tank in the chemical and volume control system (CVCS) of Yonggwang 5&6 (YGN 5&6). This study was undertaken to provide a basis for modification of the previous design (YGN 3&4) which gave a lot of difficulties in installation and operation of the chemical injection system during the start-up test because it needs a special reciprocating pump with a high actual head. For the tank of length-to-diameter ratios (L/D) of 1,2 and 3, each with and without a baffle inside, calculation results were obtained by solving the unsteady laminar two-dimensional elliptic forms of governing equations for the mass, momentum and species concentration. Finite-difference method was used to obtain discretized equations, and the SIMPLER solution algorithm, which was developed based on the staggered grid control volume, was employed for the calculation procedure. Results showed that the baffle is very effective in enhancing the mixing in the tank and that a baffle should be installed near the tank entrance in order to 110 chemicals into the reactor coolant system (RCS) within the operating time required.