• Korea-Australia Rheology Journal
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• 제14권2호
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• pp.63-70
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• 2002

Chemical mechanical planarization (CMP) is the polishing process enabled by both chemical and mechanical actions. CMP is used in the fabrication process of the integrated circuits to achieve adequate planarity necessary for stringent photolithography depth of focus requirements. And recently copper is preferred in the metallization process because of its low resistivity. We have studied the effects of chemical reaction on the polishing rate and surface planarity in copper CMP by means of numerical simulation solving Navier-Stokes equation and copper diffusion equation. We have performed pore-scale simulation and integrated the results over all the pores underneath the wafer surface to calculate the macroscopic material removal rate. The mechanical abrasion effect was not included in our study and we concentrated our focus on the transport phenomena occurring in a single pore. We have observed the effects of several parameters such as concentration of chemical additives, relative velocity of the wafer, slurry film thickness or ash)tract ratio of the pore on the copper removal rate and the surface planarity. We observed that when the chemical reaction was rate-limiting step, the results of simulation matched well with the experimental data.

• Bulletin of the Korean Chemical Society
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• 제35권2호
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• pp.477-482
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• 2014

We immobilized Thermomyces lanuginosus lipase to catalyze transesterification reaction in DMF. This lipase was selected after screening among other commercial lipases. We found that prepared immobilized lipase is particularly useful for preparation of 6-O-acylsucrose with higher conversion rate even in 10 g scale. Several solvents were evaluated for selective transesterification reaction. We noticed that the immobilized lipase retained more than 80 % activity after 5 cycles of 96 h reaction. A general method was also developed to purify the products using simple crystallization and precipitation process. Furthermore, 6-O-vinyladipoylsucrose was subjected to synthesis of the corresponding polymer by radical initiator. The sucrose branched polymer can be used further for evaluation of its biodegradability and other biological applications.

• Korean Chemical Engineering Research
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• 제51권1호
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• pp.58-67
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• 2013

PBT (polybutylene terephthalate)는 저흡수율, 치수 안정성, 내마모성 등 기계적 특성이 우수하며, 전기전자 부품, 자동차 부품, 각종 정밀 부품에 사용된다. DMT (dimethyl terephthalate)와 BD (1,4-butandiol)를 사용하여 PBT의 원료단량체인 BHBT (bis-hydroxybutyle terephthalate)를 생산하는 에스테르 교환 반응 반응에 대해 연구 하였다. 촉매로는 zinc acetate가 사용되었다. 기존의 연구에서는 반응 중 생성 메탄올이 제거되는 반회분식 반응기를 통한 kinetics 연구가 이루어져 역반응이 고려되지 않음에 따른 모델의 부정확함이 있었다. 본 연구에서는 회분식 반응기를 사용하고 반응 중 DMT와 메탄올 양을 정량하여 생성되는 MHBT (methyl hydroxylbutylene terephthalate)와 BHBT를 추정할 수 있도록 하고, 이 반응들에서 역반응들을 고려할 수 있도록 하여 보다 정확한 모델을 제안하였다. 다양한 반응속도 모델을 제시하였고, 이 모델들이 예측한 값들이 실험 데이터와 잘 일치함을 보였다.

• Korean Chemical Engineering Research
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• 제51권1호
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• pp.144-150
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• 2013

본 연구에서는 촉매로 zinc acetate를 사용하였고 dimethyl terephthalate(DMT)와 ethylene glycol(EG)의 에스테르 교환을 통하여 polyethylene terephthalate(PET)의 단량체인 bishydroxyethyl terephthalate(BHET)를 생성하는 반응에 대하여 알아보았다. 기존의 kinetics 연구는 에스테르 교환 반응에서 생성되는 메탄올이 반응계에서 제거되는 반회분식공정을 바탕으로 하여 이때 제거된 메탄올 양을 측정하여 역반응이 무시된 반응 kinetics 모델을 구성하였다. 본 연구에서는 회분식 반응기를 통하여 DMT와 메탄올의 양을 정량하여, 역반응을 고려한 보다 정확한 kinetics 모델을 제안하였고, 제안된 모델의 예측값들이 실험값들과 잘 일치하는 것을 보였다. 또한 모델과 실험값을 분석하여 여러 공정 변수들이 에스테르 교환 반응에 미치는 영향을 조사하였다.

• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2005년도 생물공학의 동향(XVII)
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• pp.511-516
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• 2005

Sorbitan methacrylate was synthesized from sorbitan dehydrated from D-sorbitol using an immobilized lipase. To optimize the enzymatic synthesis of sorbitan methacrylate, response surface methodology was applied to determine the effects of five-level-four-factors and their reciprocal interactions on sorbitan methacrylate biosynthesis. A total of 30 individual experiments were performed, which were designed to study reaction temperature, reaction time, enzyme amount and substrate molar ratio. A statistical model predicted that the highest conversion yield of sorbitan methacrylate was 100%, at the following optimized reaction conditions: a reaction temperature of 43.06 $^{\circ}C$, a reaction time of 164.25 mins., an enzyme amount of 7.47%, and a substrate molar ratio of 3.98:1. Using these optimal factor values under experimental conditions in four independent replicates, the average conversion yield reached 98.7%${\pm}$1.2% and was well within the value predicted by the model.

• The Korean Journal of Ceramics
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• 제6권1호
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• pp.43-46
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• 2000

$H_4Nb_6/O_{17}$/CdS nanocomposites which intercalated CdS particles, less than 0.8nm thickness, in the interlayer of $H_4Nb_6/O_{17}$ were prepared by the successive ion exchange reactions of $H_4Nb_6/O_{17}$ with $Cd^{2+}$ and $C_3H_7NH_3_+$, followed by the reaction with $H_2S$ gas. $H_4Nb_6/O_{17}$/CdS photocatalytically reduced $NO_3$￣ to $NO_2$￣ and $NH_3$in the presence of sacrificial hole acceptor such as methanol under visible light irradiation (wavelength>400nm), although unsupported CdS showed no noticeable photocatalytic activity for $NO_3$￣ reduction. The catalytic activity of $H_4Nb_6/O_{17}$/CdS greatly enhanced with co-doping of Pt particles in the interlayer.

• 한국응용과학기술학회지
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• 제12권2호
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• pp.99-105
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• 1995

Phenylvinylsulfone derivatives were synthesized by Kirners condition. The structure of these compounds were ascertained by means of ultraviolet, melting point, IR and $^1H-NMR$ spectra. The nucleophilic addtion reaction kinetics of L-cysteiene for phenylvinylsulfone was investigated by ultraviolet spectrophotometery in 40% $EtOH-H_2O$ at $25^{\circ}C$. The rate equations which were applied over a wide pH $1.0{\sim}13.0$ range. On the basis of general base catalysis and confirmation of addtion reaction product, the nucleophilic addtion reaction kinetics of L-cysteiene for phenylvinylsulfone were measured by the pH change. From the result of the above caption, a plausible nucleophilic addtion reaction mechanism of L-cysteiene for phenylvinylsulfone was proposed. These compounds may by used ad the starting materials for the preparation of the engineering plastics or the germicide.

• Korean Chemical Engineering Research
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• 제56권1호
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• pp.103-111
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• 2018

본 연구에서는 PET (Poly Ethylene Terephthalate)의 단량체인 BHET (bis (2-Hydroxyethyl) Terephthalate)와 1,4-BD(1,4-Butanediol)의에스테르교환반응을활용하여 PBT (Poly Butylene Terephthalate)의단량체인 BHBT (Bis (4-Hydroxybutyl Terephthate)를 생성하는 반응에 대하여 조사하였다. 이 반응의 촉매로 Zinc Acetate를 사용하였다. 회분식 반응기를 통하여 BHET, EG (Ethylene Glycol), THF (Tetrahydrofuran)의 양을 정량하여 반응 kinetics 모델을 구성하였다. 제시된 모델을 통하여 반응속도와 반응물의 조성 분포를 조사하였고, 이 모델의 예측 값과 실험 값들이 잘 일치함을 보였다.

• 한국응용과학기술학회지
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• 제13권1호
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• pp.107-113
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• 1996

Fluorenylidene chalcone derivatives were synthesized by condensation. The structure of these compounds were ascertained by means of UV, melting point, IR and $^1H-NMR$ spectra. The nucleophilic addition reaction kinetics of Thioglycolic acid to fluorenylidene chalcone was investigate by UV in 20% $dioxane-H_2O$ at $25^{\circ}C$. The rate equation which were applied over a wide $pH1.0{\sim}13.0$ range. On the basis of general base catalysis and confirmation of addition reaction product, the nucleophilic addtion reaction kinetics of thioglycolic acid to fluorenylidene chalcone were measured by the pH change. From the result of the above caption, a plausible nucleophilic addition reaction mechanism of thioglycolic acid to fluorenylidene chalcone was proposed. These compounds may be used as the starting materials for the preparation of the engineering plastics or the germicide.

• Korean Chemical Engineering Research
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• 제43권1호
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• pp.125-128
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• 2005

폴리스티렌의 열분해반응에서 분해반응속도 및 생성되는 오일 중에 함유된 스틸렌모노머와 부산물로 얻어지는 에틸벤젠, 알파메틸스티렌, 다이머, 트라이머 등은 반응온도 및 반응시간 등의 여러 가지 변수들에 의해 영향을 받았으며, 특히 반응시간에 따라 반응성 및 스티렌의 수율은 많은 차이를 보였다. 이 결과는 열분해 반응과정에서 생성되는 유기성 잔류물과 고화탄소의 영향 때문에 기인하였다. 연속열분해시간의 진행과 함께 생성되는 오일의 수율이 저하되었으며 오일에 함유되어 있는 스티렌의 선택도는 감소하였으며 부산물인 알파메틸스티렌, 에틸벤젠, 벤젠, 톨루엔 등의 부산물의 생성은 증가하였다. 본 연구결과로부터 새로운 연속반응을 위한 열분해반응기를 사용하였다.