Nano-scale high-accuracy displacement measurement using the Michelson laser interferometer controlled with a feedback circuit (되먹임 회로로 제어하는 Michelson 레이저 간섭계를 이용한 Nano-scale 미세변위 측정)
-
- Journal of the Korea Academia-Industrial cooperation Society
- /
- v.8 no.5
- /
- pp.1007-1012
- /
- 2007