• Journal of the Korean Ceramic Society
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• v.37 no.8
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• pp.817-823
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• 2000

A solid-state electrochemicall cell for sensing CO2 gas was fabricated using a solid electrolyte of Li2CO3-Li3PO4-Al2O3 mixture and a reference electrode of LiMn2O4. The e.m.f. (electromotive force) of sensor showed a good accordance with theoretical Nernst slope (n=2) for CO2 gas concentration range of 100-10000 ppm above 35$0^{\circ}C$. The e.m.f. of sensor was constant regardless of oxygen partial pressure at the high temperature above 0.1 atm. It was, however, a little depended on oxygen partial pressure as the pressure decreased below 0.1 atm. The oxygen-dependency of our sensor gradually disappeared as the operating temperature increased. The sensing behavior of our CO2 sensor was affected by the presence of water vapor, but its effect was small comparing with other sensors.

• Journal of Sensor Science and Technology
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• v.12 no.5
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• pp.199-204
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• 2003

This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097-1.21\;mV/V{\codt}kgf/cm^2$ in the temperature range of $25-200^{\circ}C$ and the maximum non-linearity is 0.43%FS.

• Journal of Sensor Science and Technology
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• v.24 no.3
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• pp.208-213
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• 2015

The purpose of this study is to optimize the design of a capacitive pressure sensor element using the simulation of electrical characteristics. The simulation of the ceramic sensor diaphragm ($Al_2O_3$) was performed by permitting pressure to change the curvature of the diaphragm. The pressure capacitance ($C_P$) was increased from 19.63 pF to 15.26 pF by applying pressure because the distance between the electrodes has been changed from $30{\mu}m$ to $15{\mu}m$. When the thickness of the diaphragm was changed to 0.46~0.52 mm, a larger capacitance change showed in accordance with the reduced thickness, which means an increase of sensitivity. However, considering the viewpoint of the signal linearity, it was selected for the optimum thickness of the diaphragm to 0.50 mm. The designed sensor element based on simulated results was tested to measure the output characteristics. Comparing of simulated and measured results, there was a margin of error of approximately 2%.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.59-63
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• 2002

This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

• Ceramist
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• v.22 no.1
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• pp.4-16
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• 2019

Recently, wearable sensors have received considerable attention in a variety of research fields and industries as the importance of wearable healthcare systems, soft robotics and bio-integrated devices increased. However, expensive and complex processes are hindering the commercialization of wearable sensors. Nanoparticle presents some of solutions to these problems as its adjustable for processability and tunable properties. In this paper, the recent development of nanoparticle based pressure and strain sensors was reviewed, and a discussion on their strategies to overcome the conventional limitation and operating principles is presented.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1529-1531
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• 2003

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, piezocapastive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. The screen printing technique has been used to fabricate the pressure sensors on alumina substrate($Al_2O_3$). Thick film capacitive of strain sensing characteristics are reported and dielectric paste based on (Ti+Ba) materials. The electric property of dielectric paste has been studied and exhibit good properly with good gage factor comparable to piezoresistive strain gage. New piezocapacitive strain sensor was designed and tested. The output of capacitive value was good characteristics.

• Journal of the Korean Society of Propulsion Engineers
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• v.13 no.4
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• pp.55-62
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• 2009

Fracture behavior of ceramic dome port cover on air breathing engine using liquid and solid fuel propulsion system was carried out in this study. Fracture characteristics was tested and estimated using scaled model of ceramic dome port cover by Shock tube. Fracture behavior was obtained by the fracture pressure from pressure sensor and observed the scattering phenomena of fracture specimen using high speed camera. Results obtained from this study can be used in the base data of dome port cover design for an air breathing engine.

• Journal of Sensor Science and Technology
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• v.29 no.1
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• pp.63-67
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• 2020

This study investigated the influence of various sintering pressures of ZnS nanoparticles prepared by hydrothermal synthesis performed at 220 ℃ for 20 h. The hydrothermally synthesized ZnS nanoparticles formed a cubic phase. The ZnS nanoparticles were sintered using a hot-press process at 850 ℃ for 2 h under pressures of 10, 20, 30, 40, 50, 60, and 70 MPa. The ZnS ceramics indicate the cubic phase is the major phase and the hexagonal phase is the minor phase. In the ZnS ceramics, as the sintering pressure increased, a decrement in the hexagonal phase was confirmed. When the sintering pressure equaled or exceeded 30 MPa, the transmittance and density improved with reductions in porosity and hexagonal phase. A sintering pressure of 60 MPa delivered the highest transmittance (69.7%).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.387-391
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• 2004

[ $(Bi_{1/2}Na_{1/2})TiO_3$ ](BNT) is considered to be an excellent candidate for the key material of lead-free piezoelectric ceramic due to properties of strong ferroelectricity with a relatively large remanent polarization $Pr=38{\mu}C/cm^2$, and a large coercive field, Ec=73KV/cm. In this study, electrical properties of pressure sensor using a $0.96Bi_{0.5}(Na_{0.84}K_{0.16})_{0.5}TiO_3+0.04SrTiO_3+0.2wt%La_2O_3$ ceramics are investigated. Resonant frequency of pressure sensor was decreased with increasing pressure. However, its anti-resonant frequency was increased with increasing pressure.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1655-1657
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• 2000

본 논문에서는 세라믹 다이어프램식 압력센서를 설계하기 전에 세라믹 다이어프램의 변위에 대한 최적 조건을 확립하기 위해 세라믹의 기계적 특성, 다이어프램의 두께와 직경 등을 변화시키면서 중심부와 변곡점 부근에서 압력에 대한 다이어프램의 변위를 시뮬레이션 하였다.