• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.

• 센서학회지
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• 제15권1호
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 한국재료학회지
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• 제17권5호
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• pp.289-292
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• 2007

Although piezoelectric bimorph that is using as the sensor in medical and industrial measurement has large displacement, it has problems including efficiency in generating force, energy convergence, and response. Its application is being limited based on the change in resonance frequency with temperature. In this study, to overcome the disadvantages, PZT piezoelectric ceramics was prepared and produced a parallel type piezoelectric bimorphs. In addition, by using the finite element method. the configuration of piezoelectric bimorph was designed and the displacement of the bimorph based on applied electric pressure and the wave pattern were measured. By analyzing the resonance characteristics of the bimorph in the temperature range of $-60{\sim}80^{\circ}C$, an attempt was made to study the operational characteristics and temperature reliability of vortex flowmeter sensor. As a result, the resonance frequency of the bimorph was gradually increased with the temperature from $-60{\sim}80^{\circ}C$. The deflection of the bimorph was found to strongly depend on both the applied electric field waveform and the environmental temperature.

• The Korean Journal of Ceramics
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• 제4권2호
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• pp.103-113
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• 1998

By using a gas-tight electrochemical cell, we can perform high-temperature coulometric titration and measure electronic transport properties to determine the elecronic defect structure of metal oxides. This technique reduces the time and expense required for conventional thermogravimetric measurements. The components of the gas-tight coulometric titration cell are an oxygen sensor, Pt/yttria stabilitized zirconia(YSZ)/Pt, and an encapsulated metal oxide sample. Based on cell design, both transport and thermodynamic measurements can be performed over a wide range of oxygen partial pressure ($pO_2=10^{-35}$ to 1 atm). This paper describes the high-temperature gas-tight electrochemical cells used to determine electronic defect structures and transport properties for pure and doped-oxide systems, such as YSZ, doped and pure ceria $(Ca-CeO_2 \;and\; CeO_2)$, copper oxides and copper-oxide-based ceramic superconductors, transition metal oxides, $SrFeCo_{0.5}O_x,\; and \;BaTiO_2$.

• 한국재료학회지
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• 제32권11호
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• pp.508-514
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• 2022

Piezoelectric composite films which are enabled by inorganic piezoelectric nanomaterials-embedded polymer, have attracted enormous attention as a sustainable power source for low powered electronics, because of their ease of fabrication and flexible nature. However, the absorption of applied stress by the soft polymeric matrices is a major issue that must be solved to expand the fields of piezoelectric composite applications. Herein, a flexible and porous piezoelectric composite (piezoelectric sponge) comprised of BaTiO₃ nanoparticles and polydimethylsiloxane was developed using template method to enhance the energy conversion efficiency by minimizing the stress that vanishes into the polymer matrix. In the porous structure, effective stress transfer can occur between the piezoelectric active materials in compression mode due to direct contact between the ceramic particles embedded in the pore-polymer interface. The piezoelectric sponge with 30 wt% of BaTiO₃ particles generated an open-circuit voltage of ~12 V and a short-circuit current of ~150 nA. A finite element method-based simulation was conducted to theoretically back up that the piezoelectric output performance was effectively improved by introducing the sponge structure. Furthermore, to demonstrate the feasibility of pressure detecting applications using the BaTiO₃ particles-embedded piezoelectric sponge, the composite was arranged in a 3 × 3 array and integrated into a single pressure sensor. The fabricated sensor array successfully detected the shape of the applied pressure. This work can provide a cost-effective, biocompatible, and structural strategy for realizing piezoelectric composite-based energy harvesters and self-powered sensors with improved energy conversion efficiency.

• 센서학회지
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• 제15권1호
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• pp.53-57
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar. Optimum pyrolysis and annealing conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excellent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition. These fabricated SiCN ceramic microstructures have greater electric and physical characteristics than bulk Si wafer. The fabricated SiCN microstructures would be applied for supertemperature MEMS applications such as heat exchanger and combustion chamber.

• 센서학회지
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• 제19권2호
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• pp.149-154
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• 2010

Top of the alumina body which is made according to plan has been printed using a screen printer equipment in order to print an electrode pattern. The electrode is connected with the quartz crystal oscillator of the piezoelectricity method which has a piezoelectric characteristic. The pressure contact department has been experimented using three type of the teflon. The teflon is good for pressure delivery vector but it is bad restitution. So we devised the structure which inserts the metal in the teflon. Bottom of the module is connected with the signal processing department which is planned in advance and then has investigated to characteristic. Therefore we have got the best output-voltage and frequency characteristic follows in the pressure.

• 센서학회지
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• 제30권3호
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• pp.148-153
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• 2021

During the manufacture of a ZnS lens with excellent transmittance in the mid-infrared region (3-5 ㎛) by the hot-press process, a single-layer sintering method is used in which one lens is manufactured in one process. Additional research is required to improve this single-layer sintering method because of its low manufacturing efficiency. To solve this problem, the variation in optical properties of ZnS lenses with change in sintering temperature was investigated by introducing a Stack sintering method that can sinter multiple lenses simultaneously. A carbon paper was placed between the molded lenses and sintered into five layers. The average permeability of 67% at medium infrared wavelengths of 3-5 ㎛ was excellent under the following sintering conditions: pressure of 50 MPa and temperature of 850℃. This value is 1% less than the average permeability in the case of single-layer sintering of the ZnS lens. It was confirmed that the stack sintering method developed in this study can be used to manufacture a large number of lenses with excellent characteristics in a single process.

• 한국세라믹학회지
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• 제16권4호
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• pp.213-224
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• 1979

The present work was undertaken: (1) to determine if CaO-partially stabilized $ZrO_2$ prepared by Hot Petroleum Drying Method would show better ionic conductor as an oxygen sensor in molten metals than that prepared by Oxide Wet Mixing Method and than CaO-fully stabilized $ZrO_2$, and (2) to understand the nature of conduction mechanism of CaO-partially stabilized $ZrO_2$ by a comparison of measured electrical conductivity data with theory on defect structure of pure monoclinic $ZrO_2$ and fully stabilized cubic $ZrO_2$. The DC electrical conductivity was measured by 3-probe technique and the AC electrical conductivity by 2-probe technique as a function of temperature in the range 973-1373 K and oxygen partial pressure in the range 10-1-10-25Mpa. The results of the experiments were as follows: 1. CaO-partially stabilized $ZrO_2$ prepared by Hot petroleum Drying Method showed at T=1094-1285 K and $Po_2$=10-7-10-25 MPa a nearly ionic conduction with 4 times higher conductivity than that prepared by Oxide Wet Mixing Method. 2. High-oxygen pressure conductivity tends toward a Po_2^{+1/5}-Po_2^{+1/6}$dependence. An analysis of possible defect structures suggests that CaO-partially stabilized $ZrO_2$ has an anti-Frenkel defect in which singly or doubly ionized oxygen interstitials and defect electrons predominate at T=1094-1285 K and $Po_2$=10-1-10-7MPa. 3. The activation energy for pure electron hole-conduction and ionic conduction of CaO-partially stabilized $ZrO_2$ was found to be 130 KJ/mol at T=973-1373 K, $Po_2$=2, 127 10-2 MPa(air) and 153KJ/mol at T=1094-1285 K respectively.