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Fabrication and characteristic of metal insertedteflon diaphragm piezoeletric device module using quartz crystal oscillator

수정진동자를 이용한 메탈 삽입 테프론 다이어프램 압전소자모듈의제조 및 특성

  • Received : 2009.12.21
  • Accepted : 2010.03.23
  • Published : 2010.03.31

Abstract

Top of the alumina body which is made according to plan has been printed using a screen printer equipment in order to print an electrode pattern. The electrode is connected with the quartz crystal oscillator of the piezoelectricity method which has a piezoelectric characteristic. The pressure contact department has been experimented using three type of the teflon. The teflon is good for pressure delivery vector but it is bad restitution. So we devised the structure which inserts the metal in the teflon. Bottom of the module is connected with the signal processing department which is planned in advance and then has investigated to characteristic. Therefore we have got the best output-voltage and frequency characteristic follows in the pressure.

Keywords

References

  1. 서용권, 김영한, "수정진동자를 사용한 점탄성 유체의 점성계수와 전단 탄성계수 측정에 관한 이론 해석", 대한기계학회논문집 B권, 제32권, 제7호, pp. 487-496, 2008.
  2. Rodriguez-Pardo, J. Farina, C. Gabrielli, H. Perrot, and R. Brendel, "Resolution in quartz crystal oscillator circuits for high sensitivity microbalance sensors in damping media", Sensors and Actuators B: Chemical, vol. 103, Issues 1-2, pp. 318-324, 2004. https://doi.org/10.1016/j.snb.2004.04.060
  3. G. Sauerbrey, "Verwendung von schwinqua rzen zur wagung dunner schichten und zur mikrowagung", Z. Phys., vol. 155, no. 206, 1959.
  4. V.E. Granstaff and S.J Martin, "Characterization of a thickness-shear mode quartz resonator with multiple nonpiezoelectric layers", J. Appl. Phys., vol. 75, no. 3, pp. 1319-1329, 1994. https://doi.org/10.1063/1.356410
  5. R. E. Trease and R. L. Dietz, "Rheology of pastes in thick-film printing", Solid State Technology, 1972.
  6. L. F. Miller, "Screenability and rheology", Solid State Technology, 1974.
  7. S. Egusa and N. Iwasawa, "Piezoelectric paints ; preparation and application as built-in vibration sensors of structural materials", J. Materials Science, vol. 28, no. 6, pp. 1667-1672, 1993. https://doi.org/10.1007/BF00363366
  8. 김상종, 최형욱, 백동수, 최지원, 김태송, 윤석진, 김현재, "Screen Printing법을 이용한 PMN-PZT후막 의 제조 및 특성연구", J. the Korean Institute of Electrical and Electronic Material Engineers, vol. 13, no. 11, pp. 921-925, 2000.