• Journal of the Korean Ceramic Society
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• v.39 no.9
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• pp.818-821
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• 2002

The grain boundary resistivity of a 1-mol%-$Al_2O_3$-dopedd CaO-Stabilized Zirconia(CSZ) specimen was determined by impedance spectroscopy using sub-millimeter-scale electrodes. At the initial stage of sintering, the grain-boundary resistivity of the specimen interior was observed to be higher than that of the surface. However, upon further sintering the boundary resistivity of the specimen interior became lower than that of the surface. The results were explained in terms of a redistribution of the intergranular liquid phase. The liquid phase was predicted to initially coagulate at the interior of the specimen then spread outward during sintering.

• Journal of the Korean Ceramic Society
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• v.42 no.8 s.279
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• pp.525-531
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• 2005

Tailoring the microstructure and the composition of silicon nitride ceramics can have profound effects on their properties. Here it is shown that the grain growth behavior, in particular its anisotropy, is a function of the specific additives, which allow one to tune the microstructure from one consisting of more equiaxed grains to one with very elongated grains. Recent studies are discussed that provide an understanding of the atomic level processes by which these additives influence grain shapes. Next the microstructural (and compositional) parameters are discussed that can be used to modify the thermal conductivity, as well as fracture toughness of silicon nitride ceramics. As a result of the open <0001> channels in $\beta-Si_3N_4$, the c-axis conductivity can be exceptionally high. Thus, the formation of elongated c-axis grains, particularly when aligned can result in conductivity values approaching those of AlN ceramics. In addition, the controlled formation of elongated grains can also be used to significantly enhance the fracture toughness. At the same time, both properties are shown to be affected by the composition of the densification additives. Utilizing such understanding, one will be able to tailor the ceramics to achieve the properties desired for specific applications.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.53-57
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar. Optimum pyrolysis and annealing conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excellent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition. These fabricated SiCN ceramic microstructures have greater electric and physical characteristics than bulk Si wafer. The fabricated SiCN microstructures would be applied for supertemperature MEMS applications such as heat exchanger and combustion chamber.

• Journal of the Korean Ceramic Society
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• v.50 no.6
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• pp.378-383
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• 2013

Continuous fiber-reinforced ceramic matrix composites (CFCCs) have a complex distribution of porosity, consisting of interfiber micro pores and interbundle/interply macro pores. Owing to the complex geometry of the pores and fiber architecture, it is difficult to obtain representative microstructural features throughout the specimen volume with conventional, destructive ceramographic approaches. In this study, we introduce X-ray computed microtomography (X-ray ${\mu}CT$) to nondestructively analyze the microstructures of disk shaped and tubular $SiC_f$/SiC composites fabricated by the chemical vapor infiltration (CVI) method. The disk specimen made by stacking plain-woven SiC fabrics exhibited periodic, large fluctuation of porosity in the stacking direction but much less variation of porosity perpendicular to the fabric planes. The X-ray ${\mu}CT$ evaluation of the microstructure was also effectively utilized to improve the fabrication process of the triple-layered tubular SiC composite.

• Journal of the Korean Ceramic Society
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• v.29 no.7
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• pp.558-564
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• 1992

The effect of composed phase in the hot pressed CaO-MgO-Al2O3-SiO2 glass-ceramic has been investigated through microstructure studies, thermal, physical and mechanical properties. Sintering was done in the condition at the temperature range 900~95$0^{\circ}C$ for 20~120 mins under 7.5 MPa unilateral pressure. Sintered ceramics were composed of diopside, anorthite, residual glass and the portion of each phase was dependent on the sintering temperature and the holding time: as the temperature increases, the amount of diopside increased and then the rate of increase of diopside reduced with increasing anorthite. The thermal expansion coefficient of hot pressed was reduced with increasing crystallinity of hot pressed and was in the range of 6.69~7.46$\times$10-6 K-1 below $600^{\circ}C$. The elastic constant of hot pressed increased with increasing crystallinity up to about 80%, but after that was reduced due to the change of microstructure. The flexural strength of sintered ceramics was decreased with higher temperature and holding time, while the fracture toughness of those increased. It was shown that the physical and mechanical properties of hot pressed ceramic were related to the fraction of composed sintered ceramics, similar to a particulate composite, to the crystallinity of 80% of the glass-ceramic.

• Journal of the Korean Ceramic Society
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• v.31 no.3
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• pp.321-329
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• 1994

Functionally gradient materials(FGM), which have the continuous or stepwise variation in a composition and microstructure, are being noticed as the material that solves problems caused by heterogeneous interface of coating or joining. And these materials also expect new functions occured by gradient composition itself. Therefore, to examine possibility of thermal barrier materials, TZP/Mo·FGM and TZP/Ni·FGM were fabricated by sintering method. As to the sintered specimens, sintering shrinkage, relative density and Vicker's hardness in each composition were examined. The phenomena due to the difference of sintering shrinkage velocity during sintering process and the thermal stress induced through differences of thermal expansion coefficient in FGM were discussed. And the structure changes at interface and microsturcture of FGM were investigated. As a results, the difference of shrinkage between ceramic and metal was about 14% in TZP/Mo and 7% in TZP/Ni. The relative density and hardness were considerably influenced by metal content changes. Owing to unbalance of sintering shrinkage velocity between ceramic and metal, various sintering defects were occured. To control these sintering defects and thermal stress, gradient composition of FGM should be narrow. The microstructure changes of FGM depended on the ceramic or metal volume percents and were analogous to the theoretical design.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.6
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• pp.78-84
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• 2001

In the present study, SiCSi-$Si_3 N_4$-SiC ceramic composites that contained up to 30 wt% of dispersed SiC particles were fabricat-ed cia hot-pressing with an oxynitride glass. The microstructure, the mechanical properties and the cutting performance of resulting ceramic composites were investigated. By fixing the composition as $Si_3 N_4$-20wf%SiC, the effect of sintering time on the microstructure, the mechanical properties and the cutting performance were also investigated. The longer sir-tering time is, the bigger the grain size of SiC is. The fracture toughness(-$K_k$) of the $Si_3 N_4$-SiC ceramic composites increased with the increase of gain size, while the flexural strengthh($\sigma$) decreased. For machining SCM440, the insert with 20wt%r SiC sintered for 8 hours showed the longest tool life while the insert with 20wt% SiC sintered for 12 hours showed the longest tool life for machining gray cast iron.

• Journal of the Korean Ceramic Society
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• v.41 no.2
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• pp.143-150
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• 2004

Biaxial flexure strength (ball-on-3-ball) and fracture toughness (indentation microfracture) of heat-pressable glass-ceramics for dental use were investigated in this study. Crystal phase and microstructure of glass-ceramics were analyzed by XRD. SEM, and TEM. Crack propagation in specimens was not effectively arrested by dispersed crystalline particles. However, higher degree of crystallization probably contributes to strengthening of glass-ceramics. Better clinical reliability can be expected from lithium disilicate glass-ceramic because of its significantly higher biaxial flexure strength and fracture toughness.

• The Korean Journal of Ceramics
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• v.5 no.3
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• pp.230-234
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• 1999

Ti(CN)-0.3mole% $Mo_2C$ ceramics were prepared by pressureless sintering. $Mo_2C$ dissolved in Ti(CN) more easily in a nitrogen environment than in the other environment because nitrogen forced Mo to form a solid solution, (Ti, No)(C, N). A "core-rim" structure developed within the grains. The boundary between the "core" and the rim was delineated by thermal etching in the sample with more than 2 mole% $Mo_2C$. The rim thickness and the grain size decreased as the $Mo_2C$ content increased. The hardness and the flexural strength showed maxima of 18.2 GPa and 1.23 GPa, respectively when the $Mo_2C$ content was 2 mole%. The post-sintering heat treatments improved the properties.oved the properties.

• Journal of the Korean Ceramic Society
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• v.46 no.4
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• pp.385-391
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• 2009

Need for plasma resistant ceramic materials has been continuously increased in semiconductor and display industry requiring plasma processing to realize ultra fine circuit process. Among promising candidates, alumina ceramics have still some advantages with respect to its economic aspect. In this study, fabrication of plasma resistant alumina ceramics was tried, and its processing optimization was also aimed. Careful processing control and thereby uniform microstructure of $Al_2O_3$ gave rise to enhanced plasma resistance, even comparable to market-governing commercial $Al_2O_3$. A further study is needed concerning ${\beta}-Al_2O_3$ materials system, presumably playing a decisive role in decreasing plasma resistance of $Al_2O_3$ ceramics.