• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.24-29
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• 1999

The characteristic behaviors of CH3Br were examined first for the dry etching of polysilicon in a Cl2/CH3Br/O2 plasma. CH3Br is revealed one of the excellent additive gases to control anisotropy of etching profile and to give no undercutting for various typed of polysilicons. CH3Br acts as a passivation precursor on the side wall in etch cavity by forming polymer-like films such as CHxBry(x+y=1,2). The decrease of etch selectivity due to the reaction if the C-containing species from CH3Br with the surface O atoms of SiO2 was overcome by the addition of O2 into plasma, resulting that the selectivity increased by 2~3 times. According to the results of optical emission signals, CH3Br should be dissociated into several fragments to give more hydrogen atoms than bromine atoms in our helical resonator system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.877-882
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• 2002

A new estimation model of predicting the sound absorption performance for multiple perforated plate sound absorbing system was developed using transfer matrix method. The proposed method was validated by comparing the calculated absorption coefficients of a single layer perforated plate with the values measured by the two-microphone impedance tube method far various porosity and cavity depth. The developed transfer matrix method was further applied to estimate the multiple layer perforated plates and it is shown that the estimated absorption coefficients generally agree well with the measured values.

• Nuclear Engineering and Technology
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• v.32 no.3
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• pp.254-260
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• 2000

Electron spin resonance (ESR) spectroscopy was used to detect irradiated meat containing bones (chicken, pork and beef）, to investigate the effect of irradiation dose on the ESR signal intensity and to identify the stability of radicals under 9 weeks of storage. Chicken, pork and beef were irradiated with doses 0, 1, 3, 5 and 7 kGy at room temperature using a Co-60 irradiator. Bones were pieced and dried, which were placed in a quartz tube within an Electron paramagnetic resonance (EPR) spectrometer resonator cavity. The irradiated bone presented an asymmetric absorption in shape, different from that of a non-irradiated one. The signal intensity of smaller animals are lower than larger species. Variation was observed between samples of the same species depending on the calcification status of the bone. Moreover different irradiation doses produced different signal areas that make possible to estimate the absorbed dose of treated meat. The ESR signal stability after irradiation was stable in even after a 9 week storage at room temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.4
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• pp.311-316
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• 2003

Effects of pores on the microwave properties in microwave dielectric ceramics were studied by a computer simulation. Scattering matrix S$\_$21/ obtained from the network analyzer was compared to the S$\_$21/ obtained from the simulation. From electric field distribution, the dominant resonant TE$\_$01$\delta$/ mode could be easily determined. The effects of the porosity and pore size inside the dielectrics on the microwave properties were investigated by the HFSS simulation. When the total pore volume remains constantly, the quality factor decreased as the pore size Increases. As the total pore volume of the dielectrics increased. quality factor decreased.

• Applied Science and Convergence Technology
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• v.25 no.3
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• pp.47-50
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• 2016

Low temperature test for half-wave resonator (HWR) cryomodule is performed at the superfluid helium temperature of 2 K. The effective temperature is defined for non-uniform temperature distribution. Helium leak detection techniques are introduced for cryogenic system. Experimental set up is shown to make the low temperature test for the HWR cryomodule. The cooldown procedure of the HWR cryomodule is shown from room temperature to 2 K. The cryomodules is precooled with liquid nitrogen and then liquid helium is supplied to the helium reservoirs and cavities. The pressure of cavity and chamber are monitored as a function of time. The vacuum pressure of the cryomodule is not increased at 2 K, which shows leak-tight in the superfluid helium environment. Static heat load is also measured for the cryomodule at 2.5 K.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.1
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• pp.49-60
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• 2017

In this paper, we presented the result of the study on high-power handling capability of the X-band circular waveguide cavity filter configured at the output of high power amplifier(120 W) for geostationary satellites. The dual mode circular waveguide cavity filter with 6th order is selected and the physical model of the filter is designed after determination of the size of resonator from mode chart. Multipactor margin analysis is performed by the SEM method and the VMF method. The result shows that the VMF method predicts lower multipactor breakdown thresholds than the SEM method. Evaluating the multipactor margin obtained by the VMF method to ECSS criteria, we could decide to perform multipactor test. The multipactor test conducted in ESA facility shows that multipactor did not occur even until the RF power increased up to 540 W. In consequence, by both analysis and test, we could verify that the X-band circular waveguide cavity filter has the sufficient high-power handling capability to operate on orbit.

• 한국초전도학회:학술대회논문집
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• v.10
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• pp.201-206
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• 2000

Effects of the post-annealing temperature of CeO$_2$ buffer layers on the properties of YBCO films on CeO$_2$-buffered sapphire were investigated. 45 nm-thick CeO$_2$ buffer layer was prepared in-situ on r-cut sapphire using an on-axis rf magnetron sputtering method, which was later post-annealed at temperatures between 950$^{\circ}$C and 1100$^{\circ}$C in an oxygen-flowing environment. YBCO films were prepared on CeO$_2$-buffered sapphire (CbS), for which the surface morphology, crystal structures and electrical properties of the YBCO films were studied. YBCO films on post-annealed CbS appeared to have better properties than those on as-grown CbS with regard to the morphological, structural and electrical properties when the YBCO films were prepared on CeO$_2$ buffer layer post-annealed at temperatures of 1000 - 1050$^{\circ}$C. A TE$_{011}$ mode rutileloaded cylindrical cavity resonators was fabricated with the YBCO films placed as the endplates, for which the unloaded Q of the resonator was measured. It turned out that the resonator with the endplates prepared from the YBCO films on postannealed CbS at 1000 $^{\circ}$C showed the highest unloaded Q with the value more than 8 ${\times}$ 10$^5$ at 30 K and 8.6 CHz, revealing that the YBCO films on post-annealed CbS at 1000$^{\circ}$C the temperature could be the lowest among the YBCO films on post-annealed CbS.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.5
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• pp.508-517
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• 2004

We described a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f=4.5 5GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator We developed a hybrid tip combining a reduced length of the tapered part with a small apex. In order to understand the function of the probe, we fabricated three different tips using a conventional chemical etching technique and observed three different NSMM images for patterened Cr films on glass substrates. We measured the reflection coefficient of different metal thin film samples with the same thickness of 300m and compared with theoretical impedance respectly. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal-to-noise ratio, and spatial resolution to better than $1{\mu}m$. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.20 no.3
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• pp.303-312
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• 2009

In this study, a waveguide system for focusing the electric field is presented to emit the microwave-driven plasma visible light. This system consists of a magnetron for the microwave power supply, the waveguide section for power propagation, and the mesh-type cavity reactor. The quartz bulb containing a dose of sulfur powder and buffer gas Ar is located in the reactor, and forced by the strongly concentrated electric field for generating and exciting the sulfur plasma. That is, the conductor tips are loaded on each inner wall of the waveguide and the reactor, and then the plasma bulb is positioned between the tips, hence focusing the strong electric field on the bulb. Furthermore the waveguide section is designed for minimizing the degradations of matching characteristics according to the variations of the electrical conductivities of plasma at the transitory phase for plasma generation, hence providing the stable operation. Finally, the 2.45 GHz aluminum waveguide system is constructed, and then experiments for emitting the visible light are performed by using 400 W-class magnetron, showing the validity of designed system.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.12
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• pp.1300-1305
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• 2014

Equivalent circuits for the waveguide probe with H-shaped small aperture, as a key ingredient of near field microwave microscope, is described along with a working principle of the probe. Small rectangular or circular aperture in comparison with the wavelength behaves like the inductive element. So adding the ridged structure (corresponding to capacitive component) to the small aperture allows the transmission resonance to occur. For verification, we represents the equivalent circuit descriptions for the two types, ridged aperture and cavity types. The values of obtained by use of the equivalent circuit approaches are compared with those obtained by use of the available numerical software. The results are also experimentally verified.