• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.861-866
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• 2012

Turbo-charger noise radiated from air intake part is one of the most important noise sources in diesel power plant. In this paper, intake noise control of the diesel power plant was studied using parallel baffle type silencer and concentric hole-cavity resonator simultaneously. Firstly, acoustical characteristics and attenuation performance for parallel baffle type silencer were investigated through theoretical approach and experimental method. Based on the results, optimal design of the parallel baffle silencer was suggested. Secondly, for reducing the low frequency noise contained in the intake noise, the concentric hole-type resonator was developed and the acoustic performance was verified from the test. By combining two types of silencers, it is expected that the overall insertion loss is about 50 dB. So, the combined silencer is very helpful in reducing the intake noise of diesel power plant.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.04a
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• pp.35-38
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• 2011

Damping characteristic according to acoustic cavity's geometries was investigated to control the high frequency combustion instability occurring in the Liquid Rocket Combustion Chamber by experimental test and linear analysis. Its diameter was determined as a design parameter and its orifice length and diameter were appointed as fixed parameter in this study. Result shows that the damping capacity has been almost constant through all the experiments despite using the same orifice and helmholtz resonators which have different volume.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.5
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• pp.126-135
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• 1995

An exhaust muffler is one of the simple and effective means to meet the demand for a quiet vehicle, and it deserves a close attention to effectively reduce the engine noise. The transfer function technique is one of the tools that have been used to analyze the noise characteristics of the exhaust muffler. In this paper we obtained a transfer function using the forward-going and backward-going components of sound pressure in the exhaust muffler, which is compatible wiht lattice filter algorithm. This form of transfer function is obtained for the basic elements of a muffler, such as uniform tube, open termin- ation, closed termination, anechoic termination, expansion, contraction, extended-tube resonator, hole, Helmholtz resonator, and concentric hole-cavity resonator. The results are combined to produce the transfer function of various types of mufflers. With this transfer function we calculate the transmission and insertion losses of mufflers, and examined the effects of various design parameters. Comparisons were made between the calculation and experimental results, which showed a good agreement, and we conclude that the transfer function of lattice form can be used to analyze the noise characteristics of the exhaust mufflers.

• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.297-302
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• 1997

A hemiconfocal resonator equipped with an intra-cavity adjustable aperture and a beam splitter has been studied experimentally to achieve a controlled low beam divergence operation in a vapor laser system. The dependences of output characteristics both on the aperture diameter and on the angle of beam splitter have been investigated. By adjusting the aperture diameter from 14mm to 2mm to 2mm, we were able to reduce the beam divergence from 3.1 mrad to 0.25 mrad and achieved the 8-times increase in the far-field power density.

• Journal of KSNVE
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• v.8 no.6
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• pp.1113-1120
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• 1998

For an analysis of some Helmholtz resonators, it is likely to be more appropriate to consider acoustic field within cavity than just the 1-DOF analogous model. However, a design method that considers increased parameters than the lumped model. is not a trivial process due to the trade-off effect among the parameters. In this paper. the genetic algorithm. one of the optimization technique that rapidly converges to global fittest solution and robust convergence. is applied to the design process of Helmholtz resonators. Results show that the genetic algorithm can be successfully and efficiently used to find the resonant frequencies for both lumped model and distributed model.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.4
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• pp.28-37
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• 2002

Acoustic behavior in combustion chamber with acoustoc cavity is numerically investigated by adopting linear acoustic analysis. Helmholtz-type resonator is employed as a cavity model to suppress acoustic instability passively. The tuning frequency of acoustic cavity is adjusted by varying the sound speed in acoustic cavity. Through harmonic analysis, acoustic pressure responses of chamber to acoustic oscillating excitation are shown and the resonant acoustic modes are identified. Acoustic damping effect of acoustic cavity is quantified by damping factor. As the tuning frequency approaches the target frequency of the resonant mode to be suppressed, mode split from the original resonant mode to lower and upper modes appears and thereby damping effect is degraded significantly. Considering mode split and damping effect as a function of tuning frequency, it is desirable to make acoustic cavity tuned to maximum frequency of those of the possible splitted upper modes.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.10 no.2
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• pp.267-276
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• 1999

A 2 stage 6-pole bandpass filter (BPF) is designed and implemented by using K-band triple-mode cavity. The BPF has an 100MHz bandwidth at the center frequency of 18.5GHz and the response of the filter is Chebyshev function. The cavity filter uses two orthogonal $TE_{113}$ modes and one $TM_{012}$ mode. To obtain a Chebyshev response, the intercavity coupling between the adjacent cavities is accomplished by H-field component of TE modes parallel to slot plate. In this paper, the size and location of intercavity slot are determined by the detailed coupling equation from H-field of TE resonant modes in circular cavity. The measured results agree well with the theoretical one.

• The Journal of the Acoustical Society of Korea
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• v.1 no.1
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• pp.76-81
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• 1982

To get minimum noise level by making full use of the constrained geometric space and being compatible with the minimum pressure-drop condition, 3-pipe through-flow system is designed by inserting a new pipe which is shaped a resonator in the cavity of 2-pipe system. As a result of the 1/3-octave-band frequency analysis for the noise reduction characteristics, this system is proved to have good sound attenuation effect in the high frequency region, so that it is found to be a useful component of a muffler.

• Journal of the Optical Society of Korea
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• v.2 no.1
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• pp.30-33
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• 1998

We present the analysis of phase-shifted fiber Bragg gratings by coupled-mode equations. The transmission is expressed as that of a Fabry-Perot resonator with complex reflectance and complex transmittance. The transmission spectrum, the effective cavity length, and the behaviors with different phase-shifts are investigated. A very flattered transmission peak is obtained by introducing three phase-shifts in a grating.