• 약학회지
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• 제37권1호
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• pp.76-83
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• 1993

The changes in discharge current, emission and/or oscillation frequency of the electric oscillation of a glow discharge are the potential sensitive measure of the concentration of an impurity in the argon plasma supporting gas. A single jet enhanced glow discharge has been interfaced with the gas chromatograph via 1/8" O.D. tube with a heating pad to study the changes in discharge current. To investigate the optimum operating conditions of the glow discharge system as detector for gas chromatography, pressure, gas flow rate, discharge current, distance between the anode and the cathode have been studied.

• 한국세라믹학회지
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• 제39권4호
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• pp.409-412
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• 2002

대기압 하에서 정상적으로 저온 플라스마가 발생 가능한 장치를 개발했다. 개발한 장치는 접지전극을 유전체로 피복한 용량결합형 전극구조로 되어 있다. rf(13.56 M Hz)을 여기 원으로서 사용한 아르곤(Ar) 또는 헬륨(He)은 플라스마 가스로서 사용했다. 발생한 플라스마는 발광분광법, 플로브 진단법에 의해 특성을 검토했다. 그 결과 전자온도>여기온도>가스온도 관계에 있는 비평형 상태의 플라스마였다. 본 장치를 사용하여 발생한 플라스마에 반응가스(CF4)을 첨가해서 대기 개방 계에서 Si(100)식각($1.5{\mu}m$/min)에 적용하여 높은 처리속도를 실현했다.

• 한국세라믹학회지
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• 제42권6호
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• pp.425-431
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• 2005

Line Shaped Solid Oxide Fuel Cell (SOFC) with multilayered structure has been fabricated via direct-writing process. The cell is electrolyte of Ni-YSZ cermet anode, YSZ electrolyte and LSM cathode. They were processed into pastes for the direct writing process. Syringe filled with each electrode and electrolyte paste was loaded into the computer-controlled robe-dispensing machine and the paste was dispensed through cylindrical nozzle of 0.21 mm in diameter under the air pressure of 0.1 tow onto a moving plate with 1.22 mm/s. First of all, the anode paste was dispensed on the PSZ porous substrate, and then the electrolyte paste was dispensed. The anode/electrolyte and the PSZ substrate were co-fired at $1350^{\circ}C$ in air atmosphere for 3 h. The cathode layer was similarly dispensed and sintered at $1200^{\circ}C$ for 1 h. All the electrode/electrolyte lines were visually aligned during the direct writing process. The effective reaction area of fabricated SOFC was $0.03 cm^2$, and the thickness of anode, electrolyte and cathode was 20 $\mu$m, 15 $\mu$m, and 10 $\mu$m, respectively. The single line-shaped SOFC fabricated by direct-writing process exhibited OCV of 0.95 V and maximum power density of $0.35W/cm^2$ at $810^{\circ}C$.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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• pp.1038-1041
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• 2003

In the paper, we investigated silicon surface microstructures formed by reactive ion etching in hollow cathode system. Wet anisotropic chemical etching technique use to form random pyramidal structure on <100> silicon wafers usually is not effective in texturing of low-cost multicrystalline silicon wafers because of random orientation nature, but High density hollow cathode plasma system illustrates high deposition rate, better film crystal structure, improved etching characteristics. The etched silicon surface is covered by columnar microstructures with diameters form 50 to 100nm and depth of about 500nm. We used $SF_{6}$ and $O_{2}$ gases in HCP dry etch process. This paper demonstrates very high plasma density of $2{\times}10^{12}$ $cm^{-3}$ at a discharge current of 20 mA. Silicon etch rate of 1.3 ${\mu}s/min$. was achieved with $SF_{6}/O_{2}$ plasma conditions of total gas pressure=50 mTorr, gas flow rate=40 sccm, and rf power=200 W. Our experimental results can be used in various display systems such as thin film growth and etching for TFT-LCDs, emitter tip formations for FEDs, and bright plasma discharge for PDP applications. In this paper we directed our study to the silicon etching properties such as high etching rate, large area uniformity, low power with the high density plasma.

• 한국수소및신에너지학회논문집
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• 제24권2호
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• pp.160-171
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• 2013

$LiNi_{1/3}Co_{1/3}Mn_{1/3}O_2$ powder for cathode materials in lithium rechargeable batteries was treated by atmospheric plasma containing hydrogen to investigate the relationship between charge/discharge performance and physical/chemical changes of materials. Hydrogen plasma at atmosphere pressure was irradiated on the surface of active materials, and the change for their crystal structure, surface morphology, and chemical composition were observed by XRD, SEM-EDS and titration method, respectively. The crystal structure and surface morphology of $H_2$ plasma-treated powders were not changed but their chemical compositions were slightly varied. For charge/discharge test, $H_2$ plasma affected initial capacity and rate capability of active materials but continuous cycling was not subject to plasma treatment. Therefore, it was observed that $H_2$ plasma treatment affected the surface of materials and caused the change of chemical composition.

• 전기화학회지
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• 제8권1호
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• pp.37-41
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• 2005

Ar공정 분압에 따라 스퍼터링된 $LiCoO_2$박막 양극의 $400^{\circ}C$저온 열처리를 통한 전기화학적 및 미세구조적 특성을 연구하였다. Ar분압이 변화함에 따라 양극 박막의 미세구조 및 조성이 변화하였으며, Ar분압이 증가할수록 $LiCoO_2$ 박막의 안정성 및 전기화학적 특성이 개선되었다. 순환전류전위법 및 정전류 충방전 시험에 의해 전극반응의 가역성 및 안정성 등을 고찰하였으며, 박막의 조성, 결정성, 표면 특성 등 물리적 특성은 ICP-AES, XRD, SEM 및 AFM을 통해 분석하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.547-547
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• 2013

This paper presents the understandings carried out for the installation of the hydrogen reservoir of the multi-gap pseudospark switch under developing for the accelerator applications. As a cold cold cathode switch, the pseudospark switch could replace the thyratron switch which has hot cathode and being used well currently in the high power field such as laser and accelerator applications. Especially in the klystron modulator, the key component is a switch which mostly defines the jitter and the instability of the modulator system. To get the less jitter and the instability, we need to find proper range of the pressure for the gas discharge inside gas switch. This could be achieved by the understanding of the characteristic of the nonevaporable getter (NEG) which is used as a hydrogen reservoir for the switch. Therefore we verified the characteristics of the NEG (St 172, Saes) and its installation in the switch. Finally we controlled the getter to find best pressure point for the pseudospark switch.

• 대한금속재료학회지
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• 제49권4호
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• pp.342-347
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• 2011

We fabricated the silicon nanodots using the low pressure chemical vapor deposition technique to investigate their electron field emission characteristics. Atomic force microscope measurements performed for the silicon nanodot samples having various process parameters, such as, deposition time and deposition pressure, revealed that the silicon nanodots with an average size of 20 nm, height of 5 nm, and density of $1.3\;{\times}\;10^{11}\;cm^{-2}$ were easily formed. Electron field emission measurements were performed with the silicon nanodot layer as the cathode electrode. The current-voltage curves revealed that the threshold electric field was as low as $8.3\;V/{\mu}m$ and the field enhancement factor reached as large as 698, which is compatible with the silicon cathode tips fabricated by other techniques. These electron field emission results point to the possibility of using a silicon-based light source for display devices.

• Applied Microscopy
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• 제47권3호
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• pp.86-94
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• 2017

In this study, we will describe a new design of carbon nanotubes tip. Single-walled carbon nanotubes produced using high-pressure CO over Fe particles (HiPCO) at CNI, Houston, TX used in this study. These tips were manufactured by employing a drawing technique using glass puller. Field electron microscopies with tips (cathode) to screen (Anode) separation of ~10 mm was used to characterize the electron emitters. The system was evacuated down to base pressure of (${\sim}10^{-8}$ mbar) when baked at up to (${\sim}200^{\circ}C$) over night. An electron field emission patterns, as well as current versus voltage characteristics and Fowler-Nordheim plots, are discussed.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2005년도 춘계학술대회
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• pp.353-356
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• 2005

We developed a dynamic model of PEM fuel cell system which can analyze its transient response to dynamic load current. System components such as compressor, air cooler, humidifier, and stack were modeled based on their dynamic equations and performance maps by using Matlab Simulink platform. Through this simulation model, dynamic characteristics of fuel cell system including oxygen excess rat io, stack voltage, and system efficiency were shown. In addition to that, we briefly analyzed the humidity effect on cathode pressure and system efficiency, expecting that this model can be further used to optimize fuel cell system parameters just like operating pressure and temperature, humidity and oxygen excess ratio.