• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.14-21
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• 2010

Ge is one of the attractive channel materials for the next generation high speed metal oxide semiconductor field effect transistors (MOSFETs) due to its higher carrier mobility than Si. But the absence of a chemically stable thermal oxide has been the main obstacle hindering the use of Ge channels in MOS devices. Especially, the fabrication of gate oxide on Ge with high quality interface is essential requirement. In this study, $HfO_xN_y$ thin films were prepared by plasma-enhanced atomic layer deposition on Ge substrate. The nitrogen was incorporated in situ during PE-ALD by using the mixture of nitrogen and oxygen plasma as a reactant. The effects of nitrogen to oxygen gas ratio were studied focusing on the improvements on the electrical and interface properties. When the nitrogen to oxygen gas flow ratio was 1, we obtained good quality with 10% EOT reduction. Additional analysis techniques including X-ray photoemission spectroscopy and high resolution transmission electron microscopy were used for chemical and microstructural analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.335-335
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• 2014

Over the past several years, transparent conducting oxides have been extensively studied in order to replace indium tin oxide (ITO). Here we report on fluorine doped zinc tin oxide (FZTO) films deposited on glass substrates by radio-frequency (RF) magnetron sputtering using a 30 wt% ZnO with 70 wt% SnO2 ceramic targets. The F-doping was carried out by introducing a mixed gas of pure Ar, CF4, and O2 forming gas into the sputtering chamber while sputtering ZTO target. Annealing temperature affects the structural, electrical and optical properties of FZTO thin films. All the as-deposited FZTO films grown at room temperature are found to be amorphous because of the immiscibility of SnO2 and ZnO. Even after the as-deposited FZTO films were annealed from $300{\sim}500^{\circ}C$, there were no significant changes. However, when the sample is annealed temperature up to $600^{\circ}C$, two distinct diffraction peaks appear in XRD spectra at $2{\Theta}=34.0^{\circ}$ and $52.02^{\circ}$, respectively, which correspond to the (101) and (211) planes of rutile phase SnO2. FZTO thin film annealed at $600^{\circ}C$ resulted in decrease of resistivity $5.47{\times}10^{-3}{\Omega}cm$, carrier concentration ~1019 cm-3, mobility~20 cm2 V-1s-1 and increase of optical band gap from 3.41 to 3.60 eV with increasing the annealing temperatures and well explained by Burstein-Moss effect. Change of work function with the annealing temperature was obtained by ultraviolet photoemission spectroscopy. The increase of annealing temperature leads to increase of work function from ${\phi}=3.80eV$ (as-deposited FZTO) to ${\phi}=4.10eV$ ($600^{\circ}C$ annealed FZTO) which are quite smaller than 4.62 eV for Al-ZnO and 4.74 eV for SnO2. Through X-ray photoelectron spectroscopy, incorporation of F atoms was found at around the binding energy of 684.28 eV in the as-deposited and annealed FZTO up to 400oC, but can't be observed in the annealed FZTO at 500oC. This result indicates that F atoms in FZTO films are loosely bound or probably located in the interstitial sites instead of substitutional sites and thus easily diffused into the vacuum from the films by thermal annealing. The optical transmittance of FZTO films was higher than 80% in all specimens and 2-3% higher than ZTO films. FZTO is a possible potential transparent conducting oxide (TCO) alternative for application in optoelectronics.

• Analytical Science and Technology
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• v.25 no.5
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• pp.265-272
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• 2012

Okamoto cavity was modified to generate high power (2.45 GHz, 2 kW) He, N2 and Ar plasmas with WR-340 waveguide. Many factors which influence to the plasma generation were optimized and investigated for the spectroscopic properties of the He plasma generated. Some of the important factors are the diameter of the inner conductor, the distance between the inner and outer conductors and the distance between the tip of the inner conductor and the torch. After optimization for the He, two torches (a commercial mini torch for ICP and a tangential flow torch made locally) were compared and showed similar results for the helium plasma gas flow of 25 L/min~30 L/min. A tall torch (extended) was used to block the air in-flow and reduced the background intensity at 340 nm region (NH band). Emission intensity was measured for determination of halogen element in the aqueous solution with power and carrier gas flow rate. Electron number density and the excitation temperature were on the order of $3.67{\times}10^{11}/cm^3$ and 4,350 K, respectively. These values are similar or a bit smaller than other microwave plasmas. It has been possible to analyze aqueous samples. The detection limit for Cl (479.45 nm) was obtained to be 116 mg/L and needs analytical optimization for the better performance.

• Korean Chemical Engineering Research
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• v.48 no.2
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• pp.185-192
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• 2010

The chemical-looping combustion(CLC) has advantages of no energy loss for separation of $CO_2$ without $NO_x$ formation. This CLC system consists of oxidation and reduction reactors where metal oxides particles are circulating through these two reactors. In the present study, the reaction kinetic equations of iron oxide oxygen carriers supported on bentonite have been determined by the shrinking core model. Based on the reactivity data, design values of solid circulation rate and solids inventory were determined for the rector. Two types of interconnected fluidized bed systems were designed for CLC application, one system consists of a riser and a bubbling fluidized bed, and the other one has a riser and two bubbling fluidized beds. Solid circulation rates were varied to about $30kg/m^2s$ by aeration into a loop-seal. Solid circulation rate increases with increasing aeration velocity and it increases further with an auxiliary gas flow into the loop-seal. As solid circulation rate is increased, solid hold up in the riser increases. A typical gas leakage from the riser to the fluidized bed is found to be less than 1%.

• Korean Chemical Engineering Research
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• v.48 no.2
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• pp.244-252
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• 2010

The objective of this study is to assess feasibility of simultaneous analysis for trace multi-components odorous and volatile organic compounds using a Triple-bed adsorbent tube with a thermal desorber and GC-MS. Triple-bed adsorbent tube is 3 bed packed Tenax-TA with small amount of Carbopack B and Carbosieve SIII in order of adsorption strength in a tube. The operating conditions of GC-MS was possibly able to and effectively detect high volatile and low molecular weight compounds at the mass range of 20~350 m/z using a below impurity 1ppm of Helium carrier gas, of which quantitatively analyzed by target ion extracts. According to the experiment, $C_1{\sim}C_5$ of 14 components; sulfur containing compounds(2), ketones(2), alcohols(4) and aldehydes(6) were simultaneously analyzed with recoveries of 99%, and good repeatability and linearity. High volatile and low molecular weight compounds such as methyl alcohol and acetaldehyde can be safely quantified with high recovery at a condition of 50mL/min of flow rate, below 2L of adsorption volume, and 45% of relative humidity. Target ion extract can also simultaneously quantify multicomponents with odorous and volatile organic compounds in an occasion of piled up two peaks.

• Journal of Sensor Science and Technology
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• v.7 no.4
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• pp.254-262
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• 1998

Multilayer Langmuir-Blodgett (LB) films coated on quartz crystal microbalance (QCM) of octa-substituted metallophhtalocyanines ($MPc(OEH)_8$, M = Cu, Co, and Sn) and dihydrogen phthalocyanines ($H_2Pc(OEH)_8$) were used to quantify $NO_2$ concentrations. They were exposed to various concentrations of $NO_2$ in dry $N_2$. Among the four phthalocyanines we tested, the metal-free $H_2Pc(OEH)_8$ was observed to be most sensitive to $NO_2$. However, its LB film showed a partially irreversible behavior, that is part of the frequency change due to $NO_2$ adsorption could not be recovered even after purging with pure $N_2$ gas for an extended period. Examining the spectra of NMR and FTIR revealed fact that the irreversible portion of frequency change was due to ether groups in the linkage between side chains and the Pc unit. In order to remove the effect of such initial deactivation, on $NO_2$ quantification experiment, a freshly fabricated LB film was treated at a high concentration of $NO_2$ so that the ether sites were saturated. A pretreated LB film showed a reproducible performance for repeated uses. The $CuPc(OEH)_8$ LB film showed a satisfactory sensing performance down to as low as 4 ppm. For the $H_2Pc(OEH)_8$ LB film, the lower detection limit was found to be 35ppb of $NO_2$. In order to make the experimental condition more realistic, the carrier gas, dry nitrogen, was replaced by air. It was observed that the presence of oxygen, a weak electron acceptor, reduced the sensitivity and thus increased the sensing limit to hundreds of ppb. Results of experiments with moisture added showed that the interference of moisture was quite severe.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.131-131
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• 2013

A single-layer graphene has been uniformly grown on a Cu surface at elevated temperatures by thermally processing a poly(methyl methacrylate) (PMMA) film in a rapid thermal annealing (RTA) system under vacuum. The detailed chemistry of the transition from solid-state carbon to graphene on the catalytic Cu surface was investigated by performing in-situ residual gas analysis while PMMA/Cu-foil samples being heated, in conjunction with interrupted growth studies to reconstruct ex-situ the heating process. The data clearly show that the formation of graphene occurs with hydrocarbon molecules vaporized from PMMA, such as methane and/or methyl radicals, as precursors rather than by the direct graphitization of solid-state carbon. We also found that the temperature for vaporizing hydrocarbon molecules from PMMA and the length of time the gaseous hydrocarbon atmosphere is maintained, which are dependent on both the heating temperature profile and the amount of a solid carbon feedstock are the dominant factors to determine the crystalline quality of the resulting graphene film. Under optimal growth conditions, the PMMA-derived graphene was found to have a carrier (hole) mobility as high as ~2,700 cm2V-1s-1 at room temperature, superior to common graphene converted from solid carbon.

• Journal of the Society of Naval Architects of Korea
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• v.58 no.4
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• pp.262-270
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• 2021

Consumption of Liquefied Natural Gas (LNG) has increased due to environmental pollution; therefore, the need for LNG carriers can efficiently transport large quantities of LNG, is increased. In various types of LNG Cargo Containment System (CCS), Membrane-type MARK-III composed of composite materials is generally employed in the construction of an LNG carrier. Among composite materials in a Mark-III system, glass-fiber composites act as a secondary barrier to prevent the inner hull structure from leakage of LNG when the primary barrier is damaged. Nevertheless, several cases of damage to the secondary barriers have been reported and if damage occurs, LNG can flow into the inner hull structure, causing a brittle fracture. To prevent those problems, this study conducted the applicability assessment of composite material manufactured by bonding glass-fiber and aluminum with epoxy resin and increasing layer from three-ply (triplex) to five-ply (pentaplex). Tensile tests were performed in five temperature points (25, -20, -70, -120, and -170℃) considering temperature gradient in CCS. Scanning Electron Microscopy (SEM) and Coefficient of Thermal Expansion (CTE) analyses were carried out to evaluate the microstructure and thermos-mechanical properties of the pentaplex. The results showed epoxy resin and increasing layer number contributed to improving the mechanical properties over the whole temperature range.

• Journal of the Korean Chemical Society
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• v.64 no.6
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• pp.327-333
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• 2020

Performance of a portable GC that can be utilized for the real time determination of volatile organic compounds in air was evaluated. It employs purified/compressed ambient air as the carrier gas eliminating the need for high pressure gas tanks. The compact system with dimensions of 35 × 26 × 15 ㎤ and weight of 5 kg is powered by either a 24 V DC external adapter or battery pack. Chromatograms of the mixture sample including benzene, toluene, ethylbenzene, and oxylene at concentrations of 1 ppmv and 20 ppmv represent a good reproducibility: 3.79% and 0.48% relative standard deviations (RSDs) for peak area variations; 0.40% and 0.08% RSDs for retention times. The method detection limit was 0.09 ppmv. A 30 m long, 0.28 mm I.D. column operated at an optimal condition yielded a peak capacity of 61 with good resolution for a 10 min isothermal analysis. The relative standard deviations (RSD) of the peak area variations and retention times during consecutive measurements over 27 h were less than 2.4%RSD and 0.5%RSD, respectively. Thus, this instrument makes it suitable for continuous and field analysis of low-concentration VOC mixtures in the indoor/outdoor environment as well as the spillage accident of hazardous chemicals.

• Explosives and Blasting
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• v.40 no.3
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• pp.19-32
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• 2022

Hydrogen is a fuel having the highest energy compared with other common fuels. This means hydrogen is a clean energy source for the future. However, using hydrogen as a fuel has implication regarding carrier and storage issues, as hydrogen is highly inflammable and unstable gas susceptible to explosion. Explosions resulting from hydrogen-air mixtures have already been encountered and well documented in research experiments. However, there are still large gaps in this research field as the use of numerical tools and field experiments are required to fully understand the safety measures necessary to prevent hydrogen explosions. The purpose of this present study is to develop and simulate 3D numerical modelling of an existing hydrogen gas station in Jeonju by using handheld LiDAR and Ansys AUTODYN, as well as the processing of point cloud scans and use of cloud dataset to develop FEM 3D meshed model for the numerical simulation to predict peak-over pressures. The results show that the Lidar scanning technique combined with the ANSYS AUTODYN can help to determine the safety distance and as well as construct, simulate and predict the peak over-pressures for hydrogen refueling station explosions.