• Journal of Mechanical Science and Technology
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• v.18 no.10
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• pp.1772-1781
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• 2004

The mechanical as well as tribological characteristics of coating films as thin as a few nm become more crucial as applications in micro-systems grow. Especially, the amorphous carbon film has a potential to be used as a protective layer for micro-systems. In this work, quantitative evaluation of nano-indentation, scratching, and wear tests were performed on the 7nm thick amorphous carbon film using an Atomic Force Microscope (AFM). It was shown that AFM-based nano-indentation using a diamond coated tip can be feasibly utilized for mechanical characterization of ultra-thin films. Also, it was found that the critical load where the failure of the carbon film occurred was about 18${\mu}$N by the ramp load scratch test. Finally, the wear experimental results showed that the quantitative wear rate of the carbon film ranged 10$\^$-9/～10$\^$-8/ ㎣ /N cycle. These experimental methods can be effectively utilized for a better understanding the mechanical and tribological characteristics at the nano-scale.

• Proceedings of the Materials Research Society of Korea Conference
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• 2007.11a
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• pp.72.1-72.1
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• 2007

• Journal of Industrial Technology
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• v.33 no.A
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• pp.67-72
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• 2013

CNT(carbon nanotube) humidity sensors with plasma treated electrodes exhibit a much faster response time and a higher sensitivity to humidity, compared to untreated CNT and porous Cr electrodes. These results may be partially due to their percolated pore structure being more accessible for water molecules and for expending the diffusion of moisture to the polyimide sensing film, and partially due to the oxygenated surface of CNT films. This paper shows a plasma process effect and selectivity characteristics of CNT film humidity sensor.

• Corrosion Science and Technology
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• v.16 no.4
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• pp.175-182
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• 2017

Galvanic current measurement, polarization curves, electrochemical impedance spectroscopy and weight loss test were used to study the corrosion behavior of carbon steel before and after carbon fibers coupling to the carbon steel in simulated concrete pore solutions, and the film composition on the steel surface was analyzed using XPS method. The results indicate that passive film on steel surface had excellent protective property in pore solutions with different pH values (13.3, 12.5 and 11.6). After coupling with carbon fibers (the area ratio of carbon steel to carbon fiber was 12.31), charge transfer resistance $R_{ct}$ of the steel surface decreased and the $Fe^{3+}/Fe^{2+}$ value in passive film decreased. As a result, stability of the film decreased and the corrosion rate of steel increased. Decreasing of the area ratio of steel to carbon fiber from 12.3 to 6.15 resulted in the decrease in $R_{ct}$ and the increase in corrosion rate. Especially in the pore solution with pH 11.6, the coupling leads the carbon steel to corrode easily.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.171.1-171.1
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• 2015

Carbon nanotube emitters is very promising electron emitter for electron beam applications. We introduced the carbon nanotube electron beam (C-beam) exposure technic using triode structure. As a source, the electron beam emit from CNT emitters placed at the cathode by high electric field. Through the gate mesh, with high accelerating energy, the electron can be extracted easily and impact at the anode plate. For thin film modification, after the C-beam exposure on the amorphous silicon thin film, we found phase changes and it showed a high crystallinity from the Raman measurement. We expect that this crystallized film will be a good candidate as a new active layer of TFT.

• Transactions on Electrical and Electronic Materials
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• v.5 no.3
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• pp.98-103
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• 2004

The plasma properties in the facing target sputtering system during carbon nitride film deposition have been investigated. The ionized nitrogen species of the deposited films increased with increasing discharge current and were independent of the nitrogen pressure. The nitrogen content in the films did not vary significantly with the variation of nitrogen gas. The electron temperature was high close to that in the inter-cathode region, reduced as the electrons moved away from the most intense region of magnetic confinement and increased again outside this region. Calculations based on the film composition showed that the ion to carbon atom ratio at the substrate was about 50 and that the ratio between the ionized and neutral nitrogen molecules was about 0.25.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.381.1-381.1
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• 2014

In this study, we investigated the deposition behavior and the etch resistivity of plasma polymerized carbon hardmask (ppCHM) film with the variation of process temperature. The etch resistivity of deposited ppCHM film was analyzed by thickness measurement before and after direct contact reactive ion etching process. The physical and chemical properties of films were characterized on the Fourier transform infrared (FT-IR) spectroscope, Raman spectroscope, stress gauge, and ellipsometry. The deposition behavior of ppCHM process with the variation of temperature was correlated refractive index (n), extinction coefficient (k), intrinsic stress (MPa), and deposition rate (A/s) with the hydrocarbon concentration, graphite (G) and disordered (D) peak by analyzing the Raman and FT-IR spectrum. From this experiment we knew an optimal deposition condition for structure of carbon hardmask with the higher etch selectivity to oxide. It was shown the density of ppCHM film had 1.6~1.9 g/cm3 and its refractive index was 1.8~1.9 at process temperature, $300{\sim}600^{\circ}C$. The etch selectivity of ppCHM film was shown about 1:4~1:8 to undoped siliconoxide (USG) film (etch rate, 1300 A/min).

• Bulletin of the Korean Chemical Society
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• v.30 no.2
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• pp.467-470
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• 2009

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.31.2-31.2
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• 2009

In this research, single walled carbon nano-tube film was manufactured with spray coating method on glass for application as transparent heat element. SWNTs solution to be used for spraying is obtained by dispersion of 0.01 wt% purified SWNTs in dimethylformamide (DMF) solution through ultrasonification and centrifugation. The transmittance and sheet resistance of SWNTs film were determined by the number of spray injection. Manufactured SWNTs film will have sheet resistance range of $200\;\Omega/\square-900\;\Omega/\square$ at transmittance range of 70-90 %. Heat generation characteristic of SWNTs film was measured by applying constant DC voltage of 15V. The result confirmed that SWNTs film with sheet resistance of $200\;\Omega/\square$ reaches surface temperature of $80^{\circ}C$ within several seconds. In addition, PET coating film was coated on top of the SWNTs film by using laminator in order to solve weak adhesive property of the spray coated SWNTs film on the substrate as well as to maintain its electrical and optical properties.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.378-379
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• 2006

The carbon thin film was developed by the CVD method using the carbon source of toluene with the stream of argon gas at $800{\sim}1100^{\circ}C$ for 1 hour. Developed carbon thin films have the material loading of 0.27 mg($800^{\circ}C$), 0.80 mg($900^{\circ}C$), 2.3 mg($1000^{\circ}C$), and 2.9 mg($1100^{\circ}C$) for the disk of 15 mm diameter on single side. The characteristics of carbon thin film as the anode of thin film battery were evaluated using Li|C coin cell. Li|C($1100^{\circ}C$) coin cell has the first specific discharge and charge capacity of 953 mAh/g and 374 mAh/g, respectively, resulting the first Ah efficiency of 39.3 %. Capacity retention of the 5th cycle was 93.2 % indicating good cycleability. The carbon thin film prepared by CVD shows good specific capacity and cycleability, but low Ah efficiency.