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http://dx.doi.org/10.5012/bkcs.2009.30.2.467

Correlation between Potential Barrier and FTIR Spectra in SiOC Film with the C-O Bond of sp3 Structure  

Oh, Teresa (School of Electronics and Information Engineering, Cheongju University)
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Keywords
SiOC film; Chemical shift; FTIR spectra; Carbon content; $sp^{3}$ carbon;
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