• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.1
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• pp.31-43
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• 1993

Thermal behavior and $O_{2}$ plasma effects on residue and penetrated impurities formed by reactive ion etching (RIE) in CHF$_{3}$/C$_{2}$F$_{6}$ have been investigated using X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) techniques. Decomposition of polymer residue film begins between 200-300.deg. C, and above 400.deg. C carbon compound as graphite mainly forms by in-situ resistive heating. It reveals that thermal decomposition of residue can be completed by rapid thermal anneal above 800.deg. C under nitrogen atmosphere and out-diffusion of penetrated impurities is observed. The residue layer has been removed with $O_{2}$ plasma exposure of etched silicon and its chemical bonding states have been changed into F-O, C-O etc.. And $O_{2}$ plasma exposure results in the decrease of penetrated impurities.

• KSBB Journal
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• v.11 no.5
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• pp.524-528
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• 1996

Bacterial degradation of 4-chloro-2-methylphenoxyacetic acid (MCPA) was studied in column reactors under conditions approximating a fluidized bed system, with granular activated carbon (GAC) as a support matrix. A mixed bacterial culture of MCPA-degrading bacteria was used as an inoculum to develop a biofilm on GAC. Initially, adsorption of MCPA by GAC and blofilm formation on GAC were examined. MCPA degradation was evaluated with a batch and continuous mode of operation of the GAC fixed-film column reactors. In the batch operations, complete degradation of MCPA was achieved during the incubation period. Partial degradation of MCPA occurred in the continuous operations and MCPA degradation was dependent on the feeding rate of MCPA solution.

• Journal of Sensor Science and Technology
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• v.23 no.3
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• pp.170-172
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• 2014

$CO_2$ sensor was used only one solid electrolyte in many cases. To improve the sensing characteristics of $CO_2$ sensors, solid electrolyte $CO_2$ sensor has been developed by bi-electrolyte type sensor using Na-Beta-alumina and YSZ. However, in many further studies, bi-electrolyte type sensor was made by pellet pressed by press machine and additional treatment for formation of interface. In the aspect of mass production, using thick film and additional treatment is not suitable. In this study, $CO_2$ sensor was fabricated by bi-electrolyte structure which was made by an NBA paste layer deposited on YSZ pellet and fired at $1650^{\circ}C$ for 2 hour. The formation of stable interface between YSZ and NBA were confirmed by SEM image. When the type IV electrochemical cell arrangement represented by $CO_2,O_2,Pt{\mid}Li_2CO_3-CaCO_3{\parallel}NBA{\parallel}YSZ{\mid}O_2,Pt$ is used to measure the $CO_2$ concentration in air. This sensor EMF should depend only on the concentration of $CO_2$ by logarithmic. Also, sensor shows $P_{CO_2}$ and EMF relationship like nerstian reaction at a temperature of $450^{\circ}C$.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.498-503
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• 2016

Many types of robot systems are used in the mass production line of thin film solar cells and flat panel displays. There are some issues such as the deflection and the vibration of the end-effector because robots handle large and heavy substrates at high speed. Heavy payload and high speed cause much vibration because the end-effector (fork) is made of carbon fiber reinforced polymer because of its light weightiness and sufficient stiffness. This study performs a dynamic simulation of an 8.5G solar cell substrate handling robot, including rigid and flexible bodies and a vibration controller. The fifth polynomial trajectory and the zero vibration derivative input shaping algorithm are applied. The vibration reduction is also proved in the experiments.

• Applied Chemistry for Engineering
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• v.21 no.5
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• pp.500-504
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• 2010

The PU-g-MWNTs/PU film was synthesized by simple blending method to fabricate composites which have excellent mechanical and electrical properties. PU-g-MWNTs based composite revealed much enhanced dispersity than pristine MWNTs composite because of interfacial interaction related with interfacial compatibility between polymer matrix and PU on the MWNTs surface. The electro-conductivity of composite was measured as a function of PU-g-MWNTs concentration. The results were correlated with percolation threshold theory. As a result, the critical concentration and exponent of electro-conductivity behavior was equal to 0.78 wt% and 0.945.

• Membrane Journal
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• v.18 no.3
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• pp.256-259
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• 2008

In this study, graphite or zeolite 4A was mixed with poly(acrylonitrile-butadiene-strene) (ABS) to make hybrid films, and permeation characteristics of air and water vapor through these films were investigated. In all cases, gas permeabilities of hybrid films were lower than that of pure ABS films. The permeability decrease of oxygen was slightly larger than that of nitrogen, resulting in the little decrease of $O_2/N_2$ selectivity. In addition, the water vapor transfer rates (WVTR) of hybrid films were about half of ABS film's. The decrease of permeabilities may be owing to the increase of tortuosity for diffusion in hybrid films.

• 한국신재생에너지학회:학술대회논문집
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• 2011.11a
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• pp.54.1-54.1
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• 2011

The conventional energy-production system by burning fossil fuels releases many pollutants and carbon dioxide($CO_2$) to the environment. Therefore, many countries pay attention to new and renewable energy and invest in the development of these new technologies for the future energy security. One of the most promising of these technologies is a photovoltaic system. In this study, Life Cycle Assessment(LCA) is carried out to analyse the environmental issues(e.g. global warming, abiotic resource depletion) of CdTe photovoltaic system. The spatial and temporal scope of this study was set in Korea during 2004~2005. We assumed that CdTe photovoltaic system was installed in Mokpo where the amount of solar irradiation was higher than other places in Korea. Based on the present data and some assumptions, greenhouse gas emission was 39.2g $CO_2$-eq./kWh. Therefore the electricity produced by CdTe photovoltaic system is more environmentally friendly than the conventional power generation system.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.91-91
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• 2012

We aim in synthesizing various functional thin films thinner than ~ 10 nm for environmental applications and photovoltaic devices. Atomic layer deposition is used for synthesizing inorganic thin films with a precise control of the film thickness. Several examples about application of our thin films for removing volatile organic compounds (VOC) will be highlighted, which are summarized in the below. 1) $TiO_2$ thin films prepared by ALD at low temperature ($<100^{\circ}C$) show high adsorption capacity for toluene. In combination with nanostructured templates, $TiO_2$ thin films can be used as building-block of high-performing VOC filter. 2) $TiO_2$ thin films on carbon fibers and nanodiamonds annealed at high temperatures are active for photocatalytic oxidation of VOCs, i.e. photocatalytic filter can be created by atomic layer deposition. 3) NiO can catalyze oxidation of toluene to $CO_2$ and $H_2O$ at $<300^{\circ}C$. $TiO_2$ thin films on NiO can reduce poisoning of NiO surfaces by reaction intermediates below $200^{\circ}C$. We also fabricated inverted organic solar cell based on ZnO electron collecting layers on ITO. $TiO_2$ thin films with a mean diameter less than 3 nm on ZnO can enhance photovoltaic performance by reducing electron-hole recombination on ZnO surfaces.

• Journal of the Korean Society for Heat Treatment
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• v.12 no.3
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• pp.231-239
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• 1999

Volume fraction and morphology of retained austenite, tensile properties of TRIP type high strength steel sheet with Fe-C-Si-Mn-Cu chemical composition have been investigated. The retained austenite of granular, bar and film type existing in specimen was obtained after intercritical annealing and austempering. The granular type retained austenite increased with increase of intercritical annealing and austempering temperature. With increase of intercritical annealing temperature, retained austenite and carbon contents increased. Maximum contents of retained austenite was obtained by austempering at $400^{\circ}C$. The maximum tensile strength was obtained by austempering at $450^{\circ}C$ and maximum elongation was obtained at $400^{\circ}C$. T.S${\times}$E.L value increased with increase of retained austenite contents due to the elongation strongly controlled by contents of retained austenite, but tensile strength was affected with various factors such as bainitic structure etc.

• Journal of the Korean Society for Heat Treatment
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• v.13 no.2
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• pp.91-97
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• 2000

The structure and mechanical properties of TiN and TiCN thin films deposited on STD61 steel substrates by the RF-sputtering methods has been studied by using XPS, XRD, micro-hardness tester, scratch tester, and wear-resistance tester. XPS results showed that the TiCN thin film formed with chemical bonding state. The TiN thin films grew with (111) orientation having the lowest strain energy by compressive stress, whereas the TiCN thin films grew with both (111) and (200) orientation, but (200) orientation having the lowest surface energy becomes dominant as carbon contents increase. The pre-etching treatment of substrate did not affect on the preferred orientation of thin films, but it played an important role in improving mechanical properties of thin films such as the hardness, adhesion and wear- resistance. Especially, the TiCN thin films showed the superior wear resistances due to high hardness and low friction coefficient compared with TiN thin films.